EBARA ESA300W, Инструкция по эксплуатации, Страница: 45 / 80

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EBARA
CORPORATION
6.3.6 Setting the WARNING value for the pump N2 flow
Use the up and down arrow keys to change the setting value.
▲ : Increase the setting value by 0.1 Pam
3
/s
▼ : Decrease the setting value by 0.1 Pam
3
/s
Upper limit 81.0 Pam
3
/s
Lower limit 2.0 Pam
3
/s
Factory setting 4.0 Pam
3
/s
Reset value for WARNING set value +1.0 Pam
3
/s
6.3.7 Setting the WARNING value for the back pressure (option)
Use the up and down arrow keys to change the setting value.
▲
: Increase the setting value by 0.5 kPa.
▼
: Decrease the setting value by 0.5 kPa.
Upper limit : 20.0 kPa
Lower limit : 5.0 kPa
Factory setting : 10.0 kPa
WARNING reset value : Set value –2.0 kPa
Use the keys, ” ▲ ” and ” ▼ ” to set.
SET ALARM SP
BACK PRES.?
PRG.
ENTER ENTER
BACK PRES.SP
##.# kPa
Setting
done
▲ ▼
▲ ▼
SET POINT
N2 FLOW LOW?
ＰＲＧ．
ENTER
ENTER
N2 FLOW LOW
# # ．# Pam
3
/s
SETTING COMPLETED