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52

Chapter 3

Agilent 4072/4073 Preinstallation Guide, Edition 4

Wafer Probers and Connection with Testhead

Connecting with Testhead

Personality board

The personality board and probe card are used to interface between the measurement pins of the testhead and the
probe needles.

Agilent Technologies provides the Agilent E3145A/B personality board for the 4072A/B tester.

This personality board is designed so that all testhead measurement pins can contact the pads on this board.
The personality board must be fixed on the wafer prober. See Figure 3-9.

NOTE

Agilent Technologies recommends the use of the direct docking probe card when using the
4073A/B. The 4073A/B may not fully perform if a personality board or extension cable fixture is
used.

Figure 3-9

Contacts with personality board

personality
board

wafer prober
sense switch

testhead

measurement

pins

pin

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Содержание 4072A Advanced

Страница 1: ...A Preinstallation Guide Agilent 4072A B Advanced Parametric Tester Agilent 4073A B Ultra Advanced Parametric Tester Edition 4 Agilent Part Number 5989 5631EN March 2007 Agilent Technologies Inc 2003 2007 ...

Страница 2: ...ic warranty terms applicable to your Agilent Technologies product and replacement parts can be obtained from your local sales and service office Audience This manual is intended for customers who purchase the Agilent 4072A B or 4073A B Agilent customer engineers CE may also refer to this manual during site preparation consultation Printing History The printing date and publication number indicate ...

Страница 3: ...unding 24 Power line transients 24 Power consumption of 4072 4073 system instruments 24 Main power cable 26 Additional power outlets 27 Environmental Considerations 28 Temperature and humidity 28 Floor vibration 29 Air cleanliness 29 Air flow 29 Upgrade to 4072A 4073A 30 Upgrading from 4071A to 4072A 30 Upgrading from 4071A to 4073A 30 Upgrading from 4072A to 4073A 30 Upgrade to 4072B 4073B 31 Upg...

Страница 4: ...g for personality board 53 Extension cable fixture 54 Wiring for extension cable fixture 54 Pin board configuration 55 4 Receiving Package 59 Shipping Damage 60 Checking Contents 61 Unpacking System Cabinet 62 Unpacking Testhead 64 Unpacking Accessories 65 Moving Cabinet Testhead and Accessories 66 Moving testhead 68 Moving cabinet and accessories 70 A Confirming the System Power Safety Connecting...

Страница 5: ...5 Agilent 4072 4073 Preinstallation Guide Edition 4 1 General Information ...

Страница 6: ...ation briefly describes the Agilent 4072 4073 tester configuration explains several important preinstallation considerations and provides a brief start to finish system installation overview Chapter 2 Site Preparation describes system layout instructions explains power and environmental considerations and describes important safety precautions Chapter 3 Wafer Probers and Connection with Testhead o...

Страница 7: ...s an emergency off EMO unit Testhead To test devices on a wafer the testhead can be mounted on an automatic wafer prober or can be placed next to a manual wafer prober You can also test packaged devices by mounting them on a test fixture that attaches to the testhead System controller The 4072 4073 tester requires an HP workstation c8000 or HP Visualize C3750 to control the system instruments The ...

Страница 8: ... the installation of the test system may apply in your area It is the customer s responsibility to ensure that all local laws regulations and codes for buildings machinery and electrical distribution systems are complied with before the system arrives NOTE The customer should appoint a principal operator or system manager This person will be responsible for operating the 4072 4073 tester performin...

Страница 9: ...ring the requirement to connect testhead to wafer prober unpacking moving to installation location installation by Agilent CE END site preparation confirming plan for site verification checking the contents site verification deciding receive day and install day chapter 2 chapter 4 chapter 3 assigning system administrator delivery day installation 1 month before delivery customer customer or Agilen...

Страница 10: ...10 Chapter 1 Agilent 4072 4073 Preinstallation Guide Edition 4 General Information Installation Overview ...

Страница 11: ...11 Agilent 4072 4073 Preinstallation Guide Edition 4 2 Site Preparation ...

