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Gatan Product Warranty

Gatan warrants that products manufactured by Gatan shall be free of defects in materials and workmanship for the warranty period, which com-
mences at date of shipment. Gatan tests the performance of a unit as part of its final test procedure, prior to shipment from its factory. Gatan war-
rants that the unit meets Gatan’s published specifications at time of shipment from its factory. All product warranties provide, for a period of one 
year after shipment to customer, parts (excluding all normal consumable, wear, and maintenance items) and labor. For Specimen Preparation 
Equipment and Specimen Holders, Gatan will correct any defects in the instrument either by repair in our facility or replacing the defective part, 
with the shipping party responsible for shipping costs. For products which attach to the column (Cameras, DigiScan, GIF, and PEELS), travel of up 
to 100 miles from a Gatan authorized repair center (Pleasanton, CA; Warrendale, PA; Munich, GmbH; and Corby, UK) is included. Travel 
expenses for service beyond 100 miles will be charged for. 

Instruments, parts, and accessories not manufactured by Gatan will be warranted by Gatan for the specific items and periods in accordance with 
and provided by the warranty received by Gatan from the Original Equipment Manufacturer. All such accessory warranties extended by Gatan are 
limited in accordance with all the terms, conditions, and other provisions stated in this Original Equipment Manufacturer warranty. Gatan makes 
no warranty whatsoever concerning products or accessories not of its manufacture, except as noted above.

Customer Responsibilities

The customer bears the following responsibilities with regard to maintaining the warranty. The customer shall:

1.

Perform the routine maintenance and cleaning procedures at the required intervals as specified in Gatan’s operating manuals. Failure to per-
form specified maintenance will automatically void warranty.

2.

Use Gatan replacement parts. Failure to use the specified replacement parts will automatically void warranty.

3.

Use Gatan or Gatan-approved consumables.

4.

Provide Gatan authorized service representatives access to the products during normal Gatan working hours during the coverage periods to 
perform service.

5.

Provide adequate and safe working space around the products for servicing by Gatan authorized service representatives.

6.

Provide access to, and use of, all information and facilities determined necessary by Gatan to service and/or maintain the products. (Insofar as 
these items may contain proprietary or classified information, the customer shall assume full responsibility for safe-guarding and protecting 
them from wrongful use.)

Repairs and Replacements

Gatan will, at its option, either repair or replace defective instruments or components with conforming goods. Repair or replacement of products or 
parts under warranty does not extend the original warranty period. With the exception of consumable and maintenance items, the replacement parts 
or products used on instruments out of warranty are themselves warranted to be free of defects in materials and workmanship for 90 days.

Any products, part, or assembly returned to Gatan for examination or repair shall have Gatan’s prior approval, with the customer requesting a 
Returned Material Authorization (RMA) approval. This RMA and the associated RMA number may be obtained through Gatan Service or directly 
from Gatan’s Warrendale facility at 724-776-5260. If the item is not under warranty, to obtain an RMA, the customer must provide a Purchase 
Order (PO) for the repair. If the item is under warranty and the customer is requesting an expedited exchange, as may be the case for a printed cir-
cuit board, a PO will be required. A credit against this PO will be issued by Gatan upon receipt of the item as returned in accordance with the RMA 
instructions. The returned item should be shipped prepaid by the customer with the RMA number clearly marked on the exterior of the shipping 
container and on the enclosed shipping documents. If the returned item is under warranty, return transportation will be prepaid by Gatan. If the 
returned item is not under warranty, return transportation will be charged to the customer. 

Warranty Limitations

The warranty does not cover:

1.

Parts and accessories which are expendable or consumable in the normal operation of the instrument.

2.

Any loss, damage, and/or instrument malfunction resulting from shipping or storage, accident (fire, flood, or similar catastrophes normally 
covered by insurance), abuse, alteration, misuse, neglect, or breakage or abuse of parts by User.

3.

Operation other than in accordance with correct operational procedures and environmental and electrical specifications.

4.

Performance to specifications or safety of use (including X-ray emissions) if the unit is physically installed on, used in conjunction with, or 
used as part of a third party’s equipment and is not installed by a Gatan service engineer. 

5.

Performance to specifications or safety of use (including X-ray emissions) as a result of the use of Gatan’s equipment with that of a third 
party due to the third party’s product design.

6.

Modification of, or tampering with, the system.

7.

Improper or inadequate care, maintenance, adjustment, or calibration by User.

8.

User-induced contamination or leaks.

9.

