BRONKHORST VDM Series, Инструкция по эксплуатации

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Bronkhorst®
Instruction Manual Vapor Delivery Module 9.17.079D 17
4.6.2 Starting up using vacuum
4.6.2.1 Filling system
Procedure Actions
A1 Evacuate the lines “Vacuum”
·
Start pumps
A2 Evacuate all lines
·
Close: V1, V2, V3, V4, and V6
·
Make sure that “waste” and “process” are vacuum
·
Connect inert gas on carrier gas inle.
·
Open : V5 and V8
·
Give setpoint to gas and liquid control (the control
valves of the LFC and MFC open)
·
Pump for a long time
·
Remark: if the system is not completely dry follow
procedure of E3, E4, (E5)
A3 Purge line between inert gas source and valve V1
·
Open valve V1 briefly for some seconds.
A4 Purge line between process gas source and gas
MFC
·
Give setpoint = 0 to LFM (mix valve closes)
·
Open valve V3 briefly for some seconds
A5 Pump down liquid supply
·
Open V2 for some time
·
Close V2
A6 Setup carrier gas
·
Close V8
·
Open V3
A7 Fill the system with liquid
·
Close V1
·
Open B2 briefly; allow mixing valve VDM to fill
·
Close V5
Make sure that the carrier gas is always flowing when
the liquid flow is on. Preferably, let always gas flow in
the carrier gas line when the system is filled with liquid.
A8 Optional: degassing mixing valve
·
Open V5, a needle valve will be best, to avoid too
much liquid be pumped away
A9 The system is now ready for use
4.6.2.2 Starting process
Procedure Actions
B1 Set the heater at right temperature
·
Give setpoint to the heater, wait until temperature is
reached
B2 Start gas flow
·
Give setpoint to MFC
Make sure that the carrier gas is always flowing when
the liquid flow is on. Preferably, let always gas flow in
the carrier gas line when the system is filled with liquid.
B3 Start liquid flow
·
Give setpoint LFC, wait until stabilization
Close supply pressure of the liquid vessel during the
process. The pressure controller of the inert gas supply
can influence the stability of the liquid flow controller.
B4 Connect process
·
Open V7, close V6