Страница 12: ...head Table 2 1 shows the cable lengths from the bottom of the system cabinet Provide at least 0 6 meter 24 in of clearance at the front and rear of the system cabinet to allow space for servicing Agilent Technologies recommends 1 meter 39 in of space for servicing Make sure there is adequate workspace around the system so that operating personnel can move freely without affecting system operation ...

Страница 13: ...f your air conditioning system is to assume 3500 BUT s 3 6 106 J for every 1000 watts hour Be sure to consider room size also Floor Requirements for the site floor are as follows Verify the load capacity of the floor at the installation site and all floors on the way to the site All floors must have a minimum load capacity of 21 kg cm2 300 lbs in2 Make sure that tile concrete or other industrial f...

Страница 14: ...are media in or near magnetic fields Telephone Install a telephone with an extra long receiver cord to allow the operator easy access to any part of the system while on the phone Network service If the system controller is to be connected with a network a network service and LAN cable are necessary Choose a long LAN cable that can connect with the system controller Also prepare the IP address and ...

Страница 15: ...vided in Figure 2 6 One square represents 20 cm by 20 cm approximately 0 43 ft2 Figure 2 4 and Figure 2 5 show examples of a 4072 4073 tester layout Figure 2 7 and Figure 2 8 show layout examples for Tokyo Electron P8 and Accretech A PM 90A wafer probers respectively Figure 2 9 and Figure 2 10 show layout examples for Tokyo Electron P12 and Accretech UF300 wafer probers respectively Figure 2 3 Sys...

Страница 16: ...allation Guide Edition 4 Site Preparation Installation Site Requirements Figure 2 4 Example of 4072 4073 tester layout 906 mm 513 mm 600 mm Te s th e a d 640 mm Wafer Prober Table Keyboard Table System Cabinet 19 Color Display Switch Board ...

Страница 17: ...Preparation Installation Site Requirements Figure 2 5 Testhead layout 642 mm 890 mm 1010 mm The hight is from floor to DUT testhead DUT 17 flat panel display Rear view switch board testhead table keyboard table 17 flat panel display system cabinet system cabinet 600 mm ...

Страница 18: ...18 Chapter 2 Agilent 4072 4073 Preinstallation Guide Edition 4 Site Preparation Installation Site Requirements Figure 2 6 Grid sheet ...

Страница 19: ...Chapter 2 19 Agilent 4072 4073 Preinstallation Guide Edition 4 Site Preparation Installation Site Requirements Figure 2 7 Layout example for Tokyo Electron P 8 ...

Страница 20: ...equirements Figure 2 8 Layout example for Accretech A PM 90A 2400 mm 4400 mm Grid 200 mm air duct test leads DVM TH PS cables testhead wafer prober ACCRETECH A PM 90A test leads PG 3600 mm 2400 mm Grid 200 mm TH PS cables test leads PG test leads DVM air duct testhead wafer prober ACCRETECH A PM 90A ...

Страница 21: ...Chapter 2 21 Agilent 4072 4073 Preinstallation Guide Edition 4 Site Preparation Installation Site Requirements Figure 2 9 Layout example for Tokyo Electron P 12 ...

Страница 22: ...ation Site Requirements Figure 2 10 Layout example for Accretech UF 300 TH PS cables air duct testhead ACCRETECH UF300 Grid 200 mm test leads PG 3600 mm test leads DVM test leads PG TH PS cables air duct testhead wafer prober ACCRETECH UF300 Grid 200 mm test leads DVM wafer prober 4400 mm ...

Страница 23: ... line voltage is too low or too high sporadic failures or complete system shutdown may occur For example if you install the 4072 4073 tester with a line voltage of 200 VAC and a line frequency of 60 Hz the electric power must satisfy the line voltage range of 180 to 220 VAC at least 20 A and a line frequency range of 48 to 63 Hz NOTE Agilent Technologies recommends that the following line voltage ...

Страница 24: ...provide a separate completely independent circuit with isolated ground and circuit breaker coming directly from the main power source of the building NOTE Agilent Technologies does not recommend installing printers or plotters close to the 4072 4073 tester When the electrical motors in these peripherals begin operating and their electric consumption increases noise from the print head or pen movem...

