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Section 3: Tubing Connections

Revision C: May 1997

Page 3 - 5

When multiple gases are to be vented, ensure compatibility before plumbing vents
together. Contact your Air Products Representative for this information. A
nitrogen trickle purge is constantly bled into the vent line through the vacuum
venturi assembly to maintain an inert atmosphere and prevent back diffusion
through the vent system. The venturi supply valve contains an orifice which
provides a continuous flow of 2-5 SLPM (4-10 SCFH). Figure 3.4 below shows a
typical vacuum venturi assembly with trickle flow valve.

Figure 3.4:

Vacuum Venturi Assembly with Trickle Flow Valve

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Содержание Gasguard 250

Страница 1: ...allation Manual for the Gasguard 250 Valve Manifold Panel and Valve Manifold Box Systems Commodity Number 809 603649 Revision July 1998 Air Products and Chemicals Inc 1919 Vultee Street Allentown PA 1...

Страница 2: ...ion 4 Introduction A First issue Section 1 Safety Warnings B Per SEMI S2 1993 and CE Mark Section 2 Dimensions and Mounting B Per SEMI S2 1993 and CE Mark Section 3 Tubing Connections C Per SEMI S2 19...

Страница 3: ......

Страница 4: ...y or death if proper procedures are not followed All installation personnel MUST read and understand the safety warnings section before installing the equipment System Hazards Possible hazards when in...

Страница 5: ...European Community Middle East Gases 32 73 32 949 Technical Support Normal Operation 8 00 a m to 5 00 p m E S T USA Air Products and Chemicals Inc 610 481 3810 Semiconductor Equipment Manufacturing C...

Страница 6: ...iii Technical Support Normal Operation 08 00 to 17 00 except Friday 08 00 to 16 30 European Community Air Products and Chemicals Inc 32 2 725 95 80 The Equipment Centre Leuvnesesteenweg 48C 1932 St S...

Страница 7: ...matic Supply 3 7 3 7 Enclosure Exhaust System Requirements 3 8 3 8 Weld Shield Gas Purge Gas Connection 3 10 3 9 Helium Leak Test Port 3 11 3 10 Hazardous Gas Leak Detection System Customer Requiremen...

Страница 8: ...built in accordance with the Uniform Fire Code UFC and the National Fire Protection Association NFPA The source equipment must be installed and operated in accordance with the UFC NFPA and all other...

Страница 9: ...Gasguard 250 VMB System Installation Manual Air Products and Chemicals Inc Page i 2...

Страница 10: ...icons found in various sections of the manual and on the equipment The hazard warning labels used in the manual will correlate with those used on the equipment 1 1 1 Level or Intensity of Hazard Indi...

Страница 11: ...an cause an explosion when combined with air The formation for explosive gas mixtures of flammable gas and air when exposed to an ignition source Pyrophoric gases which will ignite spontaneously witho...

Страница 12: ...tic closers This symbol warns of the possibility of the cabinet tipping over if it is not installed properly Personnel injury could result This symbol indicates the need for head protection 1 2 Inert...

Страница 13: ...nconsciousness Symptoms of asphyxia include Rapid breathing Nausea Vomiting Inability to move Convulsive movements Collapse Abnormal pulse Rapid fatigue Faulty judgment Insensitivity to pain Abnormal...

Страница 14: ...king around these lines Insure that pressure has been vented before breaking any connection Tag out and lock out the line before doing any work Follow Typical Minimal Lockout or Tagout System Procedur...

Страница 15: ...could fall and injure crush or kill personnel working in the area When installing the system extreme care needs to be taken to support it properly Due to the top heavy nature of the system if not ins...

Страница 16: ...e enclosure Figure 2 1 shows the outline dimensions for an eight branch valve manifold box with unistrut for wall mounting Figure 2 2 shows the outline dimensions for a four branch valve manifold box...

Страница 17: ...sguard 250 VMB System Installation Manual Air Products and Chemicals Inc Page 2 2 Weight 275 Pounds 124 43 Kilograms Figure 2 1 Outline Dimensions for 8 Branch Valve Manifold Box with Vertical Unistru...

Страница 18: ...Section 2 Dimensions and Mounting Revision B May 1997 Page 2 3 Weight 405 Pounds 183 26 Kilograms Figure 2 2 Outline Dimensions for 4 Branch Valve Manifold Box Mounted on a Free Standing Rack...

Страница 19: ...ocated in each corner of the rack See Figure 2 3 for typical mounting hole locations for the 4 and 8 branch VMB racks The mounting location should be clean and level Figure 2 3 Mounting Hole Locations...

Страница 20: ...All tubing connections are made at the top rear of the enclosure All tube stubs are labeled with their function Process and purge lines are double bagged and taped for shipment Vent and venturi supply...

