Air Products Gasguard 250, Руководство по установке

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Section 5: Helium Leak Testing
Revision B: May 1997 Page 5 - 1
Section 5: Helium Leak Testing
All personnel must be trained in helium leak detector operations. Consult your
leak detector manufacturer for leak detector operations training.
The customer is responsible for ensuring that all field piping to the valve manifold
box be completely leak tight. Leak testing should be performed in accordance
with the current industry standard, SEMI (Semiconductor Equipment and
Materials International) #F1-90, Specification for Leak Integrity of Toxic Gas
Piping Systems and all applicable codes. A suitable helium leak detector is
required to attain the level of sensitivity required by the above standard.
There are several methods of helium leak testing. The two most often used are:
Inboard - The component being tested is evacuated to a negative
pressure and sprayed externally with helium.
Outboard - The component is pressurized with helium and sniffed
externally with the detector.
NOTE: It is recommended that the internal valve manifold box
panel, which was helium leak tested at the factory, be rechecked at
this time to ensure no leaks have developed during installation or
shipment. Consult Air Products for proper helium leak detection
procedures.
In order to adequately leak test the valve manifold box internal and external
piping, various pneumatic valves within the unit must be operated. These valves
can be manually opened and closed through "Manual Mode" operation on the front
keypad of the controller. Air Products
strongly recommends that anyone who has
not already done so, receive operations training by an Air Products representative
prior to operating the GG250 Valve Manifold Box in "Manual Mode". Operations
training is an additional service provided for a cost. The cost of this service may
have been
pre-arranged during the sale and scope review of the project. Contact
your Air Products representative to discuss this.