Страница 25: ... voltage AC 200 V AC 208 V AC 220 V AC 240 V System cabinet 1 0 A 1 0 A 0 9 A 0 9 A Testhead power supply with testhead 2 5 A 2 4 A 2 3 A 2 1 A E4980A or 4284A presicion LCR meter 0 8 A 0 8 A 0 7 A 0 7 A 3458A digital multimeter 0 4 A 0 4 A 0 4 A 0 4 A System controller HP workstation c8000 3 9 A 3 8 A 3 6 A 3 3 A System controller HP Visualize C3750 3 5 A 3 4 A 3 2 A 3 0 A DDS drive 0 6 A 0 6 A 0...

Страница 26: ...ety to connect the site power line to the 4072 73 tester and check it NOTE The torque specifications of the power cable connections at the PDU are 4 0 N m for 208 220 240 V and 2 5 N m for 200 V option Flat panel display 0 2 A 0 2 A 0 2 A 0 2 A Table 2 5 Specification for main power cable Connection type Power line option Cable type Power cable Number of lines Cable clamp Flexible AC 200 208 V SO ...

Страница 27: ...r equipment not included in the system install additional power outlets two power outlets 15 A at the site Show the locations of all additional power outlets on your site layout drawing and include their potential load in your calculation for total site power Additional power outlets must be supplied with grounding circuits intact and must be used when connecting additional equipment ...

Страница 28: ...ed for measuring low current and low voltage with the 4073A B Temperature change Within 1 C after the calibration Temperature change period 10 minutes Humidity 50 The 4072 4073 must be operated under the following conditions For the 4072A Operating temperature 5 C to 40 C 41 F to 104 F Storage temperature 20 C to 60 C 4 F to 140 F For the 4073A Operating temperature 5 C to 35 C 41 F to 95 F Storag...

Страница 29: ...ripherals should be located in an environment of similar air purity NOTE Agilent Technologies recommends that the following air cleanliness condition should be satisfied for measuring low current and low voltage with the 4073A B Air cleanliness class 10 000 Air flow To prevent the 4072 4073 tester from disturbing the air flow it is recommended that your clean room use a down flow mechanism The 407...

Страница 30: ...73A The Agilent E3197A upgrade kit is used to upgrade from the 4071A to the 4073A tester In particular the 4073A requires 200 or 208 Vac instead of 100 or 120 Vac If you are using the 4071A with 100 or 120 Vac you must prepare 200 208 220 or 240 Vac The E3197A upgrade kit consists of the cabinet HF matrix some accessories parts and pulse generators option The allowable number of 81110A and 8110A p...

Страница 31: ...of the cabinet HF matrix HSCMU some accessories parts and pulse generators option The allowable number of instrument are shown in Table 2 3 The 4072B 4073B requires 200 or 208 VAC instead of 100 or 120 VAC If you are using the 4071A with 100 or 120 VAC you must prepare the 200 208 220 or 240 VAC The following space is required for upgrading Testhead at least 2 2 m2 6 6 6 6 ft2 Cabinet at least 1 3...

Страница 32: ...or example Figure 2 13 b shows the dimensions for suitable metal fittings These metal fittings and screws are not furnished with the system Please prepare these parts The metal fittings are appropriate for the Uniform Building Code UBC Zone 4 The system cabinet s center of gravity is the center of the system cabinet as shown in Figure 2 14 The center of gravity may be changed when reconfiguring an...

Страница 33: ...trap the testhead to a table as shown in Figure 2 16 Use suitable belts to secure the testhead according to the shape of the table Figure 2 16 Securing testhead After an earthquake confirm the system operation as follows 1 Check the system visually for damage or disconnected parts 2 Turn on the system and confirm that the tester starts correctly 3 Execute the diagnostic program diag4070 and check ...

Страница 34: ...73 tester are manufactured from flame retardant materials that are self extinguishing and represent a minimal fire hazard Be sure however to observe normal fire precautions within the operating area Chemicals Normally cleaning solvents or compounds used for repair are the only chemicals at a system site that require careful handling Provide adequate ventilation to prevent accumulation of fumes if ...

