B-1
Models 947, 948 and 960 Leak Detectors Operations and Service Manual
Appendix B. Parts Replacement
This appendix contains the following parts replacement procedures:
❑
“Removing the Covers” on page B-1
❑
“Replacing the Ion Source” on page B-6
❑
❑
“Replacing the Rough Pump” on page B-15
❑
“Replacing the Forepump” on page B-22
B.1 Removing the Covers
Before opening any part of Models 947/948/960 for service, heed the following:
WARNING
Disconnect power from the 947/948/960 before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
CAUTION
Models 948/960 only:
Remove, empty, and clean the cold trap
whenever power is removed. Refer to “Liquid Nitrogen Cold
Trap (Models 948/960 only)” on page 4-10,
CAUTION
Many components of the 947/948/960 are static sensitive
devices. Varian Vacuum Technologies recommends that you
wear a grounding device when performing any maintenance on
the 947/948/960 and especially when performing maintenance
of static sensitive parts.
Summary of Contents for 948
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