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ASM 180 TD
Detector operating principle
A 20
Alcatel Vacuum Technology France - ASM 180 TD/TD+ - ASM 181 TD+ User’s Manual
4/4
Edition 03 - May 97
Operation
in internal
calibration mode
1
14
c
11
12
Roughing of calibrated
leak
2
9
18
14
a
17
11
12
Calibration
3
14
b
Venting of calibrated
leak
The leak is returned to
atmospheric pressure