background image

CDX2000 / 13.56 MHz & 400 kHz Manual 

© 2006 Comdel, Inc.

 

 

11

output of one side is enabled the letter H (HF) or L (LF) will blink and the green LED on the RF ON 

button will illuminate. 

7.

 

In local mode the display will show which RF output is currently controlled from the front panel in the 

upper left corner.  The default is “HF” for the 13.56 MHz output.  To switch to the “LF” 400 kHz 
output press the mode button (>>) once.  The forward power, reflected power and setpoint of the 

output under control are displayed.  The setpoint is adjusted by turning the encoder.  The output 

frequency of the LF side is displayed above the setpoint.  In the LF mode pressing the select button 

(>) will switch the generator to manual frequency control.  The display will change from AFC (auto) 
to MFC (manual) and turning the encoder will now adjust the frequency of the LF output.  Pressing 

the select button (>) again will change the LF output back to auto tune. 

8.

 

Enable RF by pushing the blue RF button on the left side of the front panel.  The RF button LED 

should illuminate, the display will flash 'RF', and readings of forward and reflected power should 

appear.  If the display shows 'CHECK RF INTERLOCK', this means that the RF enable Pins 4 and 9 

of the appropriate rear panel connector are not connected. 

9.

 

RF is disabled by pushing the RF button again, by removing RF interlock by disconnecting Pin 4 and 
9 of the appropriate rear panel connector, or by interrupting the AC mains via the AC interlock loop, 

the stop softkey, or the circuit breaker located on the rear panel. 

10.

 

The CDX2000 regulates forward power based upon the setpoint selected by the large data encoder 

knob on the front panel. 

11.

 

An overtemp condition due to improper clearance around the unit or high ambient temperature will 

automatically disable both RF outputs on the CDX2000.  The front panel display will show 

'OVERTEMP'.  RF will not be able to be turned on until proper coolant flow/temperature is 

established. 

 

B.  Remote Control Operation 

 

1-4.  Refer to Control pinout and signal table for the electrical interface specifications.  For remote control 

operation follow the first four procedures for local control as listed above. 
5.

 

Remote operation is the power-up default mode.  If the current mode of operation is local, then 

double-push the mode button (>>) until the display shows 'RM' in the upper left corner OR restart 

the unit by turning AC off then back on. 

6.  Either RF output is enabled by a contact closure between RF ENABLE Pins 4 and 9 of the 

appropriate rear panel connector.  The RF button should illuminate, the display flash 'H', 'F', or both, 

and readings of forward and reflected power should appear.  

7.  The voltage on Pin 5(+) and 6(-) of the P1 and P2 connectors will determine the output power level 

of each of the generator outputs.  A voltage of 0 to 10 volts DC across Pins 5 and 6 (chassis ground) 

will linearly correspond to an RF output of 0 to 1000 watts.  

8.  Reflected and forward power can be monitored remotely through Pins 2(+), 6(-) and 3(+), 6(-) 

respectively on each connector.  Both of these balanced analog outputs are 0 to 10 VDC linearly 

corresponding to 0 to 1000 watts of forward or reflected power. 

9.  An overtemp condition as stated in #11 above in local will also result in the 'closure' of the 

OVERTEMP DIGITAL OUTPUT, Pins 8(+) and 9(-) (chassis ground) of both rear panel I/O 

connectors. 

10.  When RF is present at either RF output connector, the POWER ON DIGITAL OUTPUT, Pin 7 of the 

appropriate rear panel connector will be at approximately 5V. 

 

 

Содержание CDX2000

Страница 1: ...n this manual is proprietary to Comdel Inc and is protected by copyright and trademark laws You may not modify copy reproduce republish post transmit or distribute in any way any material from this manual except as may be expressly permitted in writing by Comdel Inc Comdel Inc 11 Kondelin Road Gloucester MA 01930 Phone 978 282 0620 www comdel com COMDEL ...

Страница 2: ...l Operation 10 B Remote Control Operation 11 7 Theory of Operation 12 A AC Interlock System 12 B DC Power Supply 12 C Oscillator Control Board 13 D Driver 14 E PA 1250S Power Amplifier 14 F LF1250 Power Amplifier 14 G Directional Coupler Board 14 H CDX Controller 15 I CDX Autotune Parameters 15 8 Certification 16 9 Customer Service 17 List of Figures FP5315RX CDX2000 Block Diagram FA0900RX AC Inte...

Страница 3: ...l indicates the presence of high voltages in or around the unit This symbol indicates that the component or circuit is short circuit protected This symbol indicates the presence of RF energy in or around the unit This symbol indicates a protective earth ground connecting point This label indicates a presence of high voltage in or around the equipment which may cause sever injury or death All appro...

Страница 4: ...And Understand This Section Fully Before Installing or Operating This Equipment WARNING This equipment must be installed operated and serviced only by trained qualified persons General Safety Requirements WARNING Hazardous Voltages and RF voltages are present inside this unit which may cause injury or death To prevent electrical shock and or RF burns never operate this equipment with the covers re...

Страница 5: ...nimum interlock protection is located at the removable top cover bottom cover and RF output connector safety cover End user s system should provide indication to the operator of the interlock fault condition Low voltage power for the interlock circuit is supplied by a step down transformer located inside the unit This transformer is designed to provide safe low voltage operation and provide isolat...

Страница 6: ...a 1 25 VSWR load all phases as reference to 50 ohms The unit shall be capable of simultaneously supplying 1000 W of power at 400 kHz into a 50 ohm power load and 1000 W of power at 13 56 MHz into a separate 50 ohm power load The 13 56 MHz output shall deliver 0 to 1000 W continuous forward power into a load which consists of a 50 ohm coaxial cable any electrical length feeding a matching network t...

