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Advanced Energy

1. Are you currently setting up a new chamber system?

2. Has any work been done recently on the chamber?

3. Have there been any changes in your process recently?

If you answered yes to any one of the previous questions, the unit is probably working

properly and it may be reacting to an external load condition. You may want to consult

your process engineer or system manufacturer to troubleshoot chamber related issues.

CONTACTING AE GLOBAL SERVICES

Please contact AE Global Services if you have questions or problems that cannot be

resolved by working through the provided troubleshooting procedures.

When you call Globa

Services, make sure to have the unit seria

number and part

number. These numbers are available on unit labels.

Advanced Energy World Headquarters, 24 x 7 Technical

Support

6-4

Table 6-1.

AE Global Services contact information

Office

AE, World Headquarters

1625 Sharp Point Drive

Fort Collins, CO 80525 USA

Contact

Phone (24 hrs/day, 7 days/week):

800.446.9167 or

+ 1.970

221.0

Fax (M-F, 7:00 am

5:30 pm MST):

+ 1.970.407.5981

Email: [email protected]

We will respond to email by the next

business day.

For Aera flow product support, call

800.MFC.AERA (800.632.2372)

For Sekidenko thermal product support,

contac

therma

app

ications

aei.com

If you would prefer to contact a local or regional sales or service office, visit the

Advanced Energy web site for current contact information:

• http://www.advanced-energy.com and click on

Sales

Support

eshoot

ng and Global Services

57020080-00D

Содержание VarioMatch Match Network VM 1000 Platform

Страница 1: ...RENO EXHIBIT 2006 Advanced Energy v Reno IPR2021 01397 AE VarioMatchTM Match Network VM 1000 1500 Platform User Manual October 2009 57020080 00D CADVANCED Ll ENERGY...

Страница 2: ......

Страница 3: ...User Manual AE VarioMatchTM Match Network VM 1000 1500 Platform 57020080 00D 1 C ADVANCED l ENERGY...

Страница 4: ...es of whatever kind as a result of the reliance on or use of the information contained herein PRODUCT USAGE STATEMENT iv WARNING Read this entire manual and all other publications pertaining to the wo...

Страница 5: ...ht license from Analog Instruments Company New Providence New Jersey 07974 VarioMatch is a trademark of Advanced Energy Industries Inc Windows NT is a registered trademark of the Microsoft Corporation...

Страница 6: ...Advanced Energy vi 57020080 00D...

Страница 7: ...fety Directives and Standards 1 4 Industry Guidelines 1 5 Conditions of Use 1 5 Interlocks and Limits 1 6 Chapter 2 Product Overview and Theory Product Description 2 1 Operating Modes 2 2 Theory of Op...

Страница 8: ...unting the VarioMatch Match Network 5 6 Connecting the Match INTERFACE Optional 5 7 Connecting the Cooling Water 5 7 Connecting RF Input From a Generator 5 8 Connecting to the Load 5 9 Connecting the...

Страница 9: ...ernal Load Checks Open Short RF Output Path 6 3 Contacting AE Global Services 6 4 Advanced Energy World Headquarters 24 x 7 Technical Support 6 4 Returning Units for Repair 6 5 Chapter 7 VarioMatch Ma...

Страница 10: ...Advanced Energy X Table of Contents 57020080 00D...

Страница 11: ...Environmental specifications 3 17 Table 4 1 VarioMatch match INTERFACE connector pin description 4 2 Table 4 2 Match INTERFACE switch descriptions 4 7 Table 5 1 RF input connector pin descriptions 5...

Страница 12: ...Advanced Energy xii List of Tables 57020080 00D...

Страница 13: ...3 N type connector 5 9 Figure 5 4 7 16 DIN female connector 5 1O Figure 5 5 MC6 connector 5 1O Figure 5 6 MC6 plug 5 10 Figure 5 7 6 mm brass tube fitting 5 11 Figure 5 8 Input Mains connector 5 12 F...

Страница 14: ...tap 2 7 23 Figure 7 23 27 MHz Tune coil 6 turns tap 3 7 24 Figure 7 24 27 MHz Tune coil 6 turns tap 4 7 25 Figure 7 25 27 MHz Tune coil 6 turns tap 5 7 26 Figure 7 26 27 MHz Tune coil 6 turns tap 6 7...

Страница 15: ...7 65 Figure 7 65 4 MHz Tune coil 25 turns tap 2 Load coil 4 turns tap E 7 66 Figure 7 66 4 MHz Tune coil 25 turns tap 3 Load coil 4 turns tap E 7 67 Figure 7 67 4 MHz Tune coil 25 turns tap 4 Load co...

Страница 16: ...Advanced Energy 1 xvi 57020080 00D...

Страница 17: ...TION BOXES IN THE MANUAL 1027 This symbol represents important notes concerning potential harm to people this unit or associated equipment Advanced Energy includes this symbol in Danger Warning and Ca...

