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Pump – Connections 
 

Pump S 1.5:

 

 

 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 

Pump 2.5: 

 
 
 
 
 
 
 
 
 
 

 

 
 
 
 
 
 

 

Connection vacuum pipe 

 

Connection vacuum pump

Connection for power supply 

pump

 Power supply 

pump

 

Power supply machine

 

On / Off 
switch

Exhaust 
pipe

Connection 

vacuum pipe 

 

Power supply 

pump

Power supply 

machine

 

Exhaust pipe 

with filter 

 

Exhaust filter

 

 

Vacuum pipe

 

Purge gas valve

Содержание femto

Страница 1: ...1 OPERATING INSTRUCTIONS Type Femto Please read this manual carefully before installing the machine L O W P R E S S U R E P L A S M A S Y S T E M...

Страница 2: ...1 1 2 1 1 3 1 1 4 1 1 5 1 1 6 1 1 7 1 1 8 1 4 1 1 4 2 1 4 3 1 4 4 1 4 5 1 4 6 1 5 1 1 5 2 1 5 3 1 5 4 1 5 5 1 5 6 1 5 7 1 5 8 1 5 9 1 6 1 1 6 2 1 6 3 1 6 4 1 6 5 1 6 6 1 7 1 1 7 2 1 7 3 1 8 1 1 8 2 1...

Страница 3: ...3 S Su um mm ma ar ry y O Of f D De el li iv ve er re ed d C Co om mp po on ne en nt ts s 11 Special Options 12 Remarks 13 Specify Connections...

Страница 4: ...Manual for Low Pressure Plasma Systems Of following production series Femto Producer Diener electronic GmbH Co KG Talstr 5 D 72202 Nagold Germany Tel 00 49 0 74 52 8 88 07 0 Fax 00 49 0 74 52 8 88 07...

Страница 5: ...1 Schaltplan gepr ft 2 Baratron Datenblatt dabei 3 MFC Datenblatt dabei 4 Generatordoku dabei 5 Pumpendoku dabei 6 7 8 9 10 Dies wird dem Kunden nicht ausgeliefert Datenbl tter in jedes Kapitel gleic...

Страница 6: ...dth approx 560 mm Depth approx 600 mm 750 mm incl plugs Height approx 310 mm 1 1 3 BASIC UNIT TYPE C Dimensions Width approx 562 mm Depth approx 420 mm 570 mm incl plugs Height approx 211 mm 1 1 4 BAS...

Страница 7: ...0 mm 700 mm incl plugs Height approx 600 mm 1 1 7 BASIC UNIT TYPE G Dimensions Width approx 350 mm Depth approx 600 mm 750 mm incl plugs Height approx 860 mm 1 1 8 BASIC UNIT TYPE H Dimensions Width a...

Страница 8: ...things If the valve is completely closed the plasma will turn off after consumption of tail gas in the tubes The gas flow ball in the glass gauge tube of the valve sometimes gets caught at the upper e...

Страница 9: ...C s Mass Flow Controller Variation 1 manual control which has to be controlled like the needle valve And Variation 2 PC controlled MFC Detailed Information according the handling of PC controlled MFC...

Страница 10: ...elok Voltage Power 230 V 16 A Exhaust Air tube inner diameter approx 10 mm Type label Timer Evacuation tube for vacuum chamber Ventilator Connection pump Main power supply 220 240 V 50 60 Hz Ventilati...

Страница 11: ...e H Gas 6mm Swagelok Voltage Power 400 V 16 A Exhaust Air tube inner diameter approx 10 mm Gas connection 1 Gas connection 2 Evacuation tube for vacuum chamber Ventilation Main power switch Power supp...

Страница 12: ...Cleaning of the chamber To clean the chamber a simple oxygen gas process is enough The process duration should be one hour with an empty chamber the trays are loaded into the chamber but no sample par...

Страница 13: ...request 1 piece 1 piece on request on request 1 piece 1 piece Application areas standard plasma processes standard plasma processes pure plasma processes standard plasma processes standard plasma pro...

