Gatan Solarus 950, Руководство владельца и руководство пользователя, Страница: 9 / 61

Solarus 950 Owner’s Manual and User’s Guide ix
List of Figures
Figure 1 Gatan Advanced Plasma System, model Model 950 . . . . . . . . . . . . . . . .2
Figure 2 Gatan Advanced Plasma System, front-accessible components . . . . . . . . . .6
Figure 3 Gatan Advanced Plasma System, rear panel . . . . . . . . . . . . . . . . . . . .7
Figure 4 Solarus 950 rear panel gas connection detail. . . . . . . . . . . . . . . . . . . 12
Figure 5 Gas line to filter connection . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Figure 6 Two-tank cleaning configuration. . . . . . . . . . . . . . . . . . . . . . . . . 14
Figure 7 Three-tank cleaning configuration . . . . . . . . . . . . . . . . . . . . . . . . 15
Figure 8 Two-tank purging configuration . . . . . . . . . . . . . . . . . . . . . . . . . 17
Figure 9 Air testing configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Figure 10 Loading TEM holder, holder adapter, and plug . . . . . . . . . . . . . . . . . 22
Figure 11 TEM holder and adapter in place. . . . . . . . . . . . . . . . . . . . . . . . . 22
Figure 12 Top-loading SEM chamber, side view . . . . . . . . . . . . . . . . . . . . . . 23
Figure 13 Sample loaded in SEM chamber . . . . . . . . . . . . . . . . . . . . . . . . . 23
Figure 14 TEM holder-adapter with ion shield removed . . . . . . . . . . . . . . . . . . 24
Figure 15 System in idle state . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Figure 16 System initiating vacuum state . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Figure 17 System introducing gases. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Figure 18 Applying RF power to the unit . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Figure 19 Cleaning in process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Figure 20 Plasma cleaning complete . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Figure 21 Venting the chamber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Figure 22 System ready for next sample . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Figure 23 Recipe options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Figure 24 Access to Pirani gauge calibration button . . . . . . . . . . . . . . . . . . . . 45
Figure 25 Example maintenance report . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
Figure 26 Battery Location . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49