Solarus 950 Owner’s Manual and User’s Guide
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6.
The RF reaches its preset level and the system monitors the power (both for-
ward and reflected) to ensure a matched RF state has been achieved.
7.
The timer begins counting down as the system continues to monitor power,
gas flow, and vacuum levels to detect errors (such as running out of gas).
ƒigure 19
Cleaning in process
N
OTE
:
Touch Display to show this screen. The standard display screen will be
automatically displayed at the end of the cleaning cycle.
8.
The cleaning cycle runs until the preset time limit has been reached.
N
OTE
:
Should the RF match not be reached due to the forward power or
reflected power being out of range, the system will report an error and
stop the cleaning cycle.
Cleaning Cycle
Completion
9.
At completion of the cleaning cycle, the gas flow and RF power are automati-
cally switched off.