Страница 14: ...her etching rates to achieve higher etching rates through homogeneous gas spread Picture Information concerning electrodes 1 Avoid short circuits Short circuits may occur when the Electrode gets in Co...

Страница 15: ...me Gas is feeding in and pressure stabilize automatic 3 Process time HF Generator is turned on 4 Flushing time Pump is running while purge gas f e Air rushes into the chamber The chamber is flushed fr...

Страница 16: ...ed manual by user 1 turn on pump 2 turn on process gas 3 set time 4 set power 5 start generator 6 flush 7 vent main power switch pump gas generator c ca ar rr ri ie er r Set timer a Version with manua...

Страница 17: ...s flow plasma process timer generator and venting starts automatically Selectable parameters process time power kind of gas pressure Operating with automatic control 1 Activate main power switch to st...

Страница 18: ...18 1 1 7 7 C Co on nt tr ro ol ls s Documentation for the control software of the plasma machine PRS Femto Nano Pico Tetra V 4 0...

Страница 19: ...___________________________________36 3 2 1 7 1 Vaporizer with Cycle time and On time_____________________________________________________36 3 2 1 7 2 Vaporizer with two valves _______________________...

Страница 20: ...____________________________________________________________70 6 3 3 Minimum Maximum value __________________________________________________________________70 6 3 4 Scaling __________________________...

Страница 21: ...tomatic mode 2 System requirements installation To run PRS you need an IBM compatible PC standard PC industrial PC and the operating system Windows 2000 Professional or Windows XP Professional To inst...

Страница 22: ...on nt tr ro ol ls s 3 Operating modes 3 1 1 Login Logout If the button Login F9 is pressed the following mask appears If the right password is entered and OK is pressed the main picture is shown in t...

Страница 23: ...23...

Страница 24: ...24 1 1 7 7 C Co on nt tr ro ol ls s 3 2 Operating Modes There are two operation modes automatic and manual The manual mode is only for inauguration and service and is protected by password...

Страница 25: ...onging actions cannot be done caused by actual process conditions or safety reasons E g as long as the edge valve is open it is not allowed to flush the chamber At the process gas flows should be noti...

Страница 26: ...d next to the button will be switch to green 3 2 1 1 2 RF Generator The operating mode must be chosen normal or pulse Set power value can be entered the actual forward and backward power values will b...

Страница 27: ...n be entered the actual forward and backward power values will be displayed The actual value of DC Bias will also be displayed The generator must be enabled is the generator enabled the display field...

Страница 28: ...an be chosen Set power value can be entered the actual forward and backward power values will be displayed The generator must be enabled is the generator enabled the display field next to the button w...

Страница 29: ...29 1 1 7 7 C Co on nt tr ro ol ls s If operating mode pulsed is chosen the period duration and the pulse width can be set...

Страница 30: ...ual can be switched on or off Set values for C Load and C Tune can be entered the actual values will be displayed If the button Manual is pressed the set values will be used for the whole process If t...

Страница 31: ...alues will be displayed If an error will be detected the ERR led blinks red errors can be reseted by the reset button DC Bias will be displayed If the button Auto is not pressed the set values will be...

Страница 32: ...e and display of actual pressure Further the pressure controller can be chosen Pressure will be controlled by gases 3 2 1 3 2 Pressure control with gases or vapor Input of set pressure and display of...

Страница 33: ...interlock vacuum switch and the interlock pirani will be displayed As soon as vacuum is in the chamber the vacuum switch switches and the display field of the switch will be green The actual temperatu...

Страница 34: ...roots pump In the manual mode the edge valve can be switched on or off The rotary vane pump will be automatically switched on with the main switch If motor safety device for pump released the LED Q2...

Страница 35: ...6 Rotary drive If the button Postioning is pressed the rotary drive drives until he reaches the limit switch Enable enables the moving of the rotary drive If the supervisory time will be exceeded Sett...

Страница 36: ...d Tcycle means time of a periode which consist of Ton and Toff in wich Ton will be entered as a percentages of Tcycle Example Tcycle is 10 seconds with a Ton of 20 the corresponding valve is respectiv...

