Diener femto, Руководство по эксплуатации, Страница: 39 / 156

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3.2. Automatic mode
For the automatic mode the software PRS offers the opportunity to program different
processes through the process parameters.
With the function
F3 Programs
these processes will be created. Creating processes is only
possibly, if the user is logged in (password).
100 program places are prepared, in which each program number is belonging to a program
name.
A program can be build by subprograms. A program can consist of up to 10 subprograms.
The subprograms will be worked off in numbered order.
Creating of a subprogram will be done in the following sequence:
1. Pumping down
2. Gas supply
3. Plasma process
4. Flushing period
5. Venting period
The process gases which are used can be chosen: