Advanced Energy VarioMatch Match Network VM 1000 Platform, Руководство пользователя

Страница: 75 / 194

AE VarioMatch
TM
Match Network, VM 1000/1500 P l atform
For specific recommendations, contact Global Services for a technical bulletin for
your model.
To Change the Tap Settings on the Tune Coil:
1. Turn off RF from the generator.
2. Disconnect AC MAINS.
3. Disconnect RF in (from the
RF-GENERATOR).
4. Disconnect RF o u t (to PLASMA/LOAD).
5. Remove the top cover, being careful to not damage the p l ug l eading to the fan:
a. Remove the l arge top cover (with the fan) from the V ario M a t ch match ne t work
by unscrewing the twe l ve screws on the cover. Leave the small top and side
covers in place.
b. Disconnect the pl ug leading from top lid to the fan.
6. Using a 7 mm wrench, unscrew the tap from its current position.
Tabs are silver soldered to the coil. The metal interconnect ribbon is attached to
the tab of the selected turn using a threaded bar and two bo l ts.
7. Move the tap setting to t he desired turn on the coil (for examp l es, see Figure 5-9
through Figure 5 - 11 ). It is possible that you will also need to move the other end
of the ribbon to a new position so the ribbon will reach the chosen tap.
57020080-00D
I nstallation , Setup, and Ope r at i on
5-19