
3/3
Edition 04 - September 97
User’s Manual
ASM 180 TD/TD+ - ASM 181 TD+
Contents
Alcatel Vacuum Technology France - ASM 180 TD/TD+ - ASM 181 TD+ User’s Manual
M
ANUAL REFERENCE
:
104435
E
DITION
:
04 - September 97
Maintenance
Sheets
Components
Appendix
■
E 10
■
E 20
■
E 30
■
E 40
■
E 50
■
E 60
■
E 70
■
E 80
■
F 10
■
F 20
■
F 30
■
F 40
■
F 50
■
F 60
■
F 70
■
F 80
■
F 90
■
F 100
■
F 110
■
F 120
■
G 10
■
G 20
■
Analyzer cell maintenance . . . . . . . . . . . . . . .
■
Greasing the hybrid turbomolecular pump . . . .
■
Greasing the molecular drag pump . . . . . . . . .
■
Replacement / Recalibration of the detector
internal calibrated leak . . . . . . . . . . . . . . . . .
■
Autocalibration of the detector with an external
calibrated leak . . . . . . . . . . . . . . . . . . . . . . .
■
MD4E membrane pump maintenance . . . . . . .
■
CP20 Partial maintenance . . . . . . . . . . . . . . .
■
I/O interface board fuse replacement . . . . . . .
■
Preventive maintenance components delivered
with the detector. . . . . . . . . . . . . . . . . . . . . .
■
Monitoring and display . . . . . . . . . . . . . . . . .
■
Power and electrical supply . . . . . . . . . . . . . .
■
Automatism and electronic circuits . . . . . . . . . .
■
Measurement . . . . . . . . . . . . . . . . . . . . . . . .
■
Pumping . . . . . . . . . . . . . . . . . . . . . . . . . . .
■
Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
■
Pipes . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
■
Connections and seals . . . . . . . . . . . . . . . . .
■
Cover . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
■
Options and accessories . . . . . . . . . . . . . . . .
■
Components summary . . . . . . . . . . . . . . . . . .
■
View of the operator interface . . . . . . . . . . . .
■
Recording curve . . . . . . . . . . . . . . . . . . . . . .