Страница 18: ...rules Do not attempt to install or operate this equipment without proper training Ensure that this unit is properly grounded see also Grounding the Unit on page 5 5 Ensure that all cables are properly...

Страница 19: ...required to be in compliance with the standards and directives Product Certification Certain options of this product may be certified by CE Marking Self declaration assessed by AE Corporate Compliance...

Страница 20: ...fety and EMC requirements are not violated ELECTROMAGNETIC COMPATIBILITY EMC DIRECTIVES AND STANDARDS 89 336 EEC EC Council directive on the approximation of the laws of the Member States relating to...

Страница 21: ...is device in an overvoltage category II installation only Install and operate this device only with an RF generator which is installed in an overvoltage category II or better environment Install and o...

Страница 22: ...roducts are notintended to meet or satisfy safety requirements Where interlocks exist you must still meet and satisfy safety requirements The presence of interlocks does notimply operator protection T...

Страница 23: ...ion Some VarioMatch match networks ICP options have been optimized for inductive loads Employing vacuum variable capacitors for tuning ensures greater resistance to high voltage breakdown which often...

Страница 24: ...ted in conjunction with an AE RF generator manual controls for the network are incorporated in the generator itself An additional controller is necessary only if manual operation without an AE RF gene...

Страница 25: ...h network converts 100VAC to 240 VAC single phase to the DC voltages used in the match The 45 W SMPS switched mode power supply supplies 15 VDC and 5 VDC The cooling fan is powered from the 15 V suppl...

Страница 26: ...ontrol board The DC bias board provides the voltage divider whereas the motor driver board buffers and rectifies the DC bias voltage so that theDC bias voltage at the interface port is always positive...

Страница 27: ...atch network is modified by the installation of a variable capacitor connected in series with a fixed or tapped coil Figure 2 1 shows a typical VarioMatch L match network circuit 50Ohms RF Generator L...

Страница 28: ...ity of larger than 900 pF is required The VarioMatch match network uses a load coil to extend the capacitance range of the load capacitor without the negative side effects described above For more inf...

Страница 29: ...topology the tune series capacitor comes first from the generator s point of view while in configuration B L match topology the load shunt capacitor comes first Figure 2 4 Gamma topology Figure 2 5 L...

Страница 30: ...Advanced Energy 2 8 Product Overview and T heory 57020080 00D...

Страница 31: ...ure 3 1 through Figure 3 4 illustrate the physical dimensions The PLASMA LOAD connector can be located on either the rear panel or the bottom panel depending on your model __ _ _ _ _ _ 168 9 m m 6 65...

Страница 32: ...Advanced Energy 250 96mm 9 88 21 mm 0 83 b 31 m _ m _ 5 16 Figure 3 2 VM 1000 1500platform leftside panel 3 2 Specifications 3266 57020080 00D...

Страница 33: ...AE VarioMatchTM Match Network VM 1000 1500 Platform 22 50 mm 0 87 1 192 50 m 7 58 GROUND 217 50 mm 8 56 i Figure 3 3 VM 1000 1500platform rearpanel 57020080 00D Specifications 32 00 mm 1 26 3269 3 3...

Страница 34: ...00 mm 9 06 14 00 mm 0 55 Holes for mountingtheunit and for ground connection ________182 00 mm_______ t 7 17 62 00 mm 2 44 Figure 3 4 VM 1000 1500platform bottompanel 3 4 Specifications 14 00 mm 0 55...

Страница 35: ...k VM 1000 1500 Platform 3275 Figure 3 5 VM 1000 1500platform toppanel Spacing Requirements The following sections describethespaceneededtoprovideroomforconnections and to meet cooling requirements 570...

Страница 36: ...nnector when using an angled connector For units with the PLASMA LOAD connection on the rear panel 200 mm 7 9 required for 7 16 connector when using a straight connector 80 mm 3 1 required for 7 16 co...

Страница 37: ...page 5 4 Size 375 mm x 245 mm x 150 mm 14 75 X 5 9 X 9 65 Note Additional space required for air flow and connections See Spacing Requirements on page 3 5 See alsoFigure 3 1 through Figure 3 4 Weight...

Страница 38: ...80 69000114 690001 16 69000226 69000227 69000228 69000229 69000230 69001214 7 16 DIN socket PN 69000001 M6 bolt PNs 69000007 69000023 69000025 69000034 69000036 69000115 69000214 69001207 MC B6N femal...

Страница 39: ...9000080 14 turns taps at4 6 8 10 12 14 turns default tap setting on 3 PNs 69000004 69000018 69000022 69000023 69000024 69000025 69000034 69000046 690001 14 69000115 69000230 69000227 69000229 69001207...

Страница 40: ...69000025 69000046 69000114 69000115 69000214 69000230 69000227 69000229 69000032 69000034 69001207 69001214 2 turns 3 taps default B PN 6900003 69000036 69000037 69000080 69000082 69000116 69000228 2...

Страница 41: ...VDC to 10 VDC voltage Runtime from start point to end 3 seconds point Tuning range To reach appropriate resistance and reactance values you may need to change load and or tune coil settings See Set U...

Страница 42: ...n tuning ranges possible for your unit see Chapter 7 VarioMatch Match Network Tuning Ranges VM1 000 Series Table 3 2 describes the VM 1000 series electrical specifications Table 3 4 Electricalspecific...

Страница 43: ...g ranges possible for your unit see Chapter 7 VarioMatch Match Network Tuning Ranges VM 1 500 Series Table 3 5 describes the VM 1500 series electrical specifications Table 3 5 Electricalspecifications...

Страница 44: ...2207 69002208 35 A PN 69000007 69000041 55 A Maximum RF load voltage 4000 Vpeak Input impedance to generator son Maximum load DC selfbias 0 VDC to 4000 VDC voltage DC selfbias monitor voltage 0 V to l...

Страница 45: ...hat show only A after the model name or Air and Water cooled for unitsthat show W or AW after the model name Minimum water flow 1 1pm 0 26 gpm Water pressure 0 5 bar 7 25 psi differential as required...

Страница 46: ...total sulfate 100 ppm total dissolved solids 250 ppm total hardness expressed as calcium carbonate equivalent maximum 250 ppm 250ppm specific resistivity of 2500 Q cm or higher at 25 C total dissolved...

Страница 47: ...n ofice Air Pressure 78 kPa to 106 kPa 788 mbar to 1060 mbar Equivalent altitude 2000 m to 500 m 6562 ft to 1640 ft 78 kPa to 106 kPa 788 mbar to 1060 mbar Equivalent altitude 2000 m to 500 m 6562 ft...

Страница 48: ...Advanced Energy 3 18 Specifications 57020080 00D...

Страница 49: ...preset and monitoring functionality for a VarioMatch match network by an AE generator such as a CESAR It can also be used by an external controller Table 4 1 on page 4 2 describes each pin used in th...

Страница 50: ...ignals are referenced to ground All inputs need to be switched to ground to activate all outputs are open collector Table 4 1 VarioMatch match INTERFACE connectorpin description Pin Return Pin 1 GND 2...

Страница 51: ...ly SUPPLY For external use Maximum current draw lO0 mA 12 6 DC Output DC selfbias test voltage SELFBIAS MONITOR Provides a test voltage to monitor the DC self bias ofthe plasma electrode in the vacuum...

Страница 52: ...s approximately 0 3 V representing the minimum capacity of CLoad The maximum voltage is approximately 9 7 V representing the maximum capacity of CLoad This open collector output is pulled low when the...

Страница 53: ...orm User supplied circuitry may vary I I J I I I I I nGnd Figure 4 3 Pin 1O User supplied circuitry may vary Figure 4 4 Pin 11 I I v I I I I I n I Gnd Internal circuitry Internal circuitry 3441 570200...

Страница 54: ...nal circuitry 10kQ 1 kQ 12 I I I I I nGnd 100 nF Figure 4 5 Pin 12 User supplied circuitry mayvary I I I I I I I 10 kQ Internal circuitry f G f100 F 21 2 4 6 I I I I n I Gnd I Figure 4 6 Pins 13 14 Co...

Страница 55: ...RFACE Pin Common connection of all 5 switches Ground 1 Switch 1 motor 1 run clockwise decrease Cnme 2 Switch 2 motor 1 run counter increase Cnme 3 clockwise Switch 3 motor 2 run clockwise decrease CLo...

Страница 56: ...Advanced Energy 4 8 Communication Interfaces and Controls 57020080 00D...

Страница 57: ...Requirements Install this unit according tothefollowing requirements WARNING Maintenance personnel must receive propertraining before installing troubleshooting or maintaining high energy electrical e...

Страница 58: ...trap connector and the ground strap See the Physical Specifications on page 3 1 to see which PLASMA LOAD connector your unit uses For water cooled units Plastic hose 6 mm OD 4 mm ID 0 24 OD 0 16 ID se...

Страница 59: ...stem The following is important information for connecting to PLASMA LOAD There will be a high RF current flowing between the VarioMatch match network and the load The RF output PLASMA LOAD is much hi...

Страница 60: ...d for this connection than a thick wire See the Physical Specifications on page 3 1 to see which connector your unit uses SHIELDING THE RF CONNECTIONS Shield all RF connections to prevent RF radiation...

Страница 61: ...ifications on page 3 1 for dimensions and spacing requirements Ensure the unit will remain within the specified operating temperatures See Cooling Specifications on page 3 14 Ensure that exhausted air...

Страница 62: ...devices Electrical shock from the VarioMatch match network cabinet To Properly Ground the VarioMatch Match Network Mount the unit as described in Mounting the VarioMatch Match Network on page 5 6 RF...