Страница 37: ...l temperature actual temperature is sometimes displayed in recipient visualization Further the temperature controller can be chosen If the temperature controller is switched off the heating can be swi...

Страница 38: ...the actual values will be displayed The input will be made in sccm as long as the pressure controller is switched off If the pressure controller will be switched on the share of the gas flows will be...

Страница 39: ...nly possibly if the user is logged in password 100 program places are prepared in which each program number is belonging to a program name A program can be build by subprograms A program can consist o...

Страница 40: ...mode the input will be made in sccm as long as the pressure controller is switched off If the pressure controller will be switched on the share of the gas flows will be entered in Notice The sum of t...

Страница 41: ...ally In addition a maximum deviation can be entered If this value will be exceeded an error message and an entry in the Alarm list appears Also the process will be cancelled The vaporizer can be switc...

Страница 42: ...hed on the share of the gas flows will be entered in Notice The sum of the shares of the gas flows will always be 100 The software controls and adapt it automatically In addition a maximum deviation c...

Страница 43: ...s maximum absolute deviation will be entered If this value will be exceeded an error message and an entry in the Alarm list appears Also the process will be cancelled The monitorings for actual pressu...

Страница 44: ...or the operating mode must be chosen If the operating mode Pulsed is chosen the period duration and the pulse width must be entered The set temperature must be entered also the minimum and the maximum...

Страница 45: ...and an entry in the Alarm list appears Also the process will be cancelled The rotary drive must be configured The state of the rotary drive can be chosen between Always on Always off or Interval If t...

Страница 46: ...46 The error active time min means the time which the respectively value has to be out of ranges before an alarm will be generated...

Страница 47: ...ad and C Tune must be entered also Manual matching can be chosen If the button Manual is pressed the set values will be used for the whole process If the button Manual is not pressed the set values wi...

Страница 48: ...ng time should be chosen in that way that in the vessel is atmospheric pressure and the chamber door can be opened 3 2 6 Saving of programs The program parameters can be saved with F9 Save With this s...

Страница 49: ...4 Operating 4 1 Start of the automatic mode After creating the process in the picture F3 Programs it can be changed back in the main picture F1 A program can be chosen by the program number the corre...

Страница 50: ...ogram should be started the button start must be pressed and the following dialogue appears If F2 Yes is chosen the comment input mask appears Rank and operator must be filled out then the button F2 O...

Страница 51: ...ol ls s If the machine is build up with a heating and the actual temperature is too low the following dialogue appears After using a heat on program the process can be started with If F2 Yes then the...

Страница 52: ...hange to the manual mode The breaking off will also be done if a critical error occurred An error will be displayed by the red blinking of the error lamp The corresponding error message can be looked...

Страница 53: ...and time of its appearing With red letters the incoming alarm error will be shown and in green letters the gone of the alarm error The horn can be switched on or off The alarm list is divided in new l...

Страница 54: ...in the menu bar of the alarm list The following alarms can appear Internal error occured Please inform service Error occurred in communication with control Emergency off has been pressed The temperatu...

Страница 55: ...ctual pressure is too low The actual pressure is too high The actual gas flow of gas 1 deviates notably from set value The actual gas flow of gas 2 deviates notably from set value The actual gas flow...

Страница 56: ...6 1 1 7 7 C Co on nt tr ro ol ls s 4 2 2 Old list In the old list all alarms listed which are acknowledged but still activ The old list can be displayed with the button in the menu bar of the alarm li...

Страница 57: ...Co on nt tr ro ol ls s 4 2 3 Chronicle The chronicle contents the last 100 alarms came gone and acknowledged in chronological order The chronicle can be displayed with the button in the menu bar of t...

Страница 58: ...58 1 1 7 7 C Co on nt tr ro ol ls s 5 Settings At the point F7 Settings there will be made the settings which not depend on the process but depend on the machine and the customer...

Страница 59: ...ection factors for the gases will be entered at this point 5 1 2 Mass Flow Controller The maximum gas flows for the installed mass flow controllers have to be entered These settings will be done by th...

Страница 60: ...nd should not be changed in normal case 5 1 4 RF generator The ignition power and ignition duration can be set 5 1 5 Rotary drive Supervisory time for rotary drive can be set 5 1 6 Heating The base te...