Страница 35: ...ure the EMO system with a 4072 4073 tester you must understand the EMO unit before connecting it to other systems Included are Circuit diagram and its operation for the EMO switch and power distribution unit I O interface external in out terminals specifications for the PDU Example design for an external emergency lamp The 4072 4073 tester with a system cabinet has an emergency off EMO switch at t...

Страница 36: ...als are closed using a conductor installed at the factory Figure 2 18 Block diagram of emergency off circuit 200 V option relay1 instrument power outlets 200 V EMO protector neutral main contactor ext alarm 1 NC ext cntrl ext alarm 2 NO cabinet fan 3ea 5 V testhead fan relay5 fan protector relay3 relay2 system switch relay6 EMO panel EMO SW LINE OFF SW ON SW INSTRUMENT POWER white green emergency ...

Страница 37: ...protector power outlet protector DVM and CMU power outlets 220 V controller power outlets 220 V M TH PS relay4 trans ac 24 V EMO detect OVT detect 10 A 10 A 2 A x 2ea 3 A start MASK 20 sec fan speed sensor fan speed sensor includes main breaker relay1 instrument power outlets 220 240 V EMO protector neutral main contactor ext alarm 1 NC ext cntrl ext alarm 2 NO cabinet fan 3ea 5 V testhead fan rel...

Страница 38: ...o open This stops power to both the system instruments and system controller At the same time the current through the coil of Relay2 flows so one contact opens and the other contact closes in Relay2 The Ext alarm 1 which is normally in the closed state is opened and the Ext alarm 2 which is normally in the open state is closed Opening the Ext control terminal is the same as pressing the EMO switch...

Страница 39: ...mum current 3 A at 250 VAC 2 A at 30 VDC Example design of external emergency lamp The procedure below describes how to implement an external lamp using the External alarm terminals on the PDU that turns on when the EMO switch is pressed Refer to Figure 2 21 and connect the Ext alarm 2 terminals normally open to an emergency lamp as follows 1 Connect the NEUTRAL or LINE side of the power line outl...

Страница 40: ...k port network cable IP address and host name Did you provide a lock for locking the main switch Electrical power Did you confirm that voltage frequency and noise meet requirements If not have you initiated their preparation Did you provide a main power cable from the switchboard to the main power supply Did you prepare a power line for maintenance service Environmental considerations Did you chec...

Страница 41: ...site You do not change clothes and shoes Items near the installation site are covered with dust Did you provide proper air flow Upgrade Did you prepare the proper power supply Did you provide the required floor to upgrade Safety precautions Did you prepare suitable metal fittings to attach the system cabinet Did you keep general cleanliness of the work area and system equipment for preventing elec...

Страница 42: ...42 Chapter 2 Agilent 4072 4073 Preinstallation Guide Edition 4 Site Preparation Site Preparation Checklist ...

Страница 43: ...43 Agilent 4072 4073 Preinstallation Guide Edition 4 3 Wafer Probers and Connection with Testhead ...

Страница 44: ...ober with the testhead mounted using a manipulator Mounting mechanism Figure 3 1 Mounting mechanism For a manipulator type mounting mechanism the testhead is attached to the arm of the manipulator You just push the testhead down on the wafer prober and then fit it to the interface using the clamping mechanism For a hinge type mounting mechanism the testhead is fixed to a hinge arm You just rotate ...

Страница 45: ...e bottom panel of the testhead to ensure that the testhead sets on the wafer prober properly The testhead mounting hardware must be designed so that a part of the mounting hardware such as a pin pushes the wafer prober sense switch when the testhead is set on the wafer prober See Figure 3 9 See Figure 3 3 or Figure 3 5 for the location of the wafer prober sense switch The wafer prober sense switch...

Страница 46: ...mm is necessary so the cables and air tube can be bent naturally Center of Gravity with 24 pin boards and 4 MPSMUs Handle removable Air Hole Area Air Tube The bolts must not be screwed more than 12mm into the testhead These feet are removable but do not use the holes for another purpose Air Hole Area Extended Adapter Area Center of Gravity with 24 pin boards and 4 MPSMUs Personality Board or Probe...

