EBARA ESA300W, Инструкция по эксплуатации, Страница: 37 / 80

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EBARA
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6.2 LCD Indication
The operating status of the pump is displayed on the LCD display of the controller.
For details of display, see Tables 6.1.
Table 6.1 LCD controller indication
No ITEM INDICATION
B P : # # . # # A
1
Current
M P : # # . # # A
C O N T R O L : L O C A L
2
Control mode
Pump running mode
M O D E : N O R M A L
A L A R M / W A R N I N G
3
Alarm history
(Indication of history)
H I S T O R Y ?
U N I T N O .
4
Pump unit No.
& & & & & & & &
P U M P. T Y P E @ @ @ @
5
Pump model
Voltage
@ @ @ @ @ @
O P E . T I M E
6
Total operation time
# # # # # h
B A C K P R E S S U R E
7
Back pressure (option)
# # . # k P a
P U M P N 2 F L O W
8
Pump N2 gas flow
# # . # P a m
3
/ s
W A T E R F L O W
9
Cooling water flow
# # . # L / m i n
B P S P E E D
10
Motor speed
# . # k m i n - 1
$ $ $ $ $ : $ $ $ $ $ $ $ %
11
WARNING/ALARM
$ $ $ $ $ $ $ $ $ $ $ $ $ $
1. Three control modes are available : “LOCAL” (local operation) , “REMOTE”
(remote operation) and “COM” (Communication operation).
2. " % " shows present number of WARNING/ALARM.
3. Upper row "$$$$$$" distinguishes between WARNING/ALARM and
indicates the position where WARNING/ALARM has occurred.
Lower row "$$$$$$" displays details of WARNING/ALARM.