Advanced Energy VarioMatch Match Network VM 1000 Platform, Руководство пользователя

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Advanced Energy ®
G
Gamma topo l ogy 2-6
general descr i pt i on 2-1
ground 4-2, 5-5
gu i de l i n es
safety 1-2
SEMI 1-5
i cons
i n user man u a l 1-1
on unit 1-2
i ndustry guide l i nes , compl i a n ce w i t h 1-5
i nput con n ector , see RF i nput connector
!
nput i m_pedance to generator 3-11, 3-12, 3-14
installation
how to 5-4
requ i rements 5-1
safety g u i de l i nes 1-2
too l s req u i red 5-2
INTERFACE
1 5-p i n match 4-1
automatic mode 4-1
cabling req u i rements 4-2
connect i ng 5-7
connector 3-7, 4-1
ground i ng 4-2
i n teracting w i th CESAR generator 5-15
p i n descr i pt i o n s 4-2
using switches 4-7
i nter l ock 1-6
see also
l im i ts
L
L match network 2-5
l abe l s on un i t 1-2
l imits 1-6
l oad
coi l and capacitor i n L match network 2-5
co i l spec i fications 3-1 O
co i l , theory 2-5
def i nitio n 2-1
i gn i ting plasma 5-16
l oad capac i tor 2-4
l oad coi l 2-4
load coi
l tap sett i ngs 5-22
set up the match 5-16
l oad checks
troub l eshoot i ng 6-3
M
MAINS
see also AC i n put
connector 3-8, 5-12
manua l tuning mode 5-15
mark i ng , CE 1-3
max i mum l oad DC se l fb i as vo l tage 3-11, 3-12,
3-13, 3-14
max i mum react i ve power 3-11, 3-12, 3-14
max i mum RF l oad current 3-11, 3-12, 3-14
max i mum RF l oad vo l tage 3-11, 3-12, 3-14
max i mum transfer power 3-11, 3-12, 3-13
modes , see tun i ng modes
mounting 3-7, 5-5, 5-6
N
normal operat i on 5-14
0
operation
automat i c tun i ng mode 2-2, 5-14
first time 5-12
manua l tun i ng mode 2-2, 5-15
normal operation 5-14
safety g u idel i nes 1-2
theory of operation 2-3
overvo l tage category specif i cations 3-17
p
p h ysica l specifications 3-1, 3-7
p i n descr i pt i o n s
AC input connector 5-12
match INTERFACE 4-2
p l asma,
see
load
PLASMA/LOAD
connector 3-8, 5-2, 5-9
connector and strap 5-2
pollution degree specifications 3-17
product
cert i f i cation 1-3
comp l iance 1-3
R
returns
aut h or i zed 6-5
RF i nput connector
connect i ng from generator 5-8
from generator 5-8
p i n descriptions 5-9
spec i ficat i ons 3-7
ii Index
57020080-00D