Any loss, damage, and/or instruments malfunction resulting from use of User-supplied software, hardware, interfaces, or consumables other 
than those specified by Gatan.

Warranty Exclusions

In the course of normal use and maintenance, certain parts have finite lifetimes. For this reason, the consumables, wear, and maintenance parts as 
specified in Gatan’s operating manuals carry a 90-day warranty unless otherwise specified.

Post Warranty Period Support and Product Obsolescence

After the expiration of the warranty period described above, Gatan will provide service support for Gatan manufactured products at Gatan’s service 
labor rates and parts pricing in effect at the time of the repair. Gatan will continue to provide billable service support for the products for a period 
of three years after discontinuance or design obsolescence by Gatan. After this three year period, service support will be offered at the sole discre-
tion of Gatan. 

Liability Limitations

This warranty is in lieu of and excludes all other expressed or implied warranties, including (but not limited to) warranties of merchantability of 
fitness for a particular purpose. Under no circumstances will Gatan Inc. or Gatan International be liable for any direct, indirect, special, inciden-
tal or consequential damages (including lost profit) or loss of any kind, whether based on warranty, contract, tort, or any other legal theory. The 
limits of Gatan liability in any dispute shall be the price received from the purchaser for the specific equipment at issue. The laws of the state of 
Pennsylvania apply to all aspects of this warranty.

Содержание Solarus 950

Страница 1: ...tan Inc 5794 W Las Positas Blvd Pleasanton CA 94588 Tel 925 463 0200 Fax 925 463 0204 Solarus 950 Gatan Advanced Plasma System Owner s Manual and User s Guide Part Number 950 82001 July 2011 Revision...

Страница 2: ...ii Solarus 950 Owner s Manual and User s Guide...

Страница 3: ...any person or entity of such revisions or changes Copyright and Trademarks 2007 Gatan Inc The Gatan logo is a registered trademark of Gatan Inc The product names AutoFilter BioScan Clipring DigiPEELS...

Страница 4: ...l to help gatan com USA Canada Latin America Corporate Headquarters Western USA Sales Central USA Latin America Sales 5794 W Las Positas Blvd Pleasanton CA 94588 Tel 1 925 463 0200 Fax 1 925 463 0204...

Страница 5: ...49 89 358084 77 Contact mfelsmann gatan com Gatan UK 25 Nuffield Way Abingdon OX14 1RL UK Tel 44 1235 540160 Fax 44 1235 540169 Contact ukinfo gatan com Gatan France Division de ROPER Scientific SAS...

Страница 6: ...vi APS Solarus 950 Owner s Manual...

Страница 7: ...cifications 7 Gas Requirements 8 Safety and Serviceability 9 Cautionary Notes 9 Servicing 9 Installation Recommendations for Gatan Customers Flammable and Oxidizing Gases 10 Installation and Setup 12...

Страница 8: ...ving the Ion Shield 24 Operating the Gatan Advanced Plasma System 25 Theory of Operation 25 Operating Instructions 26 Creating Custom Recipes 34 Maintenance 38 Maintenance Report 46 Troubleshooting 47...

Страница 9: ...0 Figure 10 Loading TEM holder holder adapter and plug 22 Figure 11 TEM holder and adapter in place 22 Figure 12 Top loading SEM chamber side view 23 Figure 13 Sample loaded in SEM chamber 23 Figure 1...

Страница 10: ...x Solarus 950 Owner s Manual and User s Guide...

Страница 11: ...A version of this technique was adapted for EM applications by Nestor Zaluzek at Argonne National Laboratory and University of Chicago US Patent 5 510 624 dated April 23 1996 The Solarus Advanced Pla...

Страница 12: ...2 Solarus 950 Owner s Manual and User s Guide igure 1 Gatan Advanced Plasma System model Model 950...

Страница 13: ...ir probes and exhaustively verified with TEM and SEM samples in a wide variety of conditions The unique H2 O2 recipe prevents or reduces buildup of contamination after about one minute of cleaning Eve...

Страница 14: ...r SEM specimen holders For slightly faster cleaning use the left port SEM Samples A top loading chamber accepts multiple SEM stubs and large irregular shaped samples Electronics The electronics subsys...

Страница 15: ...than one minute pump down and less than a ten second vent cycle Mass Flow Controllers Mass flow controllers accurately gauge gas levels to achieve superior and repeat able cleaning results Touch Scree...

Страница 16: ...unit contains a touch screen for executing all actions two TEM holder ports and a viewing port The door to the top loading specimen chamber is on the top of the unit above the TEM holder ports All gas...