Страница 47: ... Edition 4 Wafer Probers and Connection with Testhead Wafer Probers Figure 3 4 4072A 4073A Testhead dimensions 2 of 2 RIGHT BACK The bolts must not be screwed more than 16mm into the testhead The bolts must not be screwed more than 8mm into the testhead ...

Страница 48: ...48 Chapter 3 Agilent 4072 4073 Preinstallation Guide Edition 4 Wafer Probers and Connection with Testhead Wafer Probers Figure 3 5 4072B 4073B Testhead dimensions 1 of 2 ...

Страница 49: ...Chapter 3 49 Agilent 4072 4073 Preinstallation Guide Edition 4 Wafer Probers and Connection with Testhead Wafer Probers Figure 3 6 4072B 4073B Testhead dimensions 2 of 2 RIGHT BACK ...

Страница 50: ... testhead beside manual wafer prober Most manual wafer probers do not have a mechanism for mounting a testhead because the manual wafer prober is small The testhead must then be placed beside the manual wafer prober Figure 3 7 Testhead beside manual wafer prober signal cables extension cable fixture testhead manual wafer prober ...

Страница 51: ...he Testhead beside a Manual Wafer Prober Placing the testhead beside the wafer prober An Extension cable fixture connector plate and so on are used to interface between the measurement pins of the testhead and probe needles Probe card for direct docking To improve low leakage performance you can use a probe card designed for direct docking Direct docking means that the measurement pins of the test...

Страница 52: ...ersonality board for the 4072A B tester This personality board is designed so that all testhead measurement pins can contact the pads on this board The personality board must be fixed on the wafer prober See Figure 3 9 NOTE Agilent Technologies recommends the use of the direct docking probe card when using the 4073A B The 4073A B may not fully perform if a personality board or extension cable fixt...

Страница 53: ...ill have pin boards installed at the factory The pin board locations should not be reconfigured The slot numbers in the table correspond to pin numbers on the personality board that should be used to connect to the probe card Figure 3 10 Wiring for personality board To assist you in interfacing the testhead with a wafer prober Figure 3 11 shows the Agilent E3145A B personality board dimensions The...

Страница 54: ... pads of this fixture and can be wired to the connector plate or to the probing needles easily For details see theE3146A Operation Guide Wiring for extension cable fixture The customer is responsible for the wiring between the extension cable fixture and the probe needles The prober manufacturer or its representative can help you wire the connector plate or probing needles See the pin board config...

Страница 55: ...the 4072 4073 tester diagnostic program diag4070 is executed at least 12 pin boards must be installed in designated slots in the testhead The designated slots are shown in the pin board configuration table The pin board installation is also designed to allow for balancing weight and capacitance in the testhead If the pin boards are not installed as recommended stray capacitance between any two pin...

Страница 56: ...ent order Slot no Pin board installment order Slot no Pin board installment order Slot no Pin board installment order 1 13 13 25 25 Empty 37 19 2 1 14 4 26 7 38 10 3 14 15 26 27 Empty 39 20 4 A I 16 A I 28 A I 40 A I 5 15 17 27 29 Empty 41 21 6 2 18 5 30 8 42 11 7 16 19 28 31 Empty 43 22 8 A I 20 A I 32 A I 44 A I 9 17 21 Empty 33 Empty 45 23 10 3 22 6 34 9 46 12 11 18 23 Empty 35 Empty 47 24 12 A...

Страница 57: ...57 Agilent 4072 4073 Preinstallation Guide Edition 4 4 Receiving ...

Страница 58: ...tester Figure 4 1 Overall receiving flow START Checking shipping damage Cheking contents Unpacking System Cabinet Unpacking Testhead Moving the system cabinet and accessories END Moving Testhead Unpacking Accessories Receving Carrying in Adapting to the ambient temperature and humidity prevenging from condensation Shipping damage Checking the contents Unpacking the system cabinet Unpacking the Tes...

