E-4
WHAT AND HOW TO CHECK
REMEDIAL ACTION
1-5.
(2)
If it remains at 5V in (1), check connections and
sensor.
1-5.
(2)
Replace the defective part.
(Blow off by air, the water under chuck table)
(3)
Check
θ
-axis sensors 1-3.
(3)
Repair the board if it malfunctions.
(Replace)
1-6.
(1)
Take out the F2 fuse from the holder and check it.
1-6.
(1)
Replace it if it has blown. Then, also check why the
fuse has blown. If it does not conduct, check other
parts.
(2)
Disconnect the connector MJ2 and check for
continuity (between R and S) by tester.
(2)
In case of open circuit, replace either connecting
cable or FAN. If there is continuity, check other
parts. (it is possible that the FAN does not rotate
because it is in contact with the net.)
1-7.
(1)
Fuse F3; same as 1-6 (1).
1-7.
(1)
Same as 1-6 (1).
(2)
Same as 1-6 (2).
MB3 Between BB and CC
(2)
Same as 1-6 (2).
891110
Содержание DAD 2H/6T
Страница 5: ...INTRODUCTION...
Страница 7: ...A GENERAL...
Страница 9: ...B CONSTRUCTION...
Страница 11: ...B 2 2 Composition and Arrangement of Electrical Equipment Fig B 2 910810 910810...
Страница 12: ...B 3 891110 3 Pneumatic Water Schematic Diagram Fig B 3 891110...
Страница 13: ...C CIRCUIT DIAGRAM...
Страница 16: ......
Страница 17: ......
Страница 18: ......
Страница 20: ......
Страница 21: ......
Страница 22: ......
Страница 23: ......
Страница 24: ......
Страница 25: ......
Страница 26: ......
Страница 28: ......
Страница 30: ......
Страница 32: ......
Страница 33: ......
Страница 34: ......
Страница 35: ......
Страница 36: ......
Страница 37: ......
Страница 38: ......
Страница 39: ......
Страница 40: ......
Страница 41: ......
Страница 42: ......
Страница 44: ......
Страница 46: ......
Страница 48: ......
Страница 50: ......
Страница 51: ......
Страница 52: ......
Страница 54: ......
Страница 56: ......
Страница 58: ......
Страница 60: ......
Страница 61: ......
Страница 62: ......
Страница 64: ......
Страница 65: ......
Страница 66: ......
Страница 68: ......
Страница 69: ......
Страница 70: ......
Страница 72: ...EAUA 087600...
Страница 74: ...EAUA 087703...
Страница 76: ...EAUA 087800 X Y EAUA 087900 Z...
Страница 78: ...EAUA 023600...
Страница 81: ...D MAINTENANCE...
Страница 83: ...E CHECKING PROCEDURES FOR TROUBLESHOOTING...
Страница 110: ...E 27 Fig E 3 Output Waveform of Driver P C Board 840920...
Страница 117: ...F ILLUSTRATION AND PARTS LIST...
Страница 118: ...EXPLODED VIEW OF MAIN BODY A F 1...
Страница 124: ...EXPLODED VIEW OF MAIN BODY B F 2...
Страница 128: ...EXPLODED VIEW OF X AXIS 90 THETA F 3A...
Страница 134: ...EXPLODED VIEW OF X AXIS MANUAL THETA F 3B MODEL DAD 2H 6TM...
Страница 137: ...MEMO...
Страница 138: ...EXPLODED VIEW OF X AXIS 360 THETA F 3C...
Страница 141: ...MEMO...
Страница 142: ...EXPLODED VIEW OF X AXIS F 3D MODEL DAD 2H 6T...
Страница 144: ...EXPLODED VIEW OF Y AXIS F 4...
Страница 148: ...EXPLODED VIEW OF Z AXIS F 5...
Страница 154: ...EXPLODED VIEW OF PIPING A F 6...
Страница 156: ...EXPLODED VIEW OF PIPING B F 7...
Страница 165: ...G REGULAR INSPECTIONS...
Страница 169: ...H CAMERA HEAD MONITOR TV...
Страница 174: ...H 5 External Operating Unit Fig H 2 910110...
Страница 175: ...H 6 Camera Head Internal Adjusters VIDEO PWB Fig H 3 891110...
Страница 176: ...H 7 Monitor Internal Adjuster PROCESS PWB 891110 Fig H 4...
Страница 177: ...H 8 Internal Monitor Adjusters MONITOR PWB 891110 Fig H 5...
Страница 178: ...H 9 Internal Monitor Adjuster POWER SUPPLY PWB Fig H 6 891110...
Страница 179: ...J MICROSCOPE MODEL DS...