Страница 61: ...r ro ol ls s 5 1 7 Vaporizer with two valves The input of the clock times will be done by the supplier and should not be changed in normal case 5 1 8 Controller The interface where the controller is c...

Страница 62: ...hich directory it should be written Also the automatic data export which allows reading the exported data with other programs like Excel can be chosen The data will be exported in the tsv csv format I...

Страница 63: ...le with the format JJJJ MM e g 2004 10 for October 2004 will be monthly created In this file all exported data of one month are saved The automatic protocol printout of end of process can also be acti...

Страница 64: ...he interface where the controller is connected can be set 5 1 11 Save All settings can be saved with F9 save 5 1 12 Load factory settings If the settings have been changed and saved inadvertently the...

Страница 65: ...tr ro ol ls s 6 Diagram 6 1 Settings All process parameter are shown over the process time each parameter has its own Y axis The displayed channels and Y axes can be adapted arbitrary there are differ...

Страница 66: ...click on the area of the diagram where the channels appears cursor changes or right mouse button in an empty space in the legend area of Properties or click the symbol in the diagram The following di...

Страница 67: ...The style of the lines will be chosen at this point Line style The line style can also be changed in the same way Double click on the respectively line and the line dialog appears Group Signal can be...

Страница 68: ...that the minimum value in logarithmic display is greater than 0 Scaling Scaling can be linear or logarithmic Display format The format for the signals can be shown in 4 different formats AUTO The for...

Страница 69: ...69 1 1 7 7 C Co on nt tr ro ol ls s...

Страница 70: ...xes right 6 3 2 Axes The displayed signals are listed 6 3 3 Minimum Maximum value Minimum value and maximum value of the indicating range of the y axis can changed arbitrary But make sure that the min...

Страница 71: ...he label zero allows the selection of displaying a zero line for each signal in the diagram 6 3 11 Context menu With the context menu right mouse button further settings can be done Hide Hiding the y...

Страница 72: ...ill not be stopped If the auto scroll button will pressed again the actual data will be shown in the diagram This button is used for auto scaling on off If the data record is wider than the screen wid...

Страница 73: ...C Co on nt tr ro ol ls s This button is used for the y axes dialogue see above This button is used for free zooming on off With pressed left mouse key an arbitrary range can be dragged If the mouse b...

Страница 74: ...well a table is shown where the actual values of the signals between the two rulers are displayed On this way each signal can be measured The rulers can be moved very simply The mouse will be moved a...

Страница 75: ...se button 6 3 13 Functions of the diagram in the manual mode These functions of the diagram are only available in the manual mode Data logging can be started and stopped manual If data are logged they...

Страница 76: ...76 1 1 7 7 C Co on nt tr ro ol ls s 7 Archive In the archive all saved processes including file info can be shown each time...

Страница 77: ...not react on inputs but the active process is still running It will be better to load large files only if the process is stopped In the saved file are the diagram data and the file info They can be ch...

Страница 78: ...ormat This format can be imported e g in EXCEL or ORIGIN It can be also entered the start date start time end date and end time for the exporting data In the lower range of the dialog appears the chan...

Страница 79: ...tenance The maintenance parameters can be entered in this mask and the current values will be displayed As soon as maintenance must be done maintenance of the whole plant or oil change of a pump a red...

Страница 80: ...e will be calculated and displayed Also the date of the last maintenance is displayed and the number of all done processes and operating hours 8 2 Oil change The oil change interval of the pump can be...

Страница 81: ...81 If the button Restore data is pressed the same dialog appears to select the directory in which the backup data should be loaded and the data will be restored...

Страница 82: ...mping down pressure the duration of measuring and the chamber volume must be input Then the measuring can be started During the measuring the actual duration is displayed after the measuring the leaka...

Страница 83: ...safety switch 9 9 9 9 9 9 Quartz stabilized frequency 0 05 9 9 9 PC Interface 9 9 9 9 Main applications activation cleaning etching semi conductor back end plasma polymerization activation cleaning et...