Страница 63: ...ounting platewith four M6 screws Connecting the Match INTERFACE Optional The 15 pin female subminiature D connector on the front panel lets you connect the VarioMatch match network to an external remo...

Страница 64: ...rotect the unit and the environment To Connect CoolingWater 1 Install the user supplied water lines to WATER IN and WATER OUT See the SERTO documentation for instructions on properly connecting the wa...

Страница 65: ...ad Note VM 69000082 The RF outputconnector is customer supplied See your company s internal documentation for information The VarioMatch match network uses one ofthe following RF Output PLASMA LOAD co...

Страница 66: ...igure 5 5 and Figure 5 6 on page 5 10 6 mm brass tube fitting Figure 5 7 on page 5 11 3281 Figure 5 4 7 16 DIN female connector 3277 Figure 5 5 MC6connector 19 5 mm 0 77 23 5 mm 0 93 51 5 mm 2 03 Figu...

Страница 67: ...Attach the AB supplied MC6 plug to one end of auser supplied cableor copper strap Attach the plug to theMC6PLASMA LOAD output connector Attach the other end of the cable or copper strap to the load F...

Страница 68: ...ting the AC MAINS cord with your input power source see Chapter 3 Specifications for the input voltage for your unit Note The VarioMatch match network does not contain an on off power switch To turn o...

Страница 69: ...and appropriate response from your load 57020080 00D For example if you are using a plasma chamber look for the following a Is the plasma lit If not you may have a faulty connector or too little inpu...

Страница 70: ...switch To turn on the unit connect the VarioMatch match network to the AC MAINS connector Use the AC MAINS cable appropriate for your installation 100 V to 240V at 50 Hz to 60 Hz Also read the inform...

Страница 71: ...Up the Match for Your Load on page 5 16 Manual Tune Mode In addition to the automatic mode all VarioMatch match network models can be controlled manually by means of an external controller This contr...

Страница 72: ...nnection to the match INTERFACE Host Port You can use the Cesar generator Host Port to control the VarioMatch match network See the Cesar generator user manual for additional information Importance of...

Страница 73: ...mined by two major match components The variable capacitors The variable capacitors are determined by the VarioMatch match network model you purchased The capacitors use motors to match the load The c...

Страница 74: ...e 3 7 for your unit s internal coil specifications SETTING TUNE COIL TAPS The number ofturns and available taps enables the VarioMatch match network to be flexible enough to match nearly all load syst...

Страница 75: ...match network by unscrewing the twelve screws on the cover Leave the small top and side covers in place b Disconnect the plug leading from top lid to the fan 6 Using a 7 mm wrench unscrew the tap from...

Страница 76: ...e wrench screw the tap to the selected tum on the coil Tune coil tap position for small capacitive load PLASMNLOAD Figure 5 9 Tapping ofthe tune coil forsmall capacitive load 5 20 Installation Setup a...

Страница 77: ...chTM Match Network VM 1000 1500 Platform Tune coil tap positionformedium capacitive load PLASMNLOAD Figure 5 10 Tapping ofthe tune coilformedium capacitive load 57020080 00D Installation Setup and Ope...

Страница 78: ...the Correct Tap Setting for the Load Coil 5 22 See Physical Specifications Table on page 3 7 for your unit s internal coil specifications The other device in the match network thataffects the range o...

Страница 79: ...on for medium size loads Use the position furthest from the load capacitor for large loads For specific recommendations contact Global Services To Change the Tap Settings on the Load Coil 1 Tum off RF...

Страница 80: ...Advanced Energy Figure 5 12 Tapposition forsmall loads RFGENERATOR connection Load coil tapposition A forsmall loads 5 24 Installation Setup and Operation 57020080 00D...

Страница 81: ...arioMatchTM Match Network VM 1000 1500 Platform RFGENERATOR connection 1 Load coil tap position B formedium loads Figure 5 13 Tapposition formedium loads 57020080 00D Installation Setup and Operation...

Страница 82: ...fan RFGENERATOR connection Load coil tap position C for large loads b Attach the top coverusing the twelve screws you removed in step 2 9 ReconnectPLASMA LOAD RF GENERATOR and AC MAINS as described in...

Страница 83: ...two different load impedance ranges By changing the capacitor s interconnection you can change the topology of the VarioMatch match network See Chapter 3 Specifications for a list of part numbers that...

Страница 84: ...interconnector You will need to supply the following additional equipment 7 mm wrench 12 mm wrench 14 mm wrench DISCONNECTING POWER AND RF AND REMOVING THE COVER To Disconnect Power and RF and toRemov...

Страница 85: ...igure 5 15 Alternate interconnectorand bridge 2 Disconnect water and drain the unit See Disconnecting Water and Draining the VarioMatch Match Network on page 5 38 3 Using a 12 mm wrench disconnect the...

