Advanced Energy VarioMatch Match Network VM 1000 Platform, Руководство пользователя

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Services (see Chapter 6, ''Troubleshooting and Global Services" ).
d. Did reflected power decrease to within specifications? If not, ensure the
capacitors are within the tuning range of 30 to 80%.
e. Did the motors stop moving? If the motors do not stop moving, ensure the
capacitors are within the tuning range of 30 to 80%.
4. Vary the chamber conditions according to your process requirements, and verify
that the V arioMatch match ne t work can cover the required load impedance range.
NORMAL OPERATION
The VarioMatch Match Network operates in the following modes:
•
"Automatic Tune Mode" on page 5-14
•
"Manual Tune Mode" on page 5-15
When connected to the AC power MAINS, t h e VarioMatch match network will
immediate l y tum on in the automatic tune mode. To manually tune the capacitors, use
a match controller or an AE Cesar RF generator (see "Interaction With a Cesar
Generator" on page 5-16 ) .
To allow easy incorporation of the V arioMatch match network into most any l oad
system, the unit does not use an on/off switch. To turn on the unit, connect the
VarioMatch match network to t he AC
MAINS
connector. Use the AC
MAINS
cable
appropriate for your installation (100 V to 240 V at 50 Hz to 60 Hz).
Also read the information in "Importance of Igniting Plasma" on page 5-16 .
Automatic Tune Mode
5-14
AE recommends using automatic tune mode for normal operation. In automatic tune
mode, the VarioMatch match network controls the impedance functions internally.
Automatic tune mode requires no user interface. Whenever the V arioMatch ma t c h
network detects RF power, the uni t automatical l y moves the capacitors to optimum
positions and minimizes the reflected power.
A minim u m RF inp u t power is necessary to allow the electronic circuit to work
properly and accurately and to a u t omatically tune the network for minimum reflected
power. This minimum input power is approximately 1
%
of the maximum transfer
power (see Chapter 3, "Specifications" ).
The magnitude (amplitude) detector checks the RF voltage and RF current present on
the 50 Q l ine between RF generator and V arioMatch match network, and then
compares this with 50 Q. The magnitude detector drives the load variable capacitor.
I nsta ll at i on , Setup, and Operat i on
57020080-00D