Страница 84: ...d power may loads or damages the generator The matching will be operated with the two rotary knobs C1 and C2 which shift the tuning capacitors These two knobs have to be turned slowly because the matc...

Страница 85: ...be necessary to restart the adjusting process therefore press the Reset button Press the button Retuning if the automatching does not find meet the minimum value of reflected power The button Retunin...

Страница 86: ...ual operating mode 3 Power Display Shows the real actual value of the power 4 Red Signal Lamp Overheat This lamp shines when the generator is overheated 5 Green Display Lamp LF on It has to be pushed...

Страница 87: ...ns 3 Type label 4 Sub D connector for automatic operation mode resp with dummy plug for manual operating mode 5 Fuses 6 Power supply line Accessories 1 Ventilator 2 LF output 3 Type label 4 Sub D conn...

Страница 88: ...56 100 Generator Back 1 Ventilator 2 LED DC on Status power supply 3 LED RF on Status high frequency generator 4 Remote Connection for control 5 HF output 6 Power supply 5 HF output 4 Sub D connector...

Страница 89: ...higher than approx 10 5 LED overheat The LED shines if generator is overheated 6 LED max power The LED shines when the max power is reached resp exceeds 7 LED 50V 8 LED overload The LED shines if gene...

Страница 90: ...90 1 1 8 8 G Ge en ne er ra at to or r RFG 13 56 300 Generator Back Control plug Oscillator Ventilator Ventilator HF output Fuses Protection conductor grounding Power supply...

Страница 91: ...5E PK2DC SC5D Description rotary vane pump rotary vane pump rotary vane pump dry pump Exhaust filter 9 9 9 Manufacturer Leybold Leybold Ilmvac Leybold Suction power m hour 1 5 m h 2 5 m h 2 m h 5 m h...

Страница 92: ...FPE D16BCS PFPE Al2O3 Description rotary vane pump rotary vane pump rotary vane pump rotary vane pump Exhaust filter 9 9 9 9 Al2O3 oil filter 9 Manufacturer Leybold Leybold Leybold Leybold Suction pow...

Страница 93: ...ress the gas therefore a oil mist can arise and in worst case it may happen that a explosive mixture of oil mist and oxygen gas arises To avoid this risk the purge gas valve will be installed The vent...

Страница 94: ...pumps with PFPE oil This oil is very expensive and the dispose of this oil is also problematic therefore we discourage about it Which pump for which gases Pump Permitted Gases Short name DxyB Standar...

Страница 95: ...2 5 Connection vacuum pipe Connection vacuum pump Connection for power supply pump Power supply pump Power supply machine On Off switch Exhaust pipe Connection vacuum pipe Power supply pump Power sup...

Страница 96: ...PK2DC Pump SC5D Connection vacuum pipe Power supply machine Power supply pump Connection vacuum pipe to pump Exhaust filter Exhaust pipe Connection vacuum pipe Power supply machine Connection for pow...

Страница 97: ...97 1 1 9 9 V Va ac cu uu um m P Pu um mp ps s Pump D16B D16BCS D16BCS PFPE D16BCS PFPE Al2O3 Connection power supply pump Power supply machine Connection vacuum pipe Exhaust tube...

Страница 98: ...for vacuum pump 1 10 2 Spare Part Set PFPE 1 clamping ring 1 seal 1 glass window 1 door seal 10 pcs fuses for plasma machine 1 litre PFPE oil for vacuum pump 1 10 3 Corrosive Gas Version Valves made...

Страница 99: ...egulators for noble gases H2 O2 N2 CF4 C4F8 Pressure regulator for NH3 connector no permitted gases thread 1 methane silane hydrogen W 21 80 x 1 14 LH 3 acetylene connection for clamp 5 carbon monoxid...

Страница 100: ...up temperature change value in first display sign on the left arrow up To set a maximum temperature press Return button and set the temperature In this mode the LED AL for alarm shines The temperature...

Страница 101: ...Faraday Box Cage For electric sensitive parts The parts will be placed at the inside of the box The Faraday Box can be moved out of the vacuum chamber 1 10 8 Monomer Bottle Accessory for polymerizatio...