Страница 86: ...h the hole in thebridge 9 Replace thenut from the copper tube 10 Replace the compression nut from the copper tube 11 Attach the new interconnector The new interconnector attaches a On the non water su...

Страница 87: ...hTM Match Network VM 1000 1500 Platform Step 8 Step 9 Step 11_ a Step 10 Figure 5 17 Attach the new interconnector 57020080 00D Installation Setup and Operation New interconnector Step 11_b bridge __...

Страница 88: ...32 CHANGING THE JUMPERS To Change theJumpers 1 Removethe frontpanelby unscrewingtheelevenscrewsas shown thenremove the front panel Screws Figure 5 18 Remove the frontpanel Installation Setup and Opera...

Страница 89: ...work VM 1000 1500 Platform 2 Carefully remove the three solder joints on the left box as shown and remove the top of the box Solder locations Figure 5 19 Remove solderjoints 57020080 00D Installation...

Страница 90: ...s as needed for the desired configuration see Figure 5 20 on page 5 34 and Figure 5 21 on page 5 35 Twojumpersonthe left two posts for L topology Figure 5 20 Jumpersetting forLmatch topology Installat...

Страница 91: ...e front panel by replacing the eleven screws REATTACHING THE TOP COVER AND RECONNECTING POWER AND RF To Reattach theTop Coverand Reconnect Powerand RF 1 Reattach the top cover a Plug in the fan b Atta...

Страница 92: ...GENERATOR 4 Disconnect RF out PLASMA LOAD 5 Remove the top cover being careful to not damage the plug leading to the fan a Remove the largetop cover with thefan from the VarioMatch match network by un...

Страница 93: ...he location of the circuit board andjumpers Table 5 3 Capacitance due tojumpersettings on circuitboard Bridge Capacitance J1 J2 J3 0 pF X 680pF X 1360 pF X X 2040 pF X X 2720 pF X X X 3400 pF J1 J2 Fi...

Страница 94: ...g Failure to do so can result in damage to the unit during shipping Note You must evacuate the water from both the rack and from individual CESAR generators in the rack The following steps are listed...

Страница 95: ...PLASMA LOAD connector For information to assist you in this procedure see Connecting to the Load on page 5 9 5 Disconnect the cooling hoses For information to assist you in this procedure see Connect...

Страница 96: ...Advanced Energy 5 40 Installation Setup and Operation 57020080 00D...

Страница 97: ...or warnings and resume normal operation after following these checks and procedures contact AE Global Services Troubleshooting Checklists on page 6 2 Use these checklists to begin troubleshooting your...

Страница 98: ...Checks With the Power Off With PowerOff Complete theFollowing Checks 1 Ensure the power to the unit is off 2 Check for visible damage to the unit cables and connectors 3 Ensure all unit connectors ar...

Страница 99: ...rkoutput connector the output cable or lead or the chamber Follow the steps below 1 Disconnect AC MAINS from both the generator and the VarioMatch match network to ensure that there is no RF power at...

Страница 100: ...have the unit serial number and part number These numbers are available on unit labels Advanced Energy World Headquarters 24 x 7 Technical Support 6 4 Table 6 1 AE Global Services contactinformation O...

Страница 101: ...ure instructs you to contact AE Global Services and discuss the problem with a representative Be prepared to give them the model number and serial number of the unit as well as the reason for the prop...

Страница 102: ...Advanced Energy 6 6 Troubleshooting and Global Services 57020080 00D...

Страница 103: ...nd tap settings of the load and tune coils of your unit see Physical Specifications Table on page 3 7 14 TURN TUNE SERIES COIL Schematic The tune series coil has taps at4 6 8 10 12 and 14 turns These...

Страница 104: ...Coil Tap Setting Tap Setting A B C 1 Figure 7 2 Figure 7 8 Figure 7 14 2 Figure 7 3 Figure 7 9 Figure 7 15 3 Figure 7 4 Figure 7 10 Figure 7 16 4 Figure 7 5 Figure 7 1 1 Figure 7 17 5 Figure 7 6 Figu...

Страница 105: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 2 Tune coil 14 turns tap 1 Load coil 3 turns tap A 57020080 00D VarioMatch Match Network Tuning Ranges 7 3...

Страница 106: ...Advanced Energy Figure 7 3 Tune coil 14 turns tap2 Load coil 3 turns tap A 7 4 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 107: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 4 Tune coil 14 turns tap 3 Load coil 3 turns tap A 57020080 00D VarioMatch Match Network Tuning Ranges 7 5...

Страница 108: ...Advanced Energy Figure 7 5 Tune coil 14 turns tap 4 Load coil 3 turns tap A 7 6 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 109: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 6 Tune coil 14 turns tap 5 Load coil 3 turns tap A 57020080 00D VarioMatch Match Network Tuning Ranges 7 7...

