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2/4
Gross leak test mode (FL)
Inlet Pressure
≤
6 mbar
Gross leak test mode (GL)
1 mbar < Inlet Pressure < 6 mbar
ASM 180 TD+ - ASM 181 TD+
Detector operating principle
A 21
Alcatel Vacuum Technology France - ASM 180 TD/TD+ - ASM 181 TD+ User’s Manual
Edition 04 - September 97
Operation in
vacuum test mode:
3 stages
1
Primary roughing
Note: Only operational parts are represented.
2a
2b
1
4
20
7
5
12
12
1
4
9
17
18
20
12
5
1
4
9
7
17
18
20
12
5