Страница 17: ...Note Dimensions The system requires a stable bench with a surface area of O 39 inches 1m in length O 24 inches 62cm in depth O 18 inches 46cm in height Clearance Allow clearance on both sides for vent...

Страница 18: ...NOTE sccm standard cubic centimeters per minute For example a 2 cubic foot 57 liter lecture bottle of H2 will last for 147 hours of continuous use An 80 cubic foot 2265 liter bottle of O2 will last fo...

Страница 19: ...AC mains cable is plugged in CAUTION High pressure cylinders can be dangerous when not properly secured Be sure all cylinders are secured according to applicable safety codes CAUTION The RF power sup...

Страница 20: ...buildup O Maintenance and Inspections Place safety critical equipment such as flam mable gas detection and grounding on a periodic calibration and test schedule Oxygen Guidance O Compressed gas cylind...

Страница 21: ...operating and off hour work shifts In addition provide employee training on proper compressed gas cylinder inspection handling hookup and deinstalla tion procedures Additional Guidance for the Solarus...

Страница 22: ...arus 950 s internal purging process cycle has been completed The clearly labeled gas inputs are located on the rear panel Figure 4 and connect directly to the input of the mass flow controllers From l...

Страница 23: ...the unit or a customer supplied 1 8 OD tube gas line The Gas 2 H2 inlet has an 0 5 micron filter attached via a short length of stain less steel tubing The gas line from the H2 regulator should be co...

Страница 24: ...sure the nut is finger tight 2 Insert the gas tubing into the fitting making sure the tubing is pressed firmly into the shoulder of the fitting 3 Tighten the nut 3 4 turn clockwise using a wrench Cle...

Страница 25: ...t the system configuration must be changed When a mass flow controller is operated on a gas other than the gas it was calibrated with a scale shift will occur in the flow reading If the orifice size i...

Страница 26: ...the multiplier for the gas you have connected e g 1 2 8 touch Apply This sets the MFC multiplier which compensates for using a gas other than the Ar gas the MFC was cali brated for at the factory 6 T...

Страница 27: ...ing process will never complete You may purge all the installed gas lines at the same time or purge the lines individually one after the other by repeating this process 8 Select Yes to confirm and fol...

Страница 28: ...gas tubing into the fitting making sure the tubing is pressed firmly into the shoulder of the fitting 4 Tighten the nut 3 4 turn clockwise using a wrench Connecting Vent Gas Line The system typically...

Страница 29: ...making sure the tubing rests firmly on the shoulder of the fitting 5 Tighten the nut 3 4 turn clockwise 6 Turn on the vent gas 7 Touch Vacuum wait for the system to pump down 8 Touch VENT 9 Lift up ge...

Страница 30: ...ction for instructions 4 Select the custom recipe on the touch screen panel and touch START Note that the custom recipe is added to the end of the list and may be on the next page It will not be autom...

Страница 31: ...ove 5 Touch VENT when complete NOTE At high elevations the air pressure may not be sufficient to meet the required gas flow rate A simple solution if a gas cylinder is not available is to pressurize a...

Страница 32: ...t coating of Kry tox vacuum grease may be added to the o ring on the outside of the holder adapter so that it is easily inserted and removed NOTE TEM samples must be protected by a sample shield to mi...

Страница 33: ...e VENT but ton and wait until the touch screen indicates that the system is vented igure 12 Top loading SEM chamber side view NOTE No part of the sample should extend higher than 1 cm below the chambe...

Страница 34: ...ve a sample installed you may remove the ion shield in order to increase the cleaning speed although it is not necessary This should not be done if a sample is installed or the sample may experience i...

Страница 35: ...ed Plasma Cleaner Please note that not all carbon films are equivalent Carbon films are volatilized and removed during plasma cleaning however pure carbon films will be removed at a slower and consist...

Страница 36: ...the rear panel 2 Place the sample in the chamber using either the SEM table or TEM holder as applicable 3 Select the appropriate recipe for your sample type and available gas setup Presets are availa...

Страница 37: ...switch located on the rear panel This brings up the operating system and vacuum pumps The chamber will remain in the idle vented state igure 15 System in idle state 2 Place a sample in the chamber us...

Страница 38: ...c display providing information on system operating conditions Rough Vacuum State 2 After touching START the system initiates a rough vacuum state in which the following events occur O The chamber ven...

Страница 39: ...the chamber reaches a preset value of 70 mTorr The pumping combination is designed to reach a pressure of about 20 mTorr in the specimen chamber NOTE Errors in this state may occur if the 70 mTorr pre...

