Advanced Energy VarioMatch Match Network VM 1000 Platform, Руководство пользователя

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Advanced Energy ®
5-6
A good ground connection is essential to achieve the best possible RF connection
between the match network and the ground of the load. The V ario M atc h match
network chassis must be intimately grounded to the p l asma chamber
The ground l ead must provide a low impedance RF path. ff a proper RF ground is not
achieved, the RF current flowing through the ground leads will cause ground
bouncing. The RF current flowing through a poor ground connection will result into a
voltage across that ground lead. In this situation, the load and the match ne t work will
have a different voltage potential and the ground can no longer be regarded as a good
and common ground, which can result in the following:
• RF radiation
• Malfunction of match controllers or other devices
• Electrical shock from the V arioMatch match network cabinet
To Properly Ground the VarioMatch Match Network:
Mount the unit as described in "Mounting the VarioMatch Match Network" on
page 5-6 . RF grounding is achieved via mounting the unit to the mounting plate.
Note:
Use the GROUND connectors on the rear of the unit only if you cannot mount
the VarioMatch match network as described.
MOUNTING THE VARIOMATCH MATCH NETWORK
Note:
VM 69000082: see your company's internal documenta t ion for mounting
instructions.
Use these instructions for mounting the V arioMatch match network to a mounting
p l ate attached to the load. The mounting p l ate acts as ground for the V arioMatch
match network.
There is no need to open the VarioMatch match network cover. You can secure the
unit to the mounting plate using t he four M6 mounting threads on the bottom panel.
For the location of the screw holes, see "Unit Dimensions" on page 3 - 1 .
I nstallat i on , Setup, and Operat i on
57020080-00D