Страница 59: ... these packages will be delivered at the same time The biggest package is for the system cabinet and testhead Table 4 1 describes the size and weight of each packages See this table when deciding how to ship Figure 4 2 4072 4073 packages Table 4 1 Package size and weight No Contents Size cm Weight Kg 1 Cabinet 117 78 183 300 0 2 Testhead 90 84 80 94 0 3 Software and manuals 62 58 49 19 3 4 Softwar...

Страница 60: ...or any signs of damage that might have occurred during shipment Some typical signs of damage are dents scratches cuts or water marks If you suspect damage note on the bill of lading that there is Apparent damage subject to inspection and arrange for both the carrier s representative and a local Agilent customer engineer CE to be present when that item is unpacked ...

Страница 61: ...de Edition 4 Receiving Checking Contents Checking Contents First unpack the box labeled Open Me First take out the contents list and check the delivered items against it If something is missing or damaged contact your local Agilent sales representative ...

Страница 62: ...unpack the system cabinet The system cabinet is stored in the carton and is removed from the carton and put down on the floor using the following procedure CAUTION At least two persons are required to slide the cabinet down to the floor 1 Cut the nylon straps securing the box 2 Remove the top cover 3 Remove the adhesive tape on the corner to remove the side cover 4 Remove the other side cover 5 Re...

Страница 63: ...slope 8 Place the slope so the bottom part comes on the slit so that it will not move 9 Loosen the two nuts and remove the fixing wooden bar from the base 10 Loosen the nuts on both side on the base and remove the fixing bars to release the cabinet 11 Unfold the slope 12 Slide the cabinet down on the slope Slit ...

Страница 64: ...he testhead 1 Cut the nylon straps securing the box remove the tape and open the top of the carton 2 Remove the top cover 3 Remove the carton on the testhead 4 The testhead is wrapped in a vinyl cover Do not remove the vinyl cover while the testhead is outside of the clean room 5 Take the testhead to the clean room CAUTION The testhead must adapt to the atmospheric temperature before removing the ...

Страница 65: ...es observe the following precautions The accessories are sensitive to airborne contaminants Do not remove their protective covers outside of the clean room One box contains paper documents and manuals Do not take the paper items into the clean room NOTE Do not remove the protective vinyl covers outside of the clean room When the system is shipped from the factory items that are used in the clean r...

Страница 66: ... has sat at the entrance of the clean room for more than eight hours measure the atmospheric temperature at the entrance then wait for the corresponding time shown in Table 4 2 If the testhead has sat at the entrance of the clean room for less than eight hours measure the atmospheric temperature of the location the testhead sat at prior to being moved to the entrance then wait for the correspondin...

Страница 67: ...Atmospheric temperature at entrance Waiting time under 70 humidity in buffer room Waiting time under 50 humidity in buffer room 20 C to 0 C 10 hours 6 hours 0 C to 10 C 8 hours 4 hours 10 C to 20 C 5 hours 1 hour Greater than 20 C 1 hour 0 hour Remove all vinyl cover Buffer Room sticky sheet Clean Room Air Shower Room sticky sheet You must confirm the temperature and the waiting time Remove the ca...

Страница 68: ...to move the testhead 1 Move the Testhead to the outside entrance of the clean room 2 Remove the outer vinyl covers CAUTION Do not cut the deaeration packaging s vinyl cover 3 Move the 4072 4073 into the buffer room 4 After waiting the amount of time shown in Table 4 2 cut the deaeration packaging s vinyl cover 5 Remove the deaeration packaging s vinyl cover ...

Страница 69: ...de Edition 4 Receiving Moving Cabinet Testhead and Accessories 6 Remove the inner vinyl covers 7 Remove the protective vinyl 8 Remove the protective vinyl 9 Do not remove the tape holding the air duct This tape indicates the final installation location ...

Страница 70: ...by pushing or pulling can cause the system to tip over resulting in serious injury to personnel and damage to the equipment NOTE When moving the system fix the mounting support under the cabinet to the uppermost position The collision in moving cause the system to damage 2 Remove the outer protective vinyl cover 3 Move the items into the buffer room 4 Remove the inner vinyl cover 5 Move the items ...

