EBARA ESA300W, Инструкция по эксплуатации, Страница: 11 / 80

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EBARA
CORPORATION
Contents
Environmental Basic Policies.............................................................................. 1
Safety Information............................................................................................... 2
Important Prior Warnings .................................................................................... 3
Standard Limited Warranty ................................................................................. 8
Contents ............................................................................................................. 9
1. Foreword....................................................................................................... 11
2. Introduction ................................................................................................... 11
2.1 Introduction............................................................................................. 11
2.2 Environmental Concerns ........................................................................ 12
3. Product Description....................................................................................... 13
3.1 Outline .................................................................................................... 13
3.1.1 Pump Module....................................................................................... 13
3.1.2 N2 Gas ............................................................................................ 13
3.1.3 Cooling Water.................................................................................. 14
3.1.4 Exhaust ........................................................................................... 14
3.2 Control System ....................................................................................... 14
3.2.1 Warning ........................................................................................... 14
3.2.2 Operation Status Control ................................................................. 15
3.3 The way of pump moving........................................................................ 15
3.3.1 Preparation...................................................................................... 15
3.3.2 Moving method................................................................................ 16
3.4 Detailed Specifications ........................................................................... 17
4. Installation..................................................................................................... 22
4.1 Movement and Fixation .......................................................................... 22
4.1.1 Location........................................................................................... 22
4.1.2 Caster and adjustment foot ............................................................. 22
4.2 Piping...................................................................................................... 24
4.2.1 Vacuum and Exhaust Piping............................................................ 24
4.2.2 Cooling Water Piping....................................................................... 25
4.2.3 N2 Gas Piping ................................................................................. 26
4.2.4 Ventilation Duct ............................................................................... 27
4.3 Electrical Wiring ...................................................................................... 28
4.3.1 Grounding........................................................................................ 28
4.3.2 Power Supply Wiring ....................................................................... 29
4.3.3 Control Signal Wiring....................................................................... 30
5. Power Supply for the Options ....................................................................... 33