EBARA ESA300W, Инструкция по эксплуатации, Страница: 59 / 80

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8.2 Routine Inspection
Check periodically that WARNING signal is not output on the LCD controller or
remote output.
Table 8.1 Typical check items
When the ALARM/WARNING display appears, take action in accordance with
Section 10. "Troubleshooting."
If the lubrication oil amount is lower than the lower limit line of the oil level gauge,
supply the lubrication oil. See the section 8.3 “Lubrication oil“ when adding the oil.
WARNING
Switch off the power supply to the pump first and interrupt the Earth Leakage
Breaker (ELB) and lockout before you start on maintenance.
WARNING
The pump and exhaust piping will remain at a high temperature during
operation and for a short time after the pump has stopped.
Be sure to avoid contact and keep inflammable substances out of reach.
Do not remove the outer cover during operation.
Even when the cause of the ALARM/WARNING signal has been removed the
signal will be maintained until the RESET signal is entered. After you have taken
the remedial action, press the RESET button on the controller or enter the RESET
signal from the control signal connector to reset the WARNING.
No. Item Sensor
Interval
(recommended)
１ Motor Current -----
2 N2 Gas Flow Flow sensor
3 Vibration / Noise -----
4 Lubrication oil Quantity Oil Level Switch and level gauge
5 Cooling water flow Flow sensor
6 Pumping casing Temp Thermo-Couple
1 time/week
7 Color of lubrication oil ----- 1 time/month