30
Solarus 950 Owner’s Manual and User’s Guide
ƒigure 17
System introducing gases
N
OTE
:
The system will report an error if the MFC cannot stabilize the gas
flow. Errors are typically caused by a closed gas cylinder valve, empty
gas cylinder, or improper gas pressure.
Plasma Cleaning
State
5.
When the gas flow has been stabilized, the system enters the plasma cleaning
state, which delivers RF power (13.56 MHz) to the RF generator chamber,
igniting the plasma.
ƒigure 18
Applying RF power to the unit
