INSTALLATION
Series 613
70/149
Edition 12.08.2022
984360EC
5.12.8.3
Command Set PM V2
Note:
This command set is quite the same as Command Set PM.
Differences:
Same commands as Command Set PM except Setup
(s: instead of s:1 and s:2)
Communication range for Pressure is settable
(see s: command below)
Additional commands: U:18, U:19; U:20, i:08, i:09
Set
Resp
Get
Resp
Data
Set, Get Resp
Description
s:
s:
i:02
i:02
abcdefg
Setup Sensor 1 and Sensor 2
a Sensor Type
0=mBar, 1=Torr
b
c
Sensor 1 Full scale
Sensor 2 Full scale
0=0.01,1=0.02,2=0.025,3=0.05,4=0.1,5=0.2,6=0.25,7=0.58=1.0,9=2.0,A=2.5,B=5.0C=10,
D=20,E=25,F=50G=100,H=200,I=25,J=500,K=1000,L=not connected
d Display Unit
not used
0 = mbar, 1 = μbar, 2 = Torr, 3 = mTorr, 4 = Pa, 5 = kPa, 6 = position mode only
e Communication Range Pressure
0 = 0 – 1000, 1 = 0 – 2000, 2 = 0 – 2500, 3 = 0 – 5000,4 = 0 – 10000,5 = 0 - 20000
6 = 0 – 25000,7 = 0 – 50000,8 = 0 - 100000
f Gain Factor
0=0.1,1=0.13,2=0.18,3=0.23,4=0.32,5=0.42,6=0.56,7=0.75,8=1.0,9=1.33,A=1.78,B=2.37,
C=3.16,D=4.22,E=5.62,F=7.5,G=0.0001,H=0.0003,I=0.001,J=0.003,K=0.01,L=0.02,M=0.05
g Zero Adjust:
0=disabled, 1=enabled
U:18
U:18
Use Sensor 1
U:19
U:19
Use Sensor 2
U:20
U:20
Use Both Sensors
i:08
i:08
aaaaaa
Offset Sensor 1
i:09
i:09
aaaaaa
Offset Sensor 2
Errors
Note: This are additional errors to the errors in the PM command set
Description
Error message
Error with ZERO
- PM controller is switched in control mode PRESSURE MODE
- ZERO function disabled with setup
E:
000200
Sensor with the higher full scale: zero offset higher than +/- 0.14V
E:
000201
Sensor with the lower full scale: zero offset higher than +/- 0.14V
E:
000202
Sensor setup error, The full scale ration senor1/sensor2 is either >100 or <= 1.0
E:
000203
RS232 commands U:18, U:19 or U:20 sent with 1 or no sensor connected
E:
000204
