Advanced Energy VarioMatch Match Network VM 1000 Platform, Руководство пользователя

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AE VarioMatch
TM
Match Network, VM 1000/1500 P l atform
Figure 7-49. 4 MHz; Tune coil, 25 turns: tap 4; Load co il , 4 turns: tap B .......... 7-50
Figure 7-50. 4 MHz; Tune coil, 25 turns: tap 5; Load coil , 4 turns: tap B .......... 7-51
Figure 7-51. 4 MHz ; Tune coil, 25 turns: tap 6; Load coil , 4 turns: tap B .......... 7-52
Figure 7-52. 4 MHz ; Tune coil, 25 turns: tap 1; Load coil
, 4 turns: tap C .......... 7-53
Figure 7-53. 4 MHz; Tune coil, 25 turns: tap 2; Load coil
, 4 turns: tap C .......... 7-54
Figure 7-54. 4 MHz; Tune coil, 25 turns: tap 3; Load co il , 4 turns: tap C .......... 7-55
Figure 7-55. 4 MHz; Tune coil, 25 turns: tap 4; Load coil
, 4 turns: tap C .......... 7-56
Figure 7-56. 4 MHz; Tune coil, 25 turns: tap 5; Load co il , 4 turns: tap C .......... 7-57
Figure 7-57. 4 MHz; Tune coil, 25 turns: tap 6; Load co il , 4 turns: tap C .......... 7-58
Figure 7-58. 4 MHz; Tune coil, 25 turns: tap 1; Load co il , 4 turns: tap D .......... 7-59
Figure 7-59. 4 MHz; Tune coil, 25 turns: tap 2; Load co il , 4 turns: tap D .......... 7-60
Figure 7-60. 4 MHz; Tune coil, 25 turns: tap 3; Load co il , 4 turns: tap D .......... 7-61
Figure 7-61. 4 MHz; Tune coil, 25 turns: tap 4; Load co il , 4 turns: tap D .......... 7-62
Figure 7-62. 4 MHz; Tune coil, 25 turns: tap 5; Load co il , 4 turns: tap D .......... 7-63
Figure 7-63. 4 MHz; Tune coil, 25 turns: tap 6; Load co il , 4 turns: tap D .......... 7-64
Figure 7-64. 4 MHz; Tune coil, 25 turns: tap 1; Load co il , 4 turns: tap
E
.......... 7-65
Figure 7-65. 4 MHz; Tune coil, 25 turns: tap 2; Load co il , 4 turns: tap
E
.......... 7-66
Figure 7-66. 4 MHz; Tune coil, 25 turns: tap 3; Load co il , 4 turns: tap E .......... 7-67
Figure 7-67. 4 MHz; Tune coil, 25 turns: tap 4; Load co il , 4 turns: tap E .......... 7-68
Figure 7-68. 4 MHz; Tune coil, 25 turns: tap 5; Load co il , 4 turns: tap
E
.......... 7-69
Figure 7-69. 4 MHz; Tune coil, 25 turns: tap 6; Load co il , 4 turns: tap
E
.......... 7-70
Figure 7-70. ICP coil and inductor schematic, Gamma ........................ 7-71
Figure 7-71. ICP coil and inductor schematic, L match ........................ 7-71
Figure 7-72. VM 1500, Gamma .......................................... 7-72
Figure 7-73. VM 1500, L match .......................................... 7-73
Figure 7-74. VM 4015, Gamma .......................................... 7-74
Figure 7-75. Delta match coil and inductor schematic ........................ 7-75
Figure 7-76. Tune co il , 2.5 turns ......................................... 7-76
Figure 7-77. VM 700 coil and inductor schematic ............................ 7-77
Figure 7-78. Tune coil, 1 0 turns : tap 1; Load coil, 3 turns: tap A ................ 7-78
Figure 7-79. Tune coil, 10 turns : tap 2; Load coil, 3 turns: tap A ................ 7-79
Figure 7-80. Tune coil, 1 0 turns : tap 3; Load coil, 3 turns: tap A ................ 7-80
Figure 7-81. Tune coil, 1 0 turns : tap 4; Load coil, 3 turns: tap A ................ 7-81
Figure 7-82. Tune coil, 1 0 turns : tap 5; Load coil, 3 turns: tap A ................ 7-82
Figure 7-83. Tune coil, 1 0 turns : tap 6; Load coil, 3 turns: tap A ................ 7-83
Figure 7-84. Tune coil, 1 0 turns : tap 7; Load coil, 3 turns: tap A ................ 7-84
Figure 7-85. Tune coil, 1 0 turns : tap 8; Load coil, 3 turns: tap A ................ 7-85
Figure 7-86. Tune coil, 1 0 turns : tap 9; Load coil, 3 turns: tap A ................ 7-86
Figure 7-87. Tune co il , 1 0 turns: tap 1 O; Load coil, 3 turns: tap A ............... 7-87
57020080-00D
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