Страница 110: ...Advanced Energy Figure 7 7 Tune coil 14 turns tap 6 Load coil 3 turns tap A 7 8 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 111: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 8 Tune coil 14 turns tap 1 Load coil 3 turns tap B 57020080 00D VarioMatch Match Network Tuning Ranges 7 9...

Страница 112: ...Advanced Energy Figure 7 9 Tune coil 14 turns tap2 Load coil 3 turns tap B 7 10 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 113: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 10 Tune coil 14 turns tap 3 Load coil 3 turns tap B 57020080 00D VarioMatch Match Network Tuning Ranges 7 11...

Страница 114: ...Advanced Energy Figure 7 11 Tune coil 14 turns tap 4 Load coil 3 turns tap B 7 12 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 115: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 12 Tune coil 14 turns tap 5 Load coil 3 turns tap B 57020080 00D VarioMatch Match Network Tuning Ranges 7 13...

Страница 116: ...Advanced Energy Figure 7 13 Tune coil 14 turns tap 6 Load coil 3 turns tap B 7 14 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 117: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 14 Tune coil 14 turns tap 1 Load coil 3 turns tap C 57020080 00D VarioMatch Match Network Tuning Ranges 7 15...

Страница 118: ...Advanced Energy Figure 7 15 Tune coil 14 turns tap2 Load coil 3 turns tap C 7 16 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 119: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 16 Tune coil 14 turns tap 3 Load coil 3 turns tap C 57020080 00D VarioMatch Match Network Tuning Ranges 7 17...

Страница 120: ...Advanced Energy Figure 7 17 Tune coil 14 turns tap 4 Load coil 3 turns tap C 7 18 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 121: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 18 Tune coil 14 turns tap 5 Load coil 3 turns tap C 57020080 00D VarioMatch Match Network Tuning Ranges 7 19...

Страница 122: ...Advanced Energy Figure 7 19 Tune coil 14 turns tap 6 Load coil 3 turns tap C 7 20 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 123: ...500 coilandinductorschematic 6turncoil Smith Charts T able 7 2 Location ofSmith chartillustrations for6 turn tune coil Tune Coil VarioMatch Frequency Tap Setting 27 MHz 40 MHz 1 Figure 7 21 Figure 7 2...

Страница 124: ...Advanced Energy 27 MHZ UNITS Figure 7 21 27MHz Tune coil 6 turns tap 1 7 22 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 125: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 22 27 MHz Tune coil 6 turns tap 2 57020080 00D VarioMatch Match Network Tuning Ranges 7 23...

Страница 126: ...Advanced Energy Figure 7 23 27 MHz Tune coil 6 turns tap 3 7 24 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 127: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 24 27 MHz Tune coil 6 turns tap 4 57020080 00D VarioMatch Match Network Tuning Ranges 7 25...

Страница 128: ...Advanced Energy Figure 7 25 27 MHz Tune coil 6 turns tap 5 7 26 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 129: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 26 27 MHz Tune coil 6 turns tap 6 57020080 00D VarioMatch Match Network Tuning Ranges 7 27...

Страница 130: ...Advanced Energy 40 MHZ UNITS Figure 7 27 40 MHz Tune coil 6 turns tap 1 7 28 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 131: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 28 40 MHz Tune coil 6 turns tap 2 57020080 00D VarioMatch Match Network Tuning Ranges 7 29...

Страница 132: ...Advanced Energy Figure 7 29 40 MHz Tune coil 6 turns tap 3 7 30 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 133: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 30 40 MHz Tune coil 6 turns tap 4 57020080 00D VarioMatch Match Network Tuning Ranges 7 31...

Страница 134: ...Advanced Energy Figure 7 31 40 MHz Tune coil 6 turns tap 5 7 32 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 135: ...0415 Schematic The tune series coil has taps at taps at 10 13 16 19 22 and 25 turns These are labeled 1 through 6 in the schematic The load shunt coil has 4 turns with 5 taps labeled A B C D and E Th...

Страница 136: ...orthe2 MHz VM4015 show the tuning range withtune coil tap set at 6 load coil tap set at E The tune range varies by capacitance setting T able 7 3 Location ofSmith chartillustrations for2 MHz VM0415 Ca...

Страница 137: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 34 2 MHz Tune coil 6 Load coil E OpF 57020080 00D VarioMatch Match Network Tuning Ranges 7 35...

Страница 138: ...Advanced Energy Figure 7 35 2 MHz Tune coil 6 Load coil E 680 pF 7 36 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 139: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 36 2 MHz Tune coil 6 Load coil E 1360pF 57020080 00D VarioMatch Match Network Tuning Ranges 7 37...

Страница 140: ...Advanced Energy Figure 7 37 2 MHz Tune coil 6 Load coil E 2040pF 7 38 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 141: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 38 2 MHz Tune coil 6 Load coil E 2720pF 57020080 00D VarioMatch Match Network Tuning Ranges 7 39...