Страница 102: ...Argon is flushed through the monomere figure Connection bubbler bottle with needle valve figure Connection bubbler bottle with MFC 1 10 10 Test Ink Set Test inks for an easy analysis of the surface e...

Страница 103: ...of manufacturer 1 10 12 Pressure Measurement Pirani Sensor 1 The pirani sensor measures the pressure in the vacuum chamber at a process pressure below 10 mbar The pirani sensor itself is made of a th...

Страница 104: ...nsor the resistor should be tested with an ohmmeter Before the testing the plug for the pirani sensor has to be disconnected The resistance has to be between 2 2 and 2 6 P 1 P 4 Potentiometer P 4 P 3...

Страница 105: ...t The LED shines green at a pressure below 0 3 mbar adjust with P1 In special cases the pressure can be raised up to max 1 mbar Normally the machine has to be pumped down to a pressure of approx 0 3 m...

Страница 106: ...d into minutes by standard max 999 9 minutes if you want to change the settings into hours or seconds you have to open the machine left or right side wall There you find the back of the timer Then fol...

Страница 107: ...relevant special for semi conductor front end processes or analytic applications SEM For more information to the gases see chapter 10 Information According Plasma Processes 10 17 2 2 Directional Valve...

Страница 108: ...ilter The gyrate of small parts will be prevented 10 20 Slowly Pumping Down of Vacuum Chamber The chamber will be slowly pumped down by bypass valve The gyrate of small parts will be prevented 10 21 B...

Страница 109: ...cans 5 pieces each 400 ml Glass plates 100 pieces each 90 mm x 110 mm Accessory for LABS test german Lack Benetzungs St rungs Test This test is a quick qualitative analysis for releasing agents remai...

Страница 110: ...nalysed The radiation that comes from plasma is characteristic for the procedures which happen during a plasma process That s the way online quality assurance appropriate and also a control of plasma...

Страница 111: ...ntenance Quote for Your Plasma Machine oil change control of all connections seals plugs leak rate test adjustment of pressure sensor function check out 10 30 Documentation In National Language Docume...

Страница 112: ...ctions 5 Connect exhaust tube with pump Normally a picture is sticked on the pump by the manufacturer which clearly shows the in and output of the suction power or 6 Connect power supply of pump with...

Страница 113: ...inst chamber opening until it will be primed d Adjust time main interval at the back of the machine process time at the potentiometer at machine front More information in chapter 1 7 Controls e Turn o...

Страница 114: ..._____________________________________________________ __________________________________________________________________ Software __________________________________________________________________ ___...

Страница 115: ...itable power supplies Damp Rooms The plasma machine is not moisture proof The machine must not be used in damp rooms Short Circuit The electrode must not be circuited Conductive parts must not touch t...

Страница 116: ...oxide hydrogen Ar He HMDSO CO CO2 O2 N NO2 NO H2 Corrosive Gas Equipment stainless steel pipes dry pump ammonia octafluorocyclobutane sulphur hexafluorine nitrogen trifluorine tetrafluoromethane and a...

Страница 117: ...s damaged it has to be replaced to avoid endanger Before open the cabinet pull power plug Animals Animals must not be encased in the plasma system Contaminations Try to avoid contaminations like dust...

Страница 118: ...Diener electronic must be refilled into the pump We don t use fluorine containing oil Therefore the pumps can be used for oxygen processes Do not perform unlicensed changes on the machine Repairs on...

Страница 119: ...he cleaning of the outside of the plasma system use only a light wet cloth For the cleaning of the chamber see chapter 1 4 Vacuum Chamber Never use solvents for the cleaning Stainless steel recipients...

Страница 120: ...running turn off pump protections trips fuse blows pump is still cold room temperature 20 C regard on a room temperature higher than 20 C power switch on pump is off turn on power switch pump not runn...

Страница 121: ...icone 29037 EUR Electrode bushing ceramic ignition coil 30182 39 00 EUR KF seals set 10511 30 00 EUR Glass seal Femto 29355 EUR Door seal Femto 29356 EUR O ring 130x5mm 27108 EUR O ring 130x5mm silico...

