EXPLODED VIEW OF X-AXIS (360
°
THETA)
(F-3C)
Index
Number
Disco
Part No.
---
Description
Remarks
Quantity
per Assy
1
MODDN005
---
Chuck Table(Universal)
1
2
MODDX092
---
Seal Cup
1
3
MADDX90201
---
Theta-Axis Assy(360
°
)
1set
4
MODDX123
---
Cover
1
5
MSCO0562AN
---
“O” Ring
S-135
1
6
MGSK-M0306U
---
Fil Hd Screw
M3 x 6
20
7
MODDX130
---
Protect Ring
1
8
MODDX121
---
Ring(Top)
1
9
MODDX127
---
Bell Seal
2
10
MSCO0558AN
---
“O” Ring
S-120
2
11
MODDX120
---
Fixing Ring
1
12
MODDX122
---
Ring(Bottom)
1
13
MGSSM04020U
---
Soc Hd Screw
M4 x 20
6
14
MODDX117
---
Rotating Ring
1
15
MODDX068
---
Ring
1
16
MODDX073
---
Retainer
1
17
MODDX009
---
Steel Ball
10
18
MODDX075
---
Leaf Spring
1
19
MGNK-M0206U
---
Bind Hd Screw
M2 x 6
6
20
MODDX084
---
Bearing
NTB85110
1
21
MODDX114
---
Plate(Spring)
2
22
MODDX115
---
Leaf Spring
1
23
MODDX112
---
Hold Ring
1
24
MSCO0565AN
---
“O” Ring
S-150
1
25
MODDX131
---
Outer Housing
1
900830
Содержание DAD 2H/6T
Страница 5: ...INTRODUCTION...
Страница 7: ...A GENERAL...
Страница 9: ...B CONSTRUCTION...
Страница 11: ...B 2 2 Composition and Arrangement of Electrical Equipment Fig B 2 910810 910810...
Страница 12: ...B 3 891110 3 Pneumatic Water Schematic Diagram Fig B 3 891110...
Страница 13: ...C CIRCUIT DIAGRAM...
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Страница 72: ...EAUA 087600...
Страница 74: ...EAUA 087703...
Страница 76: ...EAUA 087800 X Y EAUA 087900 Z...
Страница 78: ...EAUA 023600...
Страница 81: ...D MAINTENANCE...
Страница 83: ...E CHECKING PROCEDURES FOR TROUBLESHOOTING...
Страница 110: ...E 27 Fig E 3 Output Waveform of Driver P C Board 840920...
Страница 117: ...F ILLUSTRATION AND PARTS LIST...
Страница 118: ...EXPLODED VIEW OF MAIN BODY A F 1...
Страница 124: ...EXPLODED VIEW OF MAIN BODY B F 2...
Страница 128: ...EXPLODED VIEW OF X AXIS 90 THETA F 3A...
Страница 134: ...EXPLODED VIEW OF X AXIS MANUAL THETA F 3B MODEL DAD 2H 6TM...
Страница 137: ...MEMO...
Страница 138: ...EXPLODED VIEW OF X AXIS 360 THETA F 3C...
Страница 141: ...MEMO...
Страница 142: ...EXPLODED VIEW OF X AXIS F 3D MODEL DAD 2H 6T...
Страница 144: ...EXPLODED VIEW OF Y AXIS F 4...
Страница 148: ...EXPLODED VIEW OF Z AXIS F 5...
Страница 154: ...EXPLODED VIEW OF PIPING A F 6...
Страница 156: ...EXPLODED VIEW OF PIPING B F 7...
Страница 165: ...G REGULAR INSPECTIONS...
Страница 169: ...H CAMERA HEAD MONITOR TV...
Страница 174: ...H 5 External Operating Unit Fig H 2 910110...
Страница 175: ...H 6 Camera Head Internal Adjusters VIDEO PWB Fig H 3 891110...
Страница 176: ...H 7 Monitor Internal Adjuster PROCESS PWB 891110 Fig H 4...
Страница 177: ...H 8 Internal Monitor Adjusters MONITOR PWB 891110 Fig H 5...
Страница 178: ...H 9 Internal Monitor Adjuster POWER SUPPLY PWB Fig H 6 891110...
Страница 179: ...J MICROSCOPE MODEL DS...