Страница 142: ...oil tap setting AE does not recommend varying the additional capacitance setting Table 7 4 Location ofSmith for4 MHz VM 0415 Tune Coil Load Coil Tap Setting Tap Setting A B C D E 1 Figure 7 40 Figure...

Страница 143: ...42 Figure 7 48 Figure 7 54 Figure 7 60 Figure 7 66 4 Figure 7 43 Figure 7 49 Figure 7 55 Figure 7 61 Figure 7 67 5 Figure 7 44 Figure 7 50 Figure 7 56 Figure 7 62 Figure 7 68 6 Figure 7 45 Figure 7 5...

Страница 144: ...Advanced Energy Figure 7 41 4 MHz Tune coil 25 turns tap 2 Load coil 4 turns tap A 7 42 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 145: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 42 4 MHz Tune coil 25 turns tap 3 Load coil 4 turns tapA 57020080 00D VarioMatch Match Network Tuning Ranges 7 43...

Страница 146: ...Advanced Energy Figure 7 43 4 MHz Tune coil 25 turns tap 4 Load coil 4 turns tap A 7 44 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 147: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 44 4 MHz Tune coil 25 turns tap 5 Load coil 4 turns tap A 57020080 00D VarioMatch Match Network Tuning Ranges 7 45...

Страница 148: ...Advanced Energy Figure 7 45 4 MHz Tune coil 25 turns tap 6 Load coil 4 turns tap A 7 46 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 149: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 46 4 MHz Tune coil 25 turns tap 1 Load coil 4 turns tap B 57020080 00D VarioMatch Match Network Tuning Ranges 7 47...

Страница 150: ...Advanced Energy Figure 7 47 4 MHz Tune coil 25 turns tap 2 Load coil 4 turns tap B 7 48 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 151: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 48 4 MHz Tune coil 25 turns tap 3 Load coil 4 turns tap B 57020080 00D VarioMatch Match Network Tuning Ranges 7 49...

Страница 152: ...Advanced Energy Figure 7 49 4 MHz Tune coil 25 turns tap 4 Load coil 4 turns tap B 7 50 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 153: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 50 4 MHz Tune coil 25 turns tap 5 Load coil 4 turns tap B 57020080 00D VarioMatch Match Network Tuning Ranges 7 51...

Страница 154: ...Advanced Energy Figure 7 51 4 MHz Tune coil 25 turns tap 6 Load coil 4 turns tap B 7 52 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 155: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 52 4 MHz Tune coil 25 turns tap 1 Load coil 4 turns tap C 57020080 00D VarioMatch Match Network Tuning Ranges 7 53...

Страница 156: ...Advanced Energy Figure 7 53 4 MHz Tune coil 25 turns tap 2 Load coil 4 turns tap C 7 54 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 157: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 54 4 MHz Tune coil 25 turns tap 3 Load coil 4 turns tap C 57020080 00D VarioMatch Match Network Tuning Ranges 7 55...

Страница 158: ...Advanced Energy Figure 7 55 4 MHz Tune coil 25 turns tap 4 Load coil 4 turns tap C 7 56 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 159: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 56 4 MHz Tune coil 25 turns tap 5 Load coil 4 turns tap C 57020080 00D VarioMatch Match Network Tuning Ranges 7 57...

Страница 160: ...Advanced Energy Figure 7 57 4 MHz Tune coil 25 turns tap 6 Load coil 4 turns tap C 7 58 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 161: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 58 4 MHz Tune coil 25 turns tap 1 Load coil 4 turns tap D 57020080 00D VarioMatch Match Network Tuning Ranges 7 59...

Страница 162: ...Advanced Energy Figure 7 59 4 MHz Tune coil 25 turns tap 2 Load coil 4 turns tap D 7 60 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 163: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 60 4 MHz Tune coil 25 turns tap 3 Load coil 4 turns tap D 57020080 00D VarioMatch Match Network Tuning Ranges 7 61...

Страница 164: ...Advanced Energy Figure 7 61 4 MHz Tune coil 25 turns tap 4 Load coil 4 turns tap D 7 62 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 165: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 62 4 MHz Tune coil 25 turns tap 5 Load coil 4 turns tap D 57020080 00D VarioMatch Match Network Tuning Ranges 7 63...

Страница 166: ...Advanced Energy Figure 7 63 4 MHz Tune coil 25 turns tap 6 Load coil 4 turns tap D 7 64 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 167: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 64 4 MHz Tune coil 25 turns tap 1 Load coil 4 turns tap E 57020080 00D VarioMatch Match Network Tuning Ranges 7 65...

Страница 168: ...Advanced Energy Figure 7 65 4 MHz Tune coil 25 turns tap 2 Load coil 4 turns tap E 7 66 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 169: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 66 4 MHz Tune coil 25 turns tap 3 Load coil 4 turns tap E 57020080 00D VarioMatch Match Network Tuning Ranges 7 67...

Страница 170: ...Advanced Energy Figure 7 67 4 MHz Tune coil 25 turns tap 4 Load coil 4 turns tap E 7 68 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 171: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 68 4 MHz Tune coil 25 turns tap 5 Load coil 4 turns tap E 57020080 00D VarioMatch Match Network Tuning Ranges 7 69...

Страница 172: ...Advanced Energy Figure 7 69 4 MHz Tune coil 25 turns tap 6 Load coil 4 turns tap E 7 70 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 173: ...Platform ICP Schematics Cselies RF IN RF OUT Cslnmt Figure 7 70 GP coil and inductorschematic Gamma RF IN Liu wire Csbunt Cseiies RF OUT Figure 7 71 GP coil and inductorschematic L match 57020080 00D...

Страница 174: ...Advanced Energy Smith Charts Figure 7 72 VM 1500 Gamma 7 72 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 175: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 73 VM 1500 L match 57020080 00D VarioMatch Match Network Tuning Ranges 7 73...

Страница 176: ...Advanced Energy Figure 7 74 VM4015 Gamma 7 74 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 177: ...chTM Match Network VM 1000 1500 Platform DELTA MATCH Schematic RF IN Lin Cseries wire Cshunt Lout Figure 7 75 Delta match coilandinductorschematic 57020080 00D VarioMatch Match Network Tuning Ranges R...

Страница 178: ...Advanced Energy Smith Chart Figure 7 76 Tune coil 2 5 turns VM PN 69000082 Schematic and Smith charts are not available 7 76 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 179: ...C j 99 26 5 hum IT Q RF OUI Loni Figure 7 77 VM 700coilandinductorschematic Smith Chart The Smith charts in this manual show the tuning only at tap A on the load coil Although the tuning differs for t...

Страница 180: ...tillustrations for VM 700 Tune Coil Load Coil Tap Setting Tap Setting A 7 Figure 7 84 8 Figure 7 85 9 Figure 7 86 10 Figure 7 87 Figure 7 78 Tune coil 10 turns tap 1 Load coil 3 turns tap A 7 78 Vario...

Страница 181: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 79 Tune coil 10 turns tap2 Load coil 3 turns tap A 57020080 00D VarioMatch Match Network Tuning Ranges 7 79...

Страница 182: ...Advanced Energy Figure 7 80 Tune coil 1O turns tap 3 Load coil 3 turns tap A 7 80 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 183: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 81 Tune coil 1O turns tap 4 Loadcoil 3 turns tapA 57020080 00D VarioMatch Match Network Tuning Ranges 7 81...

Страница 184: ...Advanced Energy Figure 7 82 Tune coil 1O turns tap5 Loadcoil 3 turns tapA 7 82 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 185: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 83 Tune coil 1O turns tap 6 Load coil 3 turns tap A 57020080 00D VarioMatch Match Network Tuning Ranges 7 83...

Страница 186: ...Advanced Energy Figure 7 84 Tune coil 1O turns tap 7 Load coil 3 turns tap A 7 84 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 187: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 85 Tune coil 10 turns tap 8 Load coil 3 turns tap A 57020080 00D VarioMatch Match Network Tuning Ranges 7 85...

Страница 188: ...Advanced Energy Figure 7 86 Tune coil 1O turns tap 9 Load coil 3 turns tap A 7 86 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 189: ...AE VarioMatchTM Match Network VM 1000 1500 Platform Figure 7 87 Tune coil 10 turns tap 10 Loadcoil 3 turns tap A 57020080 00D VarioMatch Match Network Tuning Ranges 7 87...

Страница 190: ...Advanced Energy 7 88 VarioMatch Match Network Tuning Ranges 57020080 00D...

Страница 191: ...3 1O specifications 3 8 3 9 3 10 tune 2 4 2 5 compliance directives and standards 1 4 unit 1 3 conditions of use 1 5 connecting AC input 5 11 57020080 00D CESAR generator 4 1 cooling water 5 7 ground...

Страница 192: ...22 set up the match 5 16 load checks troubleshooting 6 3 M MAINS seealsoAC input connector 3 8 5 12 manual tuning mode 5 15 marking CE 1 3 maximum load DC selfbias voltage 3 11 3 12 3 13 3 14 maximum...

Страница 193: ...er 3 11 3 12 3 13 mounting 3 7 overvoltage category 3 17 physical 3 1 3 7 PLASMA LOAD connector 3 8 pollution degree 3 17 RF input connector 3 7 runtime 3 11 3 12 3 13 3 14 size 3 7 spacing requiremen...

Страница 194: ...3 11 3 12 3 13 warranty authorized returns 6 5 water connecting 5 7 connectors 3 8 contaminants specification 3 16 flow specification 3 15 hose specificatinos 5 2 pressure specification 3 15 temperat...

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