Страница 122: ...18 1550 00 EUR MFC Viton 200sccm 26549 1550 00 EUR MFC Viton 500sccm 26550 1550 00 EUR MFC Viton 1 000sccm 27514 1550 00 EUR MFC Viton 5 000sccm 27904 1550 00 EUR MFC Viton 2 000sccm 30591 1550 00 EUR...

Страница 123: ...le valves of manufacturer V gtlin float type flow meter 40 430 sccm stainless steel 31191 155 00 EUR float type flow meter 10 100 sccm stainless steel 31190 155 00 EUR float type flow meter 200 2200 s...

Страница 124: ...ts This declaration loses its validity where a modification is made without our agreement Applicable EU Directives EU Machinery Directive 98 37 EC EU EMC Directive 2004 108 EEC EU Low Voltage Directiv...

Страница 125: ...turn After the warranty period runs out You can also send the faulty device to the address below for repair A charge will then be made for the repair The warranty is invalidated if the device is misus...

Страница 126: ...F 10 10 Process parameters in general 10 10 1 Cleaning 10 10 1 1 Cleaning of metals 10 10 1 2 Cleaning of plastics 10 10 1 3 Cleaning of glasses and ceramics 10 10 2 Activation 10 10 2 1 Activation of...

Страница 127: ...process gases by choosing the process parameters 10 3 Spread of Plasma For an optimal plasma treatment the plasma has to be spread equable into the chamber see pictures air plasma kHz generator oxyge...

Страница 128: ...ith very high requirements to the surface purity choose a gas with ultra high purity This applies special to semi conductor front end processes or for analysis applications SEM 10 5 2 Selection of pre...

Страница 129: ...gas bottle For special gases ask your local gas supplier Gas connections according to DIN 477 Connection no Allowed gases Threads 1 methane silane hydrogen W 21 80 x 1 14 LH 3 acetylene Anschluss f r...

Страница 130: ...of the building the gas bottle has to be protected from impacts and falling down Therefore special equipment is available like bottle retainers with chains Check fitting for leaks by connecting the fi...

Страница 131: ...iginated from a gas flow of 50 sccm min per process To calculate your individual gas consumption you find the formula below the table The individual gas consumption strongly depends on the suction pow...

Страница 132: ...ting can be changed in the software PRS in the table settings Changing the gas correction factor 1 First you have to login password PRS 2 Select table settings 3 Type in the name of the gas in data it...

Страница 133: ...cess pressure Power is shown in Temperature only if chamber heating is installed At computer controlled machines the single parameters can be adjusted more detailed The software is customized accordin...

Страница 134: ...1 1 Cleaning of metals Removing of oils fat and releasing agents Some parts are covered with oils fat releasing agents and other organic and inorganic also oxides pollutions With plasma it is only po...

Страница 135: ...silicone free lacquer In case that the sample contains silicone the painting will not bond on the surface see pictures below At the reduction of oxides the metal oxide reacts chemical with the process...

Страница 136: ...low max 200 sccm max of MFC may vary 11 Process pressure 0 4 mbar 12 Max deviation process pressure 0 20 mbar 0 60 mbar Gas Supply Period 13 Control via gases check off 14 Duration 15 min 15 Power set...

Страница 137: ...10 40 PP O2 0 2 0 5 70 100 1 20 plastic PTFE H2 0 3 0 5 100 20 60 The process parameters power and time have to be adapted according to the specification of the machine type of generator power of gene...

Страница 138: ...120 10 10 2 1 Activation of metals As a matter of principle it is possible to activate metals but the activation is very unsteady and therefore just of short shelf life Activated metal has to be proce...

Страница 139: ...with air as process gas The durability of the activation varies between some minutes e g on rubber and several weeks e g on PA PE Some plastics have to be etched for a better adhesion see chapter Etch...

Страница 140: ...of MFC may vary 11 Process pressure 0 3 mbar 12 Max deviation process pressure 0 20 mbar 0 40 mbar Gas Supply Period 13 Control via gases check off 14 Duration 30 min 15 Power setpoint 70 16 Max absol...

