Solarus 950 Owner’s Manual and User’s Guide
29
ƒigure 16
System initiating vacuum state
Vacuum State
3.
When the cleaning chamber reaches 20 Torr, the system initiates the vacuum
state, in which the following events occur.
O
The three-way roughing valve de-activates, restoring the vacuum path
between the turbo pump and diaphragm pump.
O
The system pumps until the chamber reaches a preset value of 70 mTorr.
The pumping combination is designed to reach a pressure of about 20
mTorr in the specimen chamber.
N
OTE
:
Errors in this state may occur if the 70 mTorr preset value is not
achieved within the allowable time limit. This could be due to a vac-
uum leak in the chamber.
Gas Flow
Stabilization State
4.
When the cleaning chamber reaches a pressure less than 70 mTorr, the system
turns ON the mass flow controllers (MFC) to fix the preset flow rate for the
specified recipe. The rate should stabilize within about 5 seconds.