Страница 21: ...n points See the drawings located in the Appendix of this manual for the specific piping connection locations for this system Figure 3 1 Typical 4 Branch VMB Installation Connection Points NOTE The ab...

Страница 22: ...n devices Full cylinder pressures could be introduced into the process line under certain component failures A shutdown signal must be supplied to the valve manifold box if a leak in the process line...

Страница 23: ...the purging cycles when the process gas panel is being purged prior to stick maintenance or removal At this time 50 60 LPM of nitrogen is also being sent into the line through the vacuum venturi loop...

Страница 24: ...ogen trickle purge is constantly bled into the vent line through the vacuum venturi assembly to maintain an inert atmosphere and prevent back diffusion through the vent system The venturi supply valve...

Страница 25: ...y is usually taken from a bulk liquid source but it can also originate from a cylinder manifold system The vacuum generator will demand a flow of 50 60 LPM of nitrogen during purge cycles 3 5 Purge Li...

Страница 26: ...ed with a pressure switch to monitor the pressure The Type Z purge will require a flow rate of approximately 25 CFH NOTE The systems are not Explosive Atmospheres Directive approved for use in the Eur...

Страница 27: ...mes stated on the label attached to the controller Figure 3 5 Rear View of Gasguard 250 Controller 3 7 Enclosure Exhaust System Requirements The VMB enclosure must be connected to an exhaust system th...

Страница 28: ...4 Enclosure Duct Size Hatch Status Exhaust Requirement Static Pressure Requirement inches water column 4 branch 24 6 Open Closed 400 CFM 375 CFM 0 33 0 40 8 branch 30 6 Open Closed 470 CFM 450 CFM 0 4...

Страница 29: ...gas during installation and testing of the valve manifold box The connection is teed from the purge gas inlet line and includes a manual shut off valve MV 30 An access hole at the bottom of the enclos...

Страница 30: ...ld box This port is for vacuum service only Do not connect pressurized gas to this port 3 10 Hazardous Gas Leak Detection System Customer Requirement A gas leak detection system must be installed by t...

Страница 31: ...lectrical diagram Figure 4 0 depicts the essential elements of the controller interior does not include the controller door elements to be addressed during equipment installation Terminal strips for D...

Страница 32: ...nnections to earth ground A ground lug is supplied on the controller as well as the plenum of the gas cabinet for customer hookup to the facilities grounding network Figure 4 1 shows a suggested groun...

Страница 33: ...al circuit interrupting device to remove power from the unit when maintenance on the controller is required and should be Lockout Tagout capable This device should be rated as a minimum at 240 volts 3...

Страница 34: ...The power input must be wired to screw terminals located on the I O processor board See Figure 4 3 for the location of the screw terminals For additional detail on the power connection see Figure 4 4...

Страница 35: ...ure proper levels 4 3 Field Connections In NEC Class I Division 2 areas only in the U S A a conduit seal pour fitting or equivalent must be installed between each electrical connection point on the ca...

Страница 36: ...and external I O devices are made at the main I O board digital inputs and the relay output board digital outputs See Figure 4 3 for details on the location of the connections The tables on the next...

Страница 37: ...s gas flow from VMB Note The VMB controller will be configured as described above unless specific changes are agreed to by the customer and Air Products The specific I O for this system are found on d...

Страница 38: ...1 42 43 2 44 45 46 3 47 48 49 4 50 51 52 Digital Output NO Terminal 2 COMMON Terminal 2 NC Terminal 2 5 53 54 55 6 56 57 58 7 59 60 61 8 62 63 64 Digital Inputs Main I O Board Pin Outs Digital Input 2...

Страница 39: ...controllers and the network host computer It is the customer s responsibility to install and ensure the integrity of all interconnect wiring between the GG controllers and the network host computer N...

Страница 40: ...ontrol processor board T6 on the inside of the controller door See Figures 4 7 and 4 9 for details Figure 4 7 View of Inside Door of Gasguard 250 Controller 4 5 3 PC Network Breakout Box This box is l...

Страница 41: ...e PC network field wiring between GG250 cabinets VMBs and the host PC Figure 4 10 shows the field wiring between Span LR300 displays and the host PC Cable specifications follow Recommended cable Belde...

Страница 42: ...onfiguration Figure 4 11 shows the MMMS Gasguard Network Wiring Configuration Figure 4 11 MMMS Network Interface REC 2 7 REC 9 XMIT 8 XMIT 6 REC REC 9 XMIT 7 XMIT 4 9 PIN PLUG MALE D SUB CONNECTOR 9 P...