Страница 141: ...0 Gas flow max 200 sccm max of MFC may vary 11 Process pressure 0 3 mbar 12 Max deviation process pressure 0 20 mbar 0 60 mbar Gas Supply Period 13 Control via gases check off 14 Duration 10 min 15 Po...

Страница 142: ...the chamber stays clean 2 Rod electrode This design is suitable for the additional installation into stainless steel or aluminium chambers Therefore a rod electrode will be fed into the glass bottle...

Страница 143: ...120 The process parameters power and time have to be adapted according to the specification of the machine type of generator power of generator type of electrode and according to the properties of the...

Страница 144: ...low max 200 sccm max of MFC may vary 11 Process pressure 0 4 mbar 12 Max deviation process pressure 0 20 mbar 0 60 mbar Gas Supply Period 13 Control via gases check off 14 Duration 30 min 15 Power set...

Страница 145: ...on corrosive gases Corrosive gases are f e all chlorine containing gases Non corrosive gases are argon and some fluorine containing gases f e C4F8 CF4 In general it can be said that fluorine containin...

Страница 146: ...ablished coating processes 1 Hydrophobic Coatings Monomer e g hexamethyldisiloxane HMDSO 2 PTFE like Coatings Monomer fluorine containing processgases 3 Hydrophilic Coatings Monomer vinyl acetate hexa...

Страница 147: ...via sputtering decorative coatings on metal functional coatings on metal picture long term stable hydrophilic coating left untreated right treated Group Material Gas Pressure mbar Power Time min Alum...

Страница 148: ...0 sccm 10 Gas flow max 200 sccm max of MFC may vary 11 Process pressure 0 3 mbar 12 Max deviation process pressure 0 20 mbar 0 60 mbar Gas Supply Period 13 Control via gases check off 14 Duration 10 m...

Страница 149: ...lected 6 Gas rate 0 7 Max deviation 0 8 Gas flow min 0 sccm 9 Gas flow 50 sccm 10 Gas flow max 200 sccm max of MFC may vary 11 Process pressure 0 3 mbar 12 Max deviation process pressure 0 20 mbar 0 4...

Страница 150: ...as installed on machine Gas 1 MFC 1 at machine 6 Gas rate 100 7 Max deviation 10 8 Gas flow min 0 sccm 9 Gas flow 50 sccm 10 Gas flow max 200 sccm max of MFC may vary 11 Process pressure 0 3 mbar 12...

Страница 151: ...se monomer HMDSO is selected 6 Gas rate 0 7 Max deviation 0 8 Gas flow min 0 sccm 9 Gas flow 50 sccm 10 Gas flow max 200 sccm max of MFC may vary 11 Process pressure 0 3 mbar 12 Max deviation process...

Страница 152: ...connection as installed on machine Gas 1 MFC 1 at machine 6 Gas rate 100 7 Max deviation 10 8 Gas flow min 0 sccm 9 Gas flow 50 sccm 10 Gas flow max 200 sccm max of MFC may vary 11 Process pressure 0...

Страница 153: ...tions Original surface scratch test untreated scratch test treated Group Material Gas Pressure mbar Power Time min plastic HMDSO O2 0 1 0 5 50 100 1 60 plastic plastic C4F8 0 1 0 5 50 100 1 60 The pro...

Страница 154: ...n the photo below untreated glass treated glass Group Material Gas Pressure mbar Power Time min Glass glass C4F8 0 1 0 5 50 100 30 120 The process parameters power and time have to be adapted accordin...

Страница 155: ...3 5 Electrode chap 1 7 3 EG Declaration of Conformity chap 7 Electrode retainer chap 4 6 Spare parts chap 6 Exhausts chap 3 Exhaust tube chap 1 9 G G Gas Gas connection chap 1 3 1 7 5 Gas ballast chap...

Страница 156: ...ction pipe for vacuum chamber chap 1 3 Suction sifter chap 6 T T Technical data Thermal danger chap 3 Timer chap 1 3 1 7 Type label chap 1 3 3 Troubleshooting chap 1 7 5 V V Vacuum pump chap 1 9 Vacuu...

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