Varian 959D, Operation Manual

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959D Leak Detector
3-10
DRAFT
9/13/02
3.4.2 Examining the Ion Source
1. Examine the ion source (Figure 3-10) and cavity (Figure 3-11) for deposits and
discoloration. If either item is discolored or dirty, it can be cleaned or it may have to be
replaced if VacuSolve will not effectively remove the offending material.
NOTE
VacuSolv is included in the Varian Vacuum Technologies’
Component and Spectrometer Tube Cleaning Kit (p/n
670029096). This compound is recommended for cleaning the
spectrometer tube components.
CAUTION
Do not clean filaments. They are extremely fragile.
Figure 3-10 Ion Source
NOTE
Dark carbon-like deposits around the ion source filament
and/or a rainbow-like discoloration on the inside walls of the
ion source cavity indicate that the spectrometer tube has been
operated at too high a pressure. This can occur from a system
pressure leak or transferring into test at too high a pressure.
VacuSolv can also be used for fine cleaning of other parts in the leak detector’s vacuum
system, such as valves and fittings. Rinsing or high-temperature drying are not required
following cleaning with VacuSolv. Although appropriate precautions are advised,
VacuSolv is compatible with most materials and does not contain toxic chemicals or
CFCs.
Filament 1
Filament 2