Страница 7: ...ure to self adjust frequency for the lowest VSWR over this range The auto tune feature should operate independent of the length of coaxial cable used to interface the output to the plasma resonant load The auto tuning frequency sweep will be of a continuous nature or comprised of discreet frequency steps of step size no larger than 100 Hz This should be capable of auto tuning to within 0 8 kHz of ...

Страница 8: ...nections Description Specifications Signal Input Impedance 10K ohms minimum Signal Input Isolation 1000 VAC MIN to the A C supply line Rear Panel Electrical Connections All electrical connections shall be placed at least 75mm 3 from the right and 100mm 4 from the left side of the rear panel when viewed from the rear for clearance purposes Input Power Connection Line cord to be 4 mm2 12 AWG conduct...

Страница 9: ...tached flush with bottom of power supply chassis Color and Finish Front panel to be the only surface to be painted gray with contrasting blue alpha numeric reference designators All other surfaces have a coated finish such as gold zinc chromate gold alodyne or equivalent Water Connections 1 4 NPT female one inlet and one outlet for water cooling of amplifier sections The water connections shall be...

Страница 10: ...mum levels permitted by ANSI C95 1 1982 standards on safety levels with respect to human exposure to RF and electromagnetic fields from 300KHz to 100GHz F Testing Specifications Production Acceptance Test Each unit will be required to pass production acceptance testing and a Final Test Report will be generated to document results Production Acceptance Testing process shall include as a minimum Com...

Страница 11: ...stance 4 Maintenance The CDX2000 is designed to operate unattended for long periods of time Should periodic maintenance or service be required it should only be performed by qualified service persons Contact the factory for maintenance or service recommendations 5 Preparation for Use A Line Requirements The CDX2000 is designed to operate from a 208 VAC three phase line The system will still functi...

Страница 12: ... 9 must be connected for the unit to be operated These jumps must be made on both I O connectors 1 Check to see that there is clearance around the unit for proper air flow and that a proper RF load is connected to each RF output connector at rear of unit 2 Connect unit to 208VAC nominal three phase and turn on main power breaker at rear of unit 3 The CDX2000 should power up automatically autostart...

Страница 13: ... on the front panel 11 An overtemp condition due to improper clearance around the unit or high ambient temperature will automatically disable both RF outputs on the CDX2000 The front panel display will show OVERTEMP RF will not be able to be turned on until proper coolant flow temperature is established B Remote Control Operation 1 4 Refer to Control pinout and signal table for the electrical inte...

Страница 14: ...Figure FP5315RX CDX2000 BLOCK DIAGRAM to see how the individual modules are connected together The LF1250 amplifier s frequency can be manually adjusted between 380 420 kHz from the front panel local mode only or the amplifier can Autotune to minimize reflected power The Autotune algorithm is carried out in the generator s firmware and is optimized to tune quickly in a plasma load There are some a...

Страница 15: ...erence level applied to the non inverting input The reference level is set either from the front panel potentiometer or from Pin 5 of the J1 connector The LM 356 drives the gain control transistor Q5 until enough signal from the forward power detector in the directional coupler is applied to the inverting input to the op amp When the inverting signal equals the reference voltage on the non inverti...

Страница 16: ... of these transformers is once again added together in a four way hybrid combiner There are no adjustments on the PA1250S Typical Specifications PA1250S Gain 15 dB Input power 20 watts Output power 1500 watts min Input impedance 50 ohms Output impedance 50 ohms Collector voltage 37 VDC Current draw 50 ADC At 1250 watt system output into 50 ohm resistive load F LF1250 Power Amplifier The LF1250 pow...

Страница 17: ...r any reason the program is terminated or gets lost the watchdog timer U6 automatically restarts the system U6 also monitors VCC for low voltage conditions If VCC drops below 4 5V the system is shut down via uP reset line U1 71 If the optional RS 232 serial port is utilized U7 and associated components supplies the interface U14 provides the 5V or 10V reference for the A D U11 and D A U13 converte...

Страница 18: ...and varies as follows 0 5 1 1 2 2 3 3 4 Scale The scale setting determines whether the frequency step size is proportional to the SWR or the square root of the SWR The scale is set by switch 7 Typically the square root setting will tune faster 0 SQUARE ROOT 1 LINEAR 5 Start The start setting determines whether the frequency starts at MIN frequency and tunes up or starts at MAX frequency and tunes ...

Страница 19: ...on warranty products When sending equipment to the factory for service or calibration you need a Return Material Authorization RMA number to ensure that we can properly track your equipment Obtaining an RMA Number To complete an online request for an RMA number log on to www comdel com and click on Factory Service under the Sales Service Menu or for direct access go to http www comdel com pages sa...

Страница 20: ...ffer application support RF training and product design assistance All are fully supported by the product marketing and engineering team at Comdel s headquarters International Offices EUROPE Comdel United Kingdom ARD Phone 44 1256 766914 or 44 1256 766917 Fax 44 1256 766915 Email steve_ottaway comdel com MIDDLE EAST Israel Odem Scientific Applications Ltd Phone 972 8 9366101 Fax 972 8 9366102 Emai...

Страница 21: ...mproper conditions misuse abuse or negligence and that Sellers warranty decals have not been removed or tampered with and the equipment has not been repaired or modified by anyone other than Seller s authorized personnel Other than those expressly stated herein there are no other warranties of any kind expressed or implied and specifically excluded but not by way of limitation are the implied warr...

Страница 22: ...CDX2000 13 56 MHz 400 kHz Manual 2006 Comdel Inc 20 ...

Страница 23: ...CDX2000 13 56 MHz 400 kHz Manual 2006 Comdel Inc ...

Отзывы: