Diener femto, Руководство по эксплуатации, Страница: 93 / 156

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1
1
.
.
9
9
V
V
a
a
c
c
u
u
u
u
m
m
P
P
u
u
m
m
p
p
s
s
* The working life of the pump is limited at using of CF
4
/ O
2
or SF
6 .
Purge gas valve for pump
By the factory made installation (by Diener electronic) of a purge gas valve, a save
working method is guaranteed.
The rotary slide pump compress the gas, therefore a oil mist can arise and in worst
case it may happen, that a explosive mixture of oil mist and oxygen gas arises.
To avoid this risk the purge gas valve will be installed. The venting prevents the arising of the
critical mass.
For better understanding see figure on next page.
Figure: Function of pump with purge gas valve:
Purge gas valve
N
2
or air
O
2
O
2
+ N
2
Vacuum pump oil
O
2
N
2
O
2
O
2
N
2
N
2
O
2
O
2
N
2
O
2
N
2
O
2
O
2
N
2
O
2
-Amount < 30 %
O
2
Suction side Pressure side