
- 131 -
1
1
0
0
.
.
I
I
n
n
f
f
o
o
r
r
m
m
a
a
t
t
i
i
o
o
n
n
A
A
c
c
c
c
o
o
r
r
d
d
i
i
n
n
g
g
P
P
l
l
a
a
s
s
m
m
a
a
P
P
r
r
o
o
c
c
e
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s
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10.8 Gas consumption
The enclosed table should create an overview on the gas consumption:
The values are in relation to the max. flow per MFC. That means: at a MFC with 50 sccm we
originated from a gas flow of 50 sccm/min. per process.
To calculate your individual gas consumption, you find the formula below the table.
The individual gas consumption strongly depends on the suction power of your pump.
Formula:
1. Volume of bottle (litre) x volume (in bar) = volume (litre) at 1 bar
2. Volume at 1 bar x 1000 = t [minutes]
Gas flow in cm³
3. t [minutes] = t [hours]
60
Calculation example Femto (first line of table)
1.
2 l x 200 bar = 400 l (at 1 bar)
2.
400 l x 1000 = 20.000 minutes
20 cm³
3. 20.000
Min. = 333 hours
60
Содержание femto
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