Granville-Phillips Micro-Ion 354 E Series, Инструкция по эксплуатации, Страница: 22 / 54

Chapter 4
22
Micro-Ion E Module Instruction Manual 354011, Rev. A
4.7 Reading Vacuum
Pressure
The analog output produces a voltage that represents vacuum pressure for
N
2
or air. The 0 to 10 Vdc output is in linear proportion to the logarithm of
vacuum pressure, for N
2
or air, as measured by the Micro-Ion E gauge.
• If the Micro-Ion E gauge is OFF, analog output voltage is > 10 Vdc.
• The output represents N
2
or air pressure in the measurement unit (Torr,
Pa, or mbar) that the customer has specified when ordering the module.
If the process gas is a gas other than N
2
or air, you must apply a correction
factor to determine the actual pressure for the gas that is being used.
N
2
or Air Pressure
The 0 to 10 Vdc output is in linear proportion to the logarithm of vacuum
pressure, for N
2
or air, as illustrated in Figure 4-4.
Figure 4-4 Analog Output Voltage Indicating Vacuum Pressure for N
2
or Air
Table 4-2 Conditions Indicated by Status LED
LED Behavior Condition Indicated
Solid green Micro-Ion E gauge is ON. See page 20 to turn the gauge OFF.
Solid amber Micro-Ion E gauge is OFF. See page 20 to turn the gauge ON.
Solid red • Micro-Ion E gauge fault condition. See page 40 to replace gauge assembly.
• Overpressure shutdown. Decrease pressure to alleviate overpressure condition.
Pressur
e in Torr for N
2
or air
Analog Output Voltage (Vdc)