Solarus 950 Owner’s Manual and User’s Guide
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example, if you use Ar as the vent gas, the system will read much lower than 750
Torr when it is vented. This does not significantly affect normal operation of the
Solarus, and should not be a concern unless the turbo is slowing below ~ 600 Hz
while the system is pumping down.
To properly connect the vent gas line:
1.
Attach the vent gas line to the connector labeled
Vent Gas In
on the rear
panel of the cabinet (Swagelok compression fitting for 1/4” OD tube). The
Swagelok fitting is ready for a tube to be connected.
2.
The acceptable range of gas pressure is 5 – 60 psi (0.34 – 4.1 bar).
3.
Make sure the nut is finger tight.
4.
Insert the gas tubing into the fitting, making sure the tubing rests firmly on the
shoulder of the fitting.
5.
Tighten the nut 3/4 turn clockwise.
6.
Turn on the vent gas.
7.
Touch
Vacuum
, wait for the system to pump down.
8.
Touch
VENT
.
9.
Lift up gently on the specimen chamber lid. While the chamber is under vac-
uum the lid should not move. Count the time between touching the
VENT
button, and when the lid releases.
10.
If the time was significantly different than 5 sec (i.e., +/- 2 sec), adjust the reg-
ulator and repeat the test.
Testing With Air as a Plasma Gas
For situations when all of the necessary process gas cylinders are not yet avail-
able, an initial system test can be performed to confirm proper system operation.
This test uses air to ignite a pink colored plasma which is visible through the
chamber viewing window.While this plasma is not recommended for cleaning
samples, it does provide an easy method to confirm the operation of the system.
