BRONKHORST VDM Series, Инструкция по эксплуатации

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Bronkhorst®
Instruction Manual Vapor Delivery Module 9.17.079D 24
6
Troubleshooting and service
6.1 Common issues
Symptom Possible cause Action
No heating of heater, everything else
works
(no ready heater LED after 10 minutes)
1. Mains switch turned off Turn on mains switch
2. Fuse may be blown Replace fuse
(check mains and heater fuse)
3. Defective temperature sensor Return equipment
4. Heater defective Return equipment
No heating of tracing, everything else
works
(no ready heater LED after 30 minutes)
1. Fuse blown Replace fuse
(check mains and tracing fuse)
2. Defective temperature sensor Replace sensor
3. Defective tracing Replace tracing
4. Inadequate insulation resulting
in thermal power loss
Improve insulation
No Liquid flow 1. Wrong controller mode LFC Check controller mode LFC
2. No setpoint Give Setpoint
No Gas flow 1. Wrong controller mode MFC Check controller mode MFC
2. No Setpoint Give Setpoint
No vapor stream 1. No gas supply Check gas supply
2. No liquid supply Check liquid supply
Liquid in process chamber 1. Mixture saturated,
condensation
1. Increase setpoint Heater
2. Increase setpoint Tracing
3. Increase carrier gas flow
4. Decrease liquid flow
5. Any combination of the
actions 1 – 4
2. No proper insulation of the
outlet piping
Improve insulation of piping
Irregular vapor stream Significant pressure variations
on inlets
Reduce pressure variations by e.g.
adding pressure regulators or
buffers
·
In case of equipment malfunctioning, de-installation and returning of the equipment is recommended. See Removal
and return instructions for relevant details.
·
Do not open or disassemble the equipment.