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CDX2000 / 13.56 MHz & 400 kHz Manual 

© 2006 Comdel, Inc.

 

 

18

International Support 

 

We currently provide authorized product repairs and technical support through the following U.S.A. and 
International Comdel locations marketed with 

 Authorized Repair Depot (ARD).  These offices have experienced 

technicians that can assist in arranging for product returns or on-site assistance.   
 

The Comdel authorized repair depots stock parts and test equipment that support most Comdel products.  

Customers are encouraged to discuss specific service support needs with their local Comdel office to ensure prior 

product support preparation is arranged.    
 

Other Comdel sales and service distributors are available to support facilitating return of Comdel products to the 

most appropriate service repair depot. 

 
Comdel authorized depots offer application support, RF training, and product design assistance.  All are fully 

supported by the product marketing and engineering team at Comdel’s headquarters. 

 

 

International Offices 
 

EUROPE 
Comdel United Kingdom 

 (ARD) 

Phone: +44-1256-766914 or +44-1256-766917 
Fax: +44-1256-766915 

Email: [email protected] 

 

MIDDLE EAST 
Israel 

Odem Scientific Applications Ltd. 

Phone: +972-8-9366101 

Fax: +972-8-9366102 
Email: [email protected] 

 

ASIA 
Comdel Seoul, Korea 

 (ARD) 

Phone: +82-2-565-4780 

Fax: +82-2-564-5398 

Email: 

[email protected]

 

  

Singapore/Malaysia  
DAL Engineering (S) PTE, Ltd. 

 (ARD) 

Phone: +65-6-743-5538 

Fax: +65-6-743-5539 

Email: [email protected] 
 

Taiwan, ROC 
FairTech Corp. 

 (ARD) 

Phone: +886-3-5723257 
Fax: +886-3-5727302 

Email: [email protected] 

  

China 
Beijing Leyfond Vacuum Tech. Co., Ltd. 

Phone: +86-10-82843366 

Fax: +86-10-82842835 

Email: [email protected] 

  
 

 

 

 
JAPAN 
Comdel Branch Office Japan 

 (ARD) 

Phone: + 81-47-369-9393 

Fax: +47-369-3317 
Email: [email protected] 

 
PRA Ltd.  

 (ARD) 

Phone: +47-369-3389  
Fax: +47-369-3317 

Email: [email protected] 

 

Содержание CDX2000

Страница 1: ...n this manual is proprietary to Comdel Inc and is protected by copyright and trademark laws You may not modify copy reproduce republish post transmit or distribute in any way any material from this manual except as may be expressly permitted in writing by Comdel Inc Comdel Inc 11 Kondelin Road Gloucester MA 01930 Phone 978 282 0620 www comdel com COMDEL ...

Страница 2: ...l Operation 10 B Remote Control Operation 11 7 Theory of Operation 12 A AC Interlock System 12 B DC Power Supply 12 C Oscillator Control Board 13 D Driver 14 E PA 1250S Power Amplifier 14 F LF1250 Power Amplifier 14 G Directional Coupler Board 14 H CDX Controller 15 I CDX Autotune Parameters 15 8 Certification 16 9 Customer Service 17 List of Figures FP5315RX CDX2000 Block Diagram FA0900RX AC Inte...

Страница 3: ...l indicates the presence of high voltages in or around the unit This symbol indicates that the component or circuit is short circuit protected This symbol indicates the presence of RF energy in or around the unit This symbol indicates a protective earth ground connecting point This label indicates a presence of high voltage in or around the equipment which may cause sever injury or death All appro...

Страница 4: ...And Understand This Section Fully Before Installing or Operating This Equipment WARNING This equipment must be installed operated and serviced only by trained qualified persons General Safety Requirements WARNING Hazardous Voltages and RF voltages are present inside this unit which may cause injury or death To prevent electrical shock and or RF burns never operate this equipment with the covers re...

Страница 5: ...nimum interlock protection is located at the removable top cover bottom cover and RF output connector safety cover End user s system should provide indication to the operator of the interlock fault condition Low voltage power for the interlock circuit is supplied by a step down transformer located inside the unit This transformer is designed to provide safe low voltage operation and provide isolat...

Страница 6: ...a 1 25 VSWR load all phases as reference to 50 ohms The unit shall be capable of simultaneously supplying 1000 W of power at 400 kHz into a 50 ohm power load and 1000 W of power at 13 56 MHz into a separate 50 ohm power load The 13 56 MHz output shall deliver 0 to 1000 W continuous forward power into a load which consists of a 50 ohm coaxial cable any electrical length feeding a matching network t...

Страница 7: ...ure to self adjust frequency for the lowest VSWR over this range The auto tune feature should operate independent of the length of coaxial cable used to interface the output to the plasma resonant load The auto tuning frequency sweep will be of a continuous nature or comprised of discreet frequency steps of step size no larger than 100 Hz This should be capable of auto tuning to within 0 8 kHz of ...

