Series 613
OPERATION
984360EC
Edition 12.08.2022
97/149
Execute a learn procedure
1. Set specific gas flow according to calculation below or the calculation in the CPA
‘Adaptive
Learn’ window:
Learn does not need to be performed with the process gas. Instead N
2
or Ar may be used.
2. Set parameter Bank Selection, if only one learn is used take Bank 1. Be sure that the pressure
controller also selects this learn bank!
3. Reduce Open Speed if it is critical for the chamber if the pressure drops rapidly when the valve
is opened.
4. Set a Pressure Limit [SFS] limit if sensor full scale cannot or should not be reached.
5. Set parameter Controller Mode to LEARN.
6. Wait until the Controller Mode leaves the LEARN state
Learn is finished
7. Check if the learn was successful by checking if Status shows value 2 (=Completed
Successfully). In best case Warning Info shows no warning.
Sensor signal must not shift during LEARN. Wait until sensor signal is stable
before LEARN is performed. Learn may take several minutes.
Do not interrupt the routine as a single full run is required to ensure fast and
accurate pressure control.
The PID controller covers 5% to 5000% of the gas flow which was used for learn.
CPA window ‘Adaptive Learn’