Страница 71: ...71 Agilent 4072 4073 Preinstallation Guide Edition 4 A Confirming the System Power Safety ...

Страница 72: ... Power Safety If you need to perform an ELECTRICAL SAFETY LEVEL CHECKS before the installation do as follows to connect the site power line to the 4072 4073 tester and check it 1 Connecting Site Power Line 2 Component Location for PDU and Checking EMO 3 Confirming PDU and EMO Operation ...

Страница 73: ... damage to the equipment NOTE See Main power cable for main power cable specification When to connect the power cable to the power distribution unit PDU ensure that it is connected to the 30 A service Use the following procedure to connect the power distribution unit PDU to the site power line source 1 Set the switchboard breaker to OFF 2 Open the system cabinet rear door with the key provided 3 S...

Страница 74: ...le through the cable clamp opening 7 Connect the ground wire to the ground terminal 8 Connect line and neutral or line wires to the terminal of the disconnect device Use pozidrive screwdriver for 208 220 240 V or hex L screwdriver for 200 V to fasten the terminal screws The torque specifications of the power cable connections at the PDU are 4 0 N m for 208 220 240 V and 2 5 N m for 200 V option di...

Страница 75: ...cting Site Power Line 9 For flexible cable fasten the cable clamp securely 10 Reinstall the disconnect device cover removed in step 5 11 Reinstall the PDU side cover removed in step 4 12 Connect the main power cable to switchboard of the installation site cable clamp disconnect device cover PDU side cover ...

Страница 76: ...the location of the components shown in this procedure see Figure 4 4 through Figure 4 8 Figure 4 4 System cabinet component locations rear view Figure 4 5 System cabinet component location front view instrument power outlets controller power outlets power distribution unit PDU DVM and CMU power outlets 200 208 V option only EMO switch LINE indicator INSTRUMENT POWER ON INSTRUMENT POWER OFF ...

Страница 77: ...ons of circuit protector EMO and fan protectors Figure 4 8 Positions of GFCI indicator LINE System Sw Fan Protector Emargency Breaker EMO Protector Cabinet Fan Testhead Fan Error Error Emargency Interface Over Voltage LEDs disconnect device door lock release screw yellow main breaker on position breaker test switch GFCI in position white gray main breaker middle position GFCI out position white ...

Страница 78: ...d testhead fan protectors are exchanged by pressing the protector button 3 For the PDU s 200 V option check the ground fault circuit interrupter GFCI as follows a Turn the handle of the disconnect device to set the on position When stopping the handle turning rotate the door lock release screw counterclockwise then set the disconnect device to on b Confirm that the white push button labeled LEAKAG...

Страница 79: ...nfirm that no voltage is being applied to the instrument power outlets i Confirm that no voltage is being applied to the DVM and CMU power outlets 5 Check the INSTRUMENT POWER ON OFF switches instrument power outlets DVM and CMU power outlets and power outlet protector as follows a Press the INSTRUMENT POWER ON switch on the EMO panel b Confirm that the green LED in the INSTRUMENT POWER ON switch ...

Страница 80: ...cted between the ext control terminals c Confirm that you cannot set the emergency breaker to the on position d Reinstall the shorting bar on the ext control terminals e Set the emergency breaker to the on position and confirm that the LINE indicator turns on f Press the system switch and confirm that the green LED in the system switch turns on NOTE Do steps e through f within 20 seconds After 20 ...

Страница 81: ...rgency breaker to the off position and wait at least 3 seconds then set it to the on position Confirm that the LINE indicator turns on e Press the system switch and confirm that the green LED in the system switch turns on NOTE Do steps d through e within 20 seconds After 20 seconds the cabinet fan error LED turns on To recover this set the emergency breaker to the off position and repeat steps d t...

Страница 82: ...82 Appendix A Agilent 4072 4073 Preinstallation Guide Edition 4 Confirming the System Power Safety Confirming PDU and EMO Operation ...

Страница 83: ......

Страница 84: ...sA Agilent Publication No 5989 5631EN Agilent Technologies Inc 2003 2007 Printed in Japan 03 07 E0307 P5989 5631EN 5989 5631EN ...

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