(
30)
EBARA
CORPORATION
4.3.3 Control Signal Wiring
Connect wires to the control connector for remote operation and remote monitoring.
Tables 4.4 and 4.5 and Figs. 4.5 and 4.6 show the pin assignment.
Table 4.4 Receptacle Specification
Connector No.
Connector type
CN-Z
15 pin D sub-miniature Female receptacle
(Applicable for SEMI E73)
CN-Y
25 pin D sub-miniature Female receptacle
Fig. 4.6 15 Pin D Sub-Miniature Female Receptacle
(As seen from connecting side)
Table 4.5 Control Connector Pin Assignment(CN-Z)
Pin. No.
Signal name
I/O
Signal type
1
MP START/STOP (+)
IN
Run : CLOSE, Alternate
2
BP START/STOP (+)
IN
Run : CLOSE, Alternate
3
MP START/STOP STATUS (+)
OUT
Run : CLOSE, Alternate
4
BP START/STOP STATUS (+)
OUT
Run : CLOSE, Alternate
5
WARNING STATUS (+)
OUT
WARNING : OPEN, Alternate
6
ALARM STATUS (+)
OUT
ALARM : OPEN, Alternate
7
REMOTE STATUS (+)
OUT
REMOTE : ON
8
9
MP START/STOP (
−
)
10
BP START/STOP (
−
)
11
MP START/STOP STATUS (
−
)
12
BP START/STOP STATUS (
−
)
13
WARNING STATUS (
−
)
14
ALARM STATUS (
−
)
15
REMOTE STATUS (
−
)
1
8
15
9
Screw lock size : M2.6
Contact pin surface : Au
Содержание ESA300W
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