Страница 43: ...t converter modules The MMMS Network Interface Box was designed to allow front and back access to the rack mounted components even if the assembly was wall mounted To accomplish this the box is double...

Страница 44: ...nstallation Manual Air Products and Chemicals Inc Page 4 14 Figure 4 12 Network Field Wiring Between Cabinets VMBs and MMMS GG250 Interface Box Figure 4 13 Network Field Wiring Between SPAN LR300 and...

Страница 45: ...ally with helium Outboard The component is pressurized with helium and sniffed externally with the detector NOTE It is recommended that the internal valve manifold box panel which was helium leak test...

Страница 46: ...h pressure process gas is present No process gas cylinders should be connected to the upstream supply source for the VMB at this time If one is or was connected do not continue as personal injury or d...

Страница 47: ...ws Press The LCD screen will prompt PASSWORD Type in the password Press If the password is correct the Main Menu will be displayed If the password is incorrect ACCESS DENIED will be displayed for 5 se...

Страница 48: ...ay be prompted to confirm the opening of certain valves by pressing when CONFIRM appears below the OPEN VALVE X command This is done as a reminder to check for potentially dangerous situations prior t...

Страница 49: ...to the Cabinet Configuration menu NOTE Any valves left in open position will be closed automatically 8 Press to return to the main menu 9 From the Main Menu screen press to return to normal display C...

Страница 50: ...Gasguard 250 VMB System Installation Manual Air Products and Chemicals Inc Page 5 6...

Страница 51: ...The cost of this service may have been pre arranged during the sale and scope review of the project Contact your Air Products Representative to discuss this The Air Products and Chemicals Inc Technica...

Страница 52: ...see Section 4 4 6 Gasguard Network wiring installed if applicable and configured on the host see Section 4 5 7 Process lines installed and helium leak tested see Section 3 2 8 Vent line installed and...

Страница 53: ...Section 6 VMB Functional Checklist Revision A July 1995 Page 6 3 Inspection Sign Offs Electrical Mechanical Quality Safety APCI Field Start Up Checklist Complete...

Страница 54: ...heet Verify leak test from gas bottle to P O U complete Verify corrosive or toxic scrubber and incinerator operational and running Pitot tube installed with correct 90 orientation Tel tails installed...

Страница 55: ...k of the controller Do all valves operate Manual mode operation No audible solenoid leaks Re install pneumatic bulkheads from the back of the controller Verify correct CPU eprom VERS __________ Verify...

Страница 56: ...otes _________________________________________________________________ ________________________________________________________________________ FUNCTIONAL TEST DIGITAL ALARMS Record label from softwar...

Страница 57: ...3 Relay 4 Relay 5 Relay 6 Relay 7 Relay 8 Verify First Security Verify Second security Verify Third security FUNCTIONAL TEST USER SET POINTS cont Check off line item when completed Sign and date when...

Страница 58: ...________________________________________________________________________ ___________________ FUNCTIONAL TEST FILE VERIFICATION Check off line item when completed Sign and date when section is complet...

Страница 59: ..._________________________________________________________ _________________________________________________________ _________________________________________________________ __________________________...

Страница 60: ...Gasguard 250 VMB System Installation Manual Air Products and Chemicals Inc Page 6 10...

Страница 61: ...Appendix Revision B May 1997 Page A 1 Appendix The Appendix contains the SEMC QAF030 UHP Tubing and Fitting Specification and the system specific drawings referenced in this manual...

Страница 62: ...3 0 Responsibility 3 1 The Materials Management group of SEMC is responsible for communicating this requirement to its vendors and ensuring their full compliance 3 2 The vendor shall review and respo...

Страница 63: ...actual range and does not allow for rounding of numbers as set forth in ASTM A269 6 1 4 Tubing shall conform to the requirements of ASTM A269 for sizes one half inch diameter and larger and ASTM A632...

Страница 64: ...han 1 ppm Filtered to no more than 10 particles per scf larger than 0 02 microns at point of use 6 4 2 Deionized water used for cleaning shall have the following minimum point of use requirements and...

Страница 65: ...damage to double bagging tubing and fittings 6 7 4 Finished components shall be mill and heat traceable and permanently marked for correspondence to the applicable mill test reports 6 8 Inspection an...

Страница 66: ...mic percent units and shall verify chromium to iron ratio of 1 5 1 and a minimum chromium oxide to iron oxide ratio of 3 1 for stainless steel 6 8 8 Moisture testing shall be performed on one length o...

Страница 67: ...supply the following reports and certifications as follows 6 9 1 1 One set of reports shall be sent to SEMC QA prior to receipt of material at SEMC The components will be cross referenced to the recei...

Страница 68: ...Gasguard 250 VMB System Installation Manual Air Products and Chemicals Inc Page A 8...

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