Страница 40: ...e the gas flow Errors are typically caused by a closed gas cylinder valve empty gas cylinder or improper gas pressure Plasma Cleaning State 5 When the gas flow has been stabilized the system enters th...

Страница 41: ...t of gas igure 19 Cleaning in process NOTE Touch Display to show this screen The standard display screen will be automatically displayed at the end of the cleaning cycle 8 The cleaning cycle runs unti...

Страница 42: ...conditions exist The user should notify the lab manager to correct the cause of the error Any uncorrectable issues should be reported to Gatan Removing the Sample 1 Touch VENT to vent the chamber to a...

Страница 43: ...amples may be removed from the chamber The vent valve will remain open for 30 seconds more before closing NOTE It is important that this valve not remain open indefinitely since a vent gas cylinder co...

Страница 44: ...hide existing recipes that are not being used For exam ple if you don t have a Gas 3 Ar configured the visibility on all Ar O2 recipes will automatically be set to No Cleaning Time Touch the digit you...

Страница 45: ...as Flow Timeout This function limits the amount of time any of the gas flow rates are allowed to fall outside the selected range before the RF process shuts down Forward RF Target 50 watts of RF power...

Страница 46: ...y This sets the title to Air 5 Touch O2 Gas Flow touch Clear touch 3 3 3 Touch Apply This sets the O2 gas flow to 33 3 sccm 6 Touch H2 Gas Flow touch Clear touch Apply This sets the H2 gas flow to zer...

Страница 47: ...lect TEM Standard H2 O2 1 Min 2 Touch Options The options screen should be displayed 3 Touch Copy This makes a copy of the recipe that can be modified 4 Touch Title touch Clear touch A r O 2 touch App...

Страница 48: ...the rates at which it will pump H and O change by different amounts This will change the H O partial pressure ratio during cleaning which can affect the plasma cleaning rate Because of this it is imp...

Страница 49: ...ocated on each side of the cabinet near the front The two screws on each side closest to the front release the bezel the other releases the covers 4 Tilt the bottom of the bezel upward making sure tha...

Страница 50: ...he captive screws located on each side of the cabinet near the back 7 Loosen the captive screw on the top front center of the cabinet 8 The remaining cabinet cover consists of two pieces First remove...

Страница 51: ...efore lifting upward on the cover Also make sure the captive screws are clear before raising the cover 10 The covers can be replaced by following the reverse of these directions Removing the Diaphragm...

Страница 52: ...er s Manual and User s Guide base plate will slide out of the cabinet together once all connections are removed 4 Disconnect the vacuum line from the left side of the pump by unscrewing the knurled kn...

Страница 53: ...g the Molecular Drag Pump 1 Shut off the power to the system and unplug the power cord The power switch is located on the rear of the cabinet near the right side 2 Remove the front bezel and both cove...

Страница 54: ...pull the clamp out Calibrating the Pirani Gauge The gauge is calibrated prior to shipment Contamination or a long time in opera tion can result in a zero drift If the gauge is severely out of calibrat...

Страница 55: ...adjusts the gauge to 750 Torr 1000 mbar A tool of less than 1 1 mm such as a small hex key diameter is needed to operate the button igure 24 Access to Pirani gauge calibration button NOTE The button i...

Страница 56: ...o the specimen chamber lid using the four screws Maintenance Report The maintenance report provides a time date log of all processes run by the sys tem as well as completion and failure statistics igu...

Страница 57: ...ppears Error Message Mass flow controller could not match the specified gas flow 1 Be sure gases are connected and the pressure is correct 25 psi 2 Be sure the system has been powered on for at least...

Страница 58: ...ure PART NUMBER DESCRIPTION 950 B Gatan Advanced Plasma System Basic 950 08350 Phillips P1 Adapter all non Compustage TEMs 950 08380 JEOL J5 adapter 1210 2010 3010 950 08410 Hitachi H3 Adapter S900 S5...

Страница 59: ...ntenance program is required as part of a regular maintenance cycle for their product In the event the battery must be replaced contact Gatan Customer Ser vice Department at www gatan com and follow t...

Страница 60: ...is a danger of explosion if the battery is incorrectly replaced or handled Do not disassemble or recharge the battery Do not dispose of the battery in fire When the battery is replaced the same type...

Страница 61: ...mber may be obtained through Gatan Service or directly from Gatan s Warrendale facility at 724 776 5260 If the item is not under warranty to obtain an RMA the customer must provide a Purchase Order PO...

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