BRONKHORST VDM Series, Инструкция по эксплуатации

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Bronkhorst®
Instruction Manual Vapor Delivery Module 9.17.079D 14
4
Installation
4.1 Mounting
The mounting position of the equipment is upright. Please take attention:
·
Avoid installation in close proximity of mechanic vibration and/or heat sources.
·
Avoid contact between hot surfaces of the enclosure with electrical cables and fluidic hoses/pipes.
·
Ventilation requires a minimum distance of 100 mm space from each side to a wall.
·
Make use of the protective earth pin (see Connectors (hook-up diagram) , connector 3) for grounding the connected
tubing. Use an appropriate cable.
·
Mount the equipment in such a way, that cables and mains switches can easily be reached and disconnected.
4.2 Fluidic connections
For exact information on the fittings, please contact Swagelok for further instructions or documentation.
Please be aware when using Oxygen (O
2
) that the fittings mounted in the gas line should be absolutely oxygen clean.
4.3 Supply pressure
Do not apply pressure until electrical connections are made. When applying pressure to the system, make sure that the
pressure is increased gradually and avoid pressure shocks in the system.
4.4 Leak check
Check the system for leaks before applying pressure, especially if toxic, explosive or other dangerous fluids are used.
4.5 Seals
Bronkhorst has gathered a material compatibility chart from a number of sources believed to be reliable. However, it is a
general guide only. Operating conditions may substantially change the accuracy of this guide. Therefore there is no liability
for damages accruing from the use of this guide. The customer’s application will demand its own specific design or test
evaluation for optimum reliability. So check order documentation if the used seals are correct for the process.