20
Solarus 950 Owner’s Manual and User’s Guide
ƒigure 9
Air testing configuration
Standard Configuration
To use air as a plasma gas for testing:
1.
Leave the process gas 1 port (O
2
) open to allow for passive airflow to the
mass flow controller.
2.
Turn on the mains power by pressing the upper portion of the power switch
located on the rear panel.
3.
Create a custom recipe. Set the H
2
flow rate to zero and the O
2
rate at 33.3.
See the Creating Custom Recipes section for instructions.
4.
Select the custom recipe on the touch screen panel and touch
START
. Note
that the custom recipe is added to the end of the list and may be on the next
page. It will not be automatically selected after editing.
5.
Touch
VENT
when complete.
3rd Process Gas Option
To use air as a plasma gas for testing:
1.
Leave the process gas 3 port (Ar/O
2
) open to allow for passive airflow to the
mass flow controller.
2.
Turn on the mains power by pressing the upper portion of the power switch
located on the rear panel.
3.
Create a custom recipe. Set process gas 3 flowrate to 33.3 sccm, all other rates
to 0. See “Creating Custom Recipes” for instructions.
