Diener femto, Руководство по эксплуатации, Страница: 140 / 156

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Example for process with rotary drum:
Activation of polyamide-parts
Machine: Femto LF PC, rotary drum
Program step: Introduction Value
Subprogram1
last Subprogram don't change
1. Pumping off pressure 0,2 mbar
Pumping Off Period
2. max. Pumping off time 30 min.
3. select gas Gas1: O2 Gas2: free
4. Gas supply period 1 min.
5. select process gas no. (= MFC resp. Gas
connection as installed
on machine. Gas 1 =
MFC 1 at machine,...)
6. Gas rate 100%
7. Max. deviation 10%
8. Gas flow min. 0 sccm
9. Gas flow 50 sccm
10. Gas flow max.
200 sccm (max. of MFC,
may vary)
11. Process pressure 0,3 mbar
12. Max. deviation process pressure - 0,20 mbar/ + 0,40 mbar
Gas Supply Period
13. Control via gases check off
14. Duration 30 min.
15. Power setpoint 70%
16. Max. absolute deviation power. 10%
17. observed generatores
check off (all)
18. Max. temperature 100°C
19. Monomer setpoint 0 mg/min
20. Max. deviation
-0 mg/min / + 100
mg/min
21. Interval rotary drive / drum always on
22. Monitorings don't change
22.1 actual pressure 000:00:00 hhh:mm:ss
22.2 error active time pressure 000:30:00
23.1 actual gas flow 000:01:00
23.2 error active time gas flow 000:00:30
24.1 actual power 000:00:00
24.2 error active time power 000:00:20
25.1 actual temperature 000:00:00
Plasma Process
Period
25.2 error active time temperature 000:00:10
Flushing Period 22. flushing time 000:00:10
Venting Period 23. venting period 000:01:00