Varian 948, Operation And Service Manual

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Models 947, 948 and 960 Leak Detectors Operations and Service Manual
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4.2.4.1 Removal of the Spectrometer Tube and Preamplifier .................................. 4-12
4.2.4.2 Disassembly of the Spectrometer Tube and Preamplifier ............................ 4-14
4.2.4.3 Spectrometer Tube Cleaning ....................................................................... 4-16
4.2.4.4 Reassembly of the Spectrometer Tube and Preamplifier ............................. 4-16
4.2.4.5 Reinstallation of the Spectrometer Tube ...................................................... 4-19
4.2.5 Air Filter..................................................................................................................... 4-20
4.2.6 Spectrometer Tube Exchange .................................................................................. 4-21
4.2.6.1 Removing and Replacing both the Spectrometer Tube Assembly
and Preamplifier ....................................................................................................... 4-21
4.2.6.2 Reinstalling the Spectrometer Tube ............................................................. 4-21
4.2.7 TC1 and TC2 Gauge Replacement and Calibration ................................................. 4-23
4.2.7.1 Replacement of the TC1 Gauge in the Main Valve Block Assembly ............ 4-23
4.2.7.2 Replacement of the TC2 Gauge in the Service Block Assembly ................. 4-25
4.2.7.3 Thermocouple Gauge Calibration Procedures ............................................. 4-27
4.2.7.4 System Pressure Gauge (TC2) Calibration .................................................. 4-27
4.2.7.4.1 Vacuum (Low Pressure) Calibration .............................................. 4-27
4.2.7.4.2 Atmospheric Calibration ................................................................ 4-28
4.2.7.5 Test Port Pressure Gauge (TC1) Calibration ............................................... 4-29
4.2.7.6 Vacuum (Low Pressure) Calibration ............................................................. 4-29
4.2.7.7 Atmospheric Calibration ............................................................................... 4-30
4.2.8 Rough Pump and Forepump Oil Level Check (Oil-sealed Mechanical Pumps)........ 4-31
4.2.8.1 Condition of Oil (Oil-sealed Mechanical Pumps) .......................................... 4-32
4.2.9 Cleaning the Test Port .............................................................................................. 4-32
4.2.9.1 Removing the Test Port ................................................................................ 4-32
4.2.9.2 Examining and Cleaning the Test Port ......................................................... 4-33
4.2.9.3 Replacing the Test Port ................................................................................ 4-34
4.3 Spare Parts ........................................................................................................................ 4-34
4.3.9.4 Exchange Assemblies .................................................................................. 4-34
4.3.9.5 Replacement Parts ....................................................................................... 4-35
Section 5. Troubleshooting ............................................................................................................. 5-1
5.1 Error Condition Codes ........................................................................................................ 5-2
5.2 Troubleshooting Symptoms and Solutions .......................................................................... 5-3
Appendix A. Service Pendant Keypad Functions ...........................................................................A-1
A.1 Keypad Functions ................................................................................................................A-1
A.1.1 Using the Service Pendant ........................................................................................A-2
A.2 Glossary of Function Keys...................................................................................................A-3
A.3 Glossary of Input and Data Keys .........................................................................................A-4
Appendix B. Parts Replacement .....................................................................................................B-1
B.1 Removing the Covers ..........................................................................................................B-1
B.1.1 Opening the Turret .....................................................................................................B-2
B.1.1.1 Removing the Service Pendant Shelf .............................................................B-2