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3)
EBARA
CORPORATION
Important Prior Warnings
DANGER
Keep out from under the pump when lifted.
Only qualified personnel shall unload and lift the pump.
Keep pump at horizontal position when lifted.
Do not lift the pump without eyebolt spacer.
WARNING
Be careful not to overturn the pump when pushing and pulling it
sideways, because the pump is narrow in comparison to its height.
WARNING
Only a qualified electrician should perform electrical works,
observing all national and local electrical regulations.
WARNING
Interrupt Earth Leakage Breaker (ELB) before starting on Cut and lock out power
before beginning wiring and or maintenance work.
Do not switch on the power supply to the pump until work is completed and pump
and piping are returned to safe operating condition.
WARNING
Supply N2 gas to the exhaust piping when necessary to dilute the flammable or
toxic gas down to a safe concentration.
WARNING
Purge with sufficient N2 gas before removing and cleaning the vacuum and
exhaust piping.
Do not let inflammable, toxic or dangerous materials disperse and guard against
contact with the human body.
Always work in a location with an escape route in an emergency.
WARNING
Do not use the pump for another process without a previous overhaul. Gases or
reaction products remaining in the pump will react and lead to accidents with the
formation of large amounts of byproducts.
WARNING
Pump oil may be contaminated with process byproducts. Treat it as a hazardous
waste. See Table 3.1 for oil quantities.
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