EXPLODED VIEW OF X-AXIS (90
°
THETA)
(F-3A)
Index
Number
Disco
Part No.
---
Description
Remarks
Quantity
per Assy
51
MGSSM06016U
---
Soc Hd Screw
M6 x 16
4
52
MODDX065
---
Plate(Insulation)
1
53
MGSSM05016U
---
Soc Hd Screw
M5 x 16
12
54
MGSSM06010U
---
Soc Hd Screw
M6 x 10
3
55
MODBX012
---
Spring End
1
56
MODBX013
---
Spring(Tension)
1
57
MODBX018
---
Stud Bolt
1
58
MGW-M05U
---
Washer
M5
4
59
MODDX040
---
Support(Tension)
1
60
MODBX014
---
Tension Rod
1
61
MSHK-0609P4T
---
Needle Roller Bearing
HK-0609
2
62
MODBX020
---
Tension Pin
1
63
MG6N-M06-3U
---
Hex Nut
M6-3
2
64
MODBX061
---
Pulley(Timing)
12XL037-6F
1
65
MSE-42W
---
Retaining Ring
E-42
1
66
MODDX024
---
Timing Belt
400XL037
1
67
MODDX144
---
Bracket(Connector)
1
68
MODDX048
---
Plate(Terminal)
1
69
MODCH104
---
Connector Bracket
1
70
MGW-M04U
---
Washer
M4
7
71
EAUA--089700
---
X-Axis Sensor Board
UA0897
1set
72
MGTK-M0305UB
---
Truss Hd Screw
M3 x 5
2
73
MODDX149
---
Slit(2, X-Axis Sensor)
1
74
MODDX148
---
Slit(1, X-Axis Sensor)
1
74A
MG6N-M03-1U
---
Hex Nut
M3-1
4
910810
Содержание DAD 2H/6T
Страница 5: ...INTRODUCTION...
Страница 7: ...A GENERAL...
Страница 9: ...B CONSTRUCTION...
Страница 11: ...B 2 2 Composition and Arrangement of Electrical Equipment Fig B 2 910810 910810...
Страница 12: ...B 3 891110 3 Pneumatic Water Schematic Diagram Fig B 3 891110...
Страница 13: ...C CIRCUIT DIAGRAM...
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Страница 72: ...EAUA 087600...
Страница 74: ...EAUA 087703...
Страница 76: ...EAUA 087800 X Y EAUA 087900 Z...
Страница 78: ...EAUA 023600...
Страница 81: ...D MAINTENANCE...
Страница 83: ...E CHECKING PROCEDURES FOR TROUBLESHOOTING...
Страница 110: ...E 27 Fig E 3 Output Waveform of Driver P C Board 840920...
Страница 117: ...F ILLUSTRATION AND PARTS LIST...
Страница 118: ...EXPLODED VIEW OF MAIN BODY A F 1...
Страница 124: ...EXPLODED VIEW OF MAIN BODY B F 2...
Страница 128: ...EXPLODED VIEW OF X AXIS 90 THETA F 3A...
Страница 134: ...EXPLODED VIEW OF X AXIS MANUAL THETA F 3B MODEL DAD 2H 6TM...
Страница 137: ...MEMO...
Страница 138: ...EXPLODED VIEW OF X AXIS 360 THETA F 3C...
Страница 141: ...MEMO...
Страница 142: ...EXPLODED VIEW OF X AXIS F 3D MODEL DAD 2H 6T...
Страница 144: ...EXPLODED VIEW OF Y AXIS F 4...
Страница 148: ...EXPLODED VIEW OF Z AXIS F 5...
Страница 154: ...EXPLODED VIEW OF PIPING A F 6...
Страница 156: ...EXPLODED VIEW OF PIPING B F 7...
Страница 165: ...G REGULAR INSPECTIONS...
Страница 169: ...H CAMERA HEAD MONITOR TV...
Страница 174: ...H 5 External Operating Unit Fig H 2 910110...
Страница 175: ...H 6 Camera Head Internal Adjusters VIDEO PWB Fig H 3 891110...
Страница 176: ...H 7 Monitor Internal Adjuster PROCESS PWB 891110 Fig H 4...
Страница 177: ...H 8 Internal Monitor Adjusters MONITOR PWB 891110 Fig H 5...
Страница 178: ...H 9 Internal Monitor Adjuster POWER SUPPLY PWB Fig H 6 891110...
Страница 179: ...J MICROSCOPE MODEL DS...