Advanced Energy VarioMatch Match Network VM 1000 Platform, Руководство пользователя

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Advanced Energy ®
Interaction With a Cesar Generator
You can control the V arioMatch match network in either manual mode or automatic
mode using a Cesar generator. When the V arioMatch matc h network is connected to a
Cesar generator via the
MATCHING
interface, you can control the VarioMatch
match network using either of the following two methods:
• Front Panel Display
The front panel display on the CESAR generator will show the position of the
capacitors, the mode (automatic or manual), the measured DC bias, and whether
the match network is active or not. It also allows you to change the mode
(automatic or manual) via buttons and to move the capacitors manually. The
information of the match network is shown on the Cesar front panel as soon as
the Cesar generator de t ects a connection to the match INTERFACE.
• Host Port
You can use the Cesar generator Host Port to control the V arioMatch match
network.
See the Cesar generator user manual for additional information.
Importance of Igniting Plasma
A matching optimization can be done only when the load is consuming energy,
meaning that there exists a resistive part to which all the energy is transferred. Pure l y
reactive components do not dissipate any energy.
When the load is p l asma , this means you need to ignite the plasma. After the plasma
ignites, it is then possib l e to optimize the components in the match network for the
best tuning.
If, while experimenting with the match, the plasma does not ignite, the match
components cannot be optimized because there is no l oad in which to dissipate the RF
energy.
SET UP THE MATCH FOR YOUR LOAD
5-16
See Chapter 7, "V arioMatch Match Network Tuning Ranges" to check the tune range
for your V arioMatch match network.
Ins t a ll at i on , Setup, and Opera t i on
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