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IM 1M11A01-03E
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Restrictions on Use
• Do not use the equipment in atmospheres containing combustible, corrosive, or flue
gases, or organic compounds.
• If it is used in silicon gas atmospheres, in flow furnaces or nitrogen reflow furnaces,
the equipment must be used in the following system:
• The sampling unit, K9424GA, must be used.
• The sampling unit requires appropriate maintenance, which is determined by gas
conditions. Filters and activated carbon packs should be replaced at intervals which
depend on the operating conditions.
For best measurement, use new activated carbon packs. Using expired packs may
result in invalid measurement results, or even sensor deterioration.
• If you have any questions, please contact your Yokogawa representative.