Страница 8: ...nections Description Specifications Signal Input Impedance 10K ohms minimum Signal Input Isolation 1000 VAC MIN to the A C supply line Rear Panel Electrical Connections All electrical connections shall be placed at least 75mm 3 from the right and 100mm 4 from the left side of the rear panel when viewed from the rear for clearance purposes Input Power Connection Line cord to be 4 mm2 12 AWG conduct...

Страница 9: ...tached flush with bottom of power supply chassis Color and Finish Front panel to be the only surface to be painted gray with contrasting blue alpha numeric reference designators All other surfaces have a coated finish such as gold zinc chromate gold alodyne or equivalent Water Connections 1 4 NPT female one inlet and one outlet for water cooling of amplifier sections The water connections shall be...

Страница 10: ...mum levels permitted by ANSI C95 1 1982 standards on safety levels with respect to human exposure to RF and electromagnetic fields from 300KHz to 100GHz F Testing Specifications Production Acceptance Test Each unit will be required to pass production acceptance testing and a Final Test Report will be generated to document results Production Acceptance Testing process shall include as a minimum Com...

Страница 11: ...stance 4 Maintenance The CDX2000 is designed to operate unattended for long periods of time Should periodic maintenance or service be required it should only be performed by qualified service persons Contact the factory for maintenance or service recommendations 5 Preparation for Use A Line Requirements The CDX2000 is designed to operate from a 208 VAC three phase line The system will still functi...

Страница 12: ... 9 must be connected for the unit to be operated These jumps must be made on both I O connectors 1 Check to see that there is clearance around the unit for proper air flow and that a proper RF load is connected to each RF output connector at rear of unit 2 Connect unit to 208VAC nominal three phase and turn on main power breaker at rear of unit 3 The CDX2000 should power up automatically autostart...

Страница 13: ... on the front panel 11 An overtemp condition due to improper clearance around the unit or high ambient temperature will automatically disable both RF outputs on the CDX2000 The front panel display will show OVERTEMP RF will not be able to be turned on until proper coolant flow temperature is established B Remote Control Operation 1 4 Refer to Control pinout and signal table for the electrical inte...

Страница 14: ...Figure FP5315RX CDX2000 BLOCK DIAGRAM to see how the individual modules are connected together The LF1250 amplifier s frequency can be manually adjusted between 380 420 kHz from the front panel local mode only or the amplifier can Autotune to minimize reflected power The Autotune algorithm is carried out in the generator s firmware and is optimized to tune quickly in a plasma load There are some a...

Страница 15: ...erence level applied to the non inverting input The reference level is set either from the front panel potentiometer or from Pin 5 of the J1 connector The LM 356 drives the gain control transistor Q5 until enough signal from the forward power detector in the directional coupler is applied to the inverting input to the op amp When the inverting signal equals the reference voltage on the non inverti...

Страница 16: ... of these transformers is once again added together in a four way hybrid combiner There are no adjustments on the PA1250S Typical Specifications PA1250S Gain 15 dB Input power 20 watts Output power 1500 watts min Input impedance 50 ohms Output impedance 50 ohms Collector voltage 37 VDC Current draw 50 ADC At 1250 watt system output into 50 ohm resistive load F LF1250 Power Amplifier The LF1250 pow...

Страница 17: ...r any reason the program is terminated or gets lost the watchdog timer U6 automatically restarts the system U6 also monitors VCC for low voltage conditions If VCC drops below 4 5V the system is shut down via uP reset line U1 71 If the optional RS 232 serial port is utilized U7 and associated components supplies the interface U14 provides the 5V or 10V reference for the A D U11 and D A U13 converte...

Страница 18: ...and varies as follows 0 5 1 1 2 2 3 3 4 Scale The scale setting determines whether the frequency step size is proportional to the SWR or the square root of the SWR The scale is set by switch 7 Typically the square root setting will tune faster 0 SQUARE ROOT 1 LINEAR 5 Start The start setting determines whether the frequency starts at MIN frequency and tunes up or starts at MAX frequency and tunes ...

Страница 19: ...on warranty products When sending equipment to the factory for service or calibration you need a Return Material Authorization RMA number to ensure that we can properly track your equipment Obtaining an RMA Number To complete an online request for an RMA number log on to www comdel com and click on Factory Service under the Sales Service Menu or for direct access go to http www comdel com pages sa...

Страница 20: ...ffer application support RF training and product design assistance All are fully supported by the product marketing and engineering team at Comdel s headquarters International Offices EUROPE Comdel United Kingdom ARD Phone 44 1256 766914 or 44 1256 766917 Fax 44 1256 766915 Email steve_ottaway comdel com MIDDLE EAST Israel Odem Scientific Applications Ltd Phone 972 8 9366101 Fax 972 8 9366102 Emai...

Страница 21: ...mproper conditions misuse abuse or negligence and that Sellers warranty decals have not been removed or tampered with and the equipment has not been repaired or modified by anyone other than Seller s authorized personnel Other than those expressly stated herein there are no other warranties of any kind expressed or implied and specifically excluded but not by way of limitation are the implied warr...

Страница 22: ...CDX2000 13 56 MHz 400 kHz Manual 2006 Comdel Inc 20 ...

Страница 23: ...CDX2000 13 56 MHz 400 kHz Manual 2006 Comdel Inc ...

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