5 Operations After Start of Probing
5-9
5.6.1 Tips for multi-pass probing
1) Utilize the map data utility for initializing a floppy disk to be used for the multi-pass probing.
After the disk formatting, perform the "Index Creation" for controlling the wafer map data
files in the floppy disk. (Max. 200 indexes can be created to give the capacity of recording
max. 200 wafers' map data to each disk.)
2) At the initial test of a target lot, insert the formatted floppy disk into the Prober's FDD and set
"Output Map Data To" in [Map Output Settings] menu of Basic Operational parameters to
"FD".
3) In the re-probing, Prober will read in a map data file corresponding to each wafer ID. Unless
the wafer ID automatic recognition is used, take care of the wafer numbering in the lot
management.
4) Before beginning the re-probing, insert the floppy disk containing the map data of the target
lot into the Prober's FDD and set "Input Map Data From" in [Map Input Settings] menu of
Basic Operational parameters to "FD".
5) Remembering the selection on [Multi Pass Probing Settings] menu of Basic Operational
parameters, open [Operation Settings] screen and instruct the start of the re-probing and the
marking mode after the re-probing.
Formatting a floppy disk
In the Prober's idle (halting) state, touch the <Utility>
button appearing on the right side of the screen to
open the utility menu. Touch "Map Data Utility" area.
Insert into the Prober's FDD a floppy disk to be used
for the multi-pass probing, and touch the <FD>
button on the screen. Then touch the <FD Format>
button; the display will change to [Type of Floppy
Disk Format] screen as shown on the next page in
the top.
