Diener femto, Руководство по эксплуатации, Страница: 127 / 156

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In the following chapter you will find some information, which shall help you to find the right process
parameters.
10.1 Parameters:
These parameters are not exact specifications, which refer to our standard systems. For the
parameters it doesn’t matter what kind of generator is installed.
10.2 Materials:
Regard the product attributes concerning sensitivity to heat, UV or single process gases, by choosing
the process parameters.
10.3 Spread of Plasma:
For an optimal plasma treatment, the plasma has to be spread equable into the chamber (see
pictures).
air plasma (kHz – generator) oxygen plasma (kHz-generator)
RIE – plasma (MHz – generator) microwave plasma, with radiation protection
10.4 Pressure of gas bottle:
Pleas check the pressure of the gas bottle before starting the process (Is there enough gas in the
bottle?) and check the adjusted pre-pressure on pressure regulator (pre – pressure not higher than
2,5 bar, because MFC may be damaged).
Display pre-pressure Valve (Connection bottle to chamber)
Display (pressure of bottle) Connection for tube
Connection to bottle Regulation pre – pressure