D-1
891110
D. MAINTENANCE
1. Maintenance and Inspection
1)
Be sure to wipe off water that has been sprinkled on the chuck table and operating panel after every use of
the machine.
2)
Remove wafer chips accumulated around the scupper of the water tray.
3)
Do not place tools and the like on the stainless waterproof cover in order to prevent the cover from being
scratched.
4)
Open and close the main body cover gently to protect it from impact damage.
5)
Care should be taken not to scratch the surface of the wheel mount fitted into the front end of the spindle.
6)
Replace the carbon brushes by loosening the screws at the rear of the spindle. After replacing the brushes
use a volt ohm meter to check the conductor rate between the main body and the front end of the spindle.
7)
The chuck table is provided with grooves and holes for better suction effect. Since vacuum is not obtainted
if these are clogged with chips, they should be cleaned from time to time.
8)
The timing belt for driving X axis should be inspected for scratches or cracks from time to time.
9)
The mist separator should be checked monthly. When the felt inside the mist separator becomes dirty, it
should be replaced.
10)
If this machine is left unused for a long time, wipe off water on each part of the equipment and place a
vinyl cover over it. (Under favorable circumstances, a vinyl cover is not necessary.)
Содержание DAD 2H/6T
Страница 5: ...INTRODUCTION...
Страница 7: ...A GENERAL...
Страница 9: ...B CONSTRUCTION...
Страница 11: ...B 2 2 Composition and Arrangement of Electrical Equipment Fig B 2 910810 910810...
Страница 12: ...B 3 891110 3 Pneumatic Water Schematic Diagram Fig B 3 891110...
Страница 13: ...C CIRCUIT DIAGRAM...
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Страница 72: ...EAUA 087600...
Страница 74: ...EAUA 087703...
Страница 76: ...EAUA 087800 X Y EAUA 087900 Z...
Страница 78: ...EAUA 023600...
Страница 81: ...D MAINTENANCE...
Страница 83: ...E CHECKING PROCEDURES FOR TROUBLESHOOTING...
Страница 110: ...E 27 Fig E 3 Output Waveform of Driver P C Board 840920...
Страница 117: ...F ILLUSTRATION AND PARTS LIST...
Страница 118: ...EXPLODED VIEW OF MAIN BODY A F 1...
Страница 124: ...EXPLODED VIEW OF MAIN BODY B F 2...
Страница 128: ...EXPLODED VIEW OF X AXIS 90 THETA F 3A...
Страница 134: ...EXPLODED VIEW OF X AXIS MANUAL THETA F 3B MODEL DAD 2H 6TM...
Страница 137: ...MEMO...
Страница 138: ...EXPLODED VIEW OF X AXIS 360 THETA F 3C...
Страница 141: ...MEMO...
Страница 142: ...EXPLODED VIEW OF X AXIS F 3D MODEL DAD 2H 6T...
Страница 144: ...EXPLODED VIEW OF Y AXIS F 4...
Страница 148: ...EXPLODED VIEW OF Z AXIS F 5...
Страница 154: ...EXPLODED VIEW OF PIPING A F 6...
Страница 156: ...EXPLODED VIEW OF PIPING B F 7...
Страница 165: ...G REGULAR INSPECTIONS...
Страница 169: ...H CAMERA HEAD MONITOR TV...
Страница 174: ...H 5 External Operating Unit Fig H 2 910110...
Страница 175: ...H 6 Camera Head Internal Adjusters VIDEO PWB Fig H 3 891110...
Страница 176: ...H 7 Monitor Internal Adjuster PROCESS PWB 891110 Fig H 4...
Страница 177: ...H 8 Internal Monitor Adjusters MONITOR PWB 891110 Fig H 5...
Страница 178: ...H 9 Internal Monitor Adjuster POWER SUPPLY PWB Fig H 6 891110...
Страница 179: ...J MICROSCOPE MODEL DS...