EBARA ESA300W, Инструкция по эксплуатации, Страница: 53 / 80

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EBARA
CORPORATION
[NOTE] The pump cannot start while the measuring instruments are warming up
for 10 seconds after the ELB is placed in the ON position.
(5) Check on the WATER FLOW display of the LCD Controller that the cooling
water flow rate is 6 L/min. or more.
(6) Re-check on the DIL. N2 FLOW display of the LCD Controller that the dilution
N2 gas flow rate is within the 7.5 – 10.5 [Model ESA300W-H 78-82]Pam3/s
range.
After setting the pressure, press the red stopper to lock the knob in position.
(7) When the ALARM/WARNING display appears on the LCD controller or when
any abnormal symptoms are found other than the display, take action in
accordance with 10. "Troubleshooting."
Even when the cause of the ALARM/WARNING display has been removed, it
is maintained until the RESET signal is entered. Either press the RESET
button or enter an external RESET signal from the control signal connector.
In the BUZZER Enabled mode using DIP switches, it is possible to stop the
buzzer by pressing the BZ.OFF button when the alarm is being generated.
(8) When the pump exhaust pipe is equipped with a valve, open this valve
before starting the pump.
CAUTION
Problems will occur when the pump is operated with the valve closed as